Pressure sensor with capacitor electrodes and shield layer parallel thereto

• US 5,920,015 A
• Filed: 08/25/1997
• Issued: 07/06/1999
• Est. Priority Date: 04/14/1994
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: Cecap AB
• Inventors: Jonsson, Staffan, Hallberg, Nils Gunno
• Primary Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/722,012
• Time in Patent Office: 680 Days
• Field of Search: 73/724, 73/718, 73/720, 73/721, 73/726, 73/727, 361/283.4, 338/42
• US Class Current: 73/724
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A capacitive sensor element for pressure sensors comprising a house part based on an electrically insulating material such as glass ceramic material and having on an interior surface a first capacitor plate. An opposing capacitor plate is attached to one side of a diaphragm of an electrically insulating material, which on its other side has an electrically conductive shielding layer that is intended to be connected to ground. The capacitor plates form an electrical capacitor, the capacitance of which is changed when the distance between the plates varies. A second electrically conductive shielding layer is preferably surrounded by the insulating material in the house part between a shielding plate and a thick support plate at a distance from the first capacitor plate. The second shielding layer is also intended to be connected to ground. By arranging the second shielding layer near the capacitor plates they are ensured a uniform electrical surrounding for reduction of the influence of stray capacitances. Further, the thick support plate gives the house part a good mechanical stability.

Claims

1. A sensor element for pressure sensors, comprising:

a house part of a substantially electrically insulating material, which on a first surface comprises a first capacitor electrode having a flat surface,

a diaphragm of a substantially electrically insulating material, which on a first surface comprises a second capacitor electrode having a flat surface, the capacitor electrodes being located opposite each other and having their flat surfaces located at a small distance from each other so that said electrodes form an electrical capacitor, the capacitance of which is changed when the distance between the electrodes varies,

an electrically conductive layer positioned within the house part with sides of the electrically conductive layer against interior opposite sides of the house part, wherein the electrically conductive layer is parallel to the flat surface of the first capacitor electrode, the electrically conductive layer has a substantially larger extension than the first capacitor electrode, an interior area of the electrically conductive layer is located opposite the first capacitor electrode.

2. A sensor element according to claim 1, wherein the diaphragm includes:

a second electrically conductive layer arranged on a second surface of the diaphragm, wherein the second surface is parallel to the first surface.

3. A sensor element according to claim 2, wherein the distance from the electrically conductive layer to the first capacitor electrode has the same order of magnitude as the distance from the second electrically conductive layer to the second capacitor electrode.

4. A sensor element according to one of claims 1-3, wherein the distance from the electrically conductive layer to the first capacitor electrode is small compared to the thickness of the diaphragm so that the electrically conductive layer is sufficiently close to the first capacitor electrode that the electrical surroundings of the first capacitor electrode will be highly uniform.

5. A sensor element according to one of claims 1-3, wherein the house part comprises a support plate of an electrically insulating material and a shielding plate of an electrically insulating material, wherein the shielding plate is thinner than the support plate, and the electrically conductive layer is arranged between the support plate and the shielding plate.

6. A sensor element according to one of claims 1-3, also including:

a reinforcement element of electrically insulating material having an outer edge portion attached to an outer edge portion of the diaphragm.

7. A sensor element according to claim 6, characterized in that the reinforcement element comprises a support plate having a plate shaped main part and an annular projection located at an edge thereof, on which a top surface is attached to the diaphragm.

8. A sensor element according to claim 6, characterized in that the reinforcement element comprises a support ring, on which an annular flat surface is attached to the diaphragm.

9. A sensor element according to claim 1, wherein the electrically insulating material is a glass ceramic material.

10. A sensor element according to claim 2, wherein the distance from the electrically conductive layer to the first capacitor electrode is smaller than the distance from the second electrically conductive layer to the second capacitor electrode.

11. A sensor element for pressure sensors, comprising:

a house part of a substantially electrically insulating material,

a diaphragm of a substantially electrically insulating material, wherein the diaphragm has an interior side and an exterior side, and an edge of the interior side of the diaphragm is attached to the house part,

means comprising or producing an electrically detectable quantity which is changed in response to change in an exterior pressure against the diaphragm,

a reinforcement element of an electrically insulating material, wherein the reinforcement element is a support ring having an annular flat surface attached to the exterior side of the diaphragm.

12. A method of producing a sensor element, comprising the steps of:

producing a house part of an electrically insulating material in the shape of a plate having an interior surface and exterior surface,

arranging or depositing on the interior surface a first capacitor electrode having a flat surface and being of an electrically conductive material,

producing a diaphragm of an electrically insulating material in the shape of a plate having a diaphragm interior surface and a diaphragm exterior surface,

attaching to or depositing on the diaphragm interior surface a second capacitor electrode having a flat surface of an electrically conductive material,

joining the house part and the diaphragm to each other so that the capacitor electrodes are located opposite each other with their flat surfaces located at a small distance from each other for forming an electrical capacitor, the capacitance of which is changed when the distance between the electrodes varies,

wherein the step of producing the house part includes the steps of joining two parts of electrically insulating material with an electrically conductive layer arranged between the two parts so that the electrically conductive layer will be placed parallel to the flat surface of the first capacitor electrode, with the first capacitor electrode attached to one of the parts, the electrically conductive layer will have a considerably larger extension than the first capacitor electrode and the first capacitor electrode will be located essentially opposite an interior region of the electrically conductive layer.

13. A method according to claim 12, characterized in that an electrically conductive layer is arranged on an exterior surface of the diaphragm.

14. A method according to claim 13, characterized in that in producing the house part it is arranged so that the distance from the electrically conductive layer inside the house part to the first capacitor electrode arranged on the house part will be essentially equal to the distance from the electrically conductive layer, which is attached to the diaphragm, to the second capacitor electrode attached to the diaphragm or is smaller than it.

15. A method according to one of claims 12-14, characterized in that in producing the house part that part, on which the first capacitor electrode is arranged, is given a small thickness, so that the distance from the electrically conductive layer inside the house part to the first capacitor electrode arranged on the house part will be small compared to the thickness of the diaphragm.

16. A method according to one of claims 12-14, also including the step of:

attaching a reinforcement element, having the shape of an annular plate or a plate having an annular projection and made of electrically insulating material, to an edge region of the diaphragm.

17. A method of producing a sensor element for pressure sensors, comprising the steps of:

producing a house part of an essentially electrically insulating material,

producing a diaphragm of an essentially electrically insulating material,

attaching the diaphragm and the house part to each other so that an edge portion of a surface of the house part meets an edge portion of an interior surface of the diaphragm,

providing means on at least one of the house part and the diaphragm, said means comprising or producing an electrically detectable quantity which changes in response to change of an exterior pressure against the diaphragm, when said diaphragm is attached to the house part, and

attaching a reinforcement element of an electrically insulating material to the diaphragm, the reinforcement element having an annular shape, by attaching an annular flat surface of the reinforcement element to the diaphragm.