Reducing reverse short-channel effect with light dose of P with high dose of as in n-channel LDD
First Claim
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1. A semiconductor device having a reduced reverse short-channel effect, comprising:
- a semiconductor substrate of a first conductivity type;
a gate oxide film formed on said semiconductor substrate;
a gate electrode formed on said gate oxide film; and
source and drain regions of a second conductivity type formed in said substrate in self-alignment with said gate electrode with a channel region thereby defined in said substrate between said source and drain regions;
whereinat least said drain region of said source and drain regions comprises a first region formed by a first implantation of a first impurity at a dosage of approximately 3×
1015 ions per cm2, a second region formed by a second implantation of the first impurity at a dosage of approximately 4×
1014 ions per cm2 and by a first implantation of a second impurity at a dosage of approximately 2×
1013 ions per cm2, whereby the reverse short-channel effect is reduced.
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Abstract
Submicron nLDD CMOS logic devices with improved current drive and reduced reverse short-channel effects having heavily doped As and lightly doped P nLDD region.
14 Citations
7 Claims
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1. A semiconductor device having a reduced reverse short-channel effect, comprising:
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a semiconductor substrate of a first conductivity type; a gate oxide film formed on said semiconductor substrate; a gate electrode formed on said gate oxide film; and source and drain regions of a second conductivity type formed in said substrate in self-alignment with said gate electrode with a channel region thereby defined in said substrate between said source and drain regions;
whereinat least said drain region of said source and drain regions comprises a first region formed by a first implantation of a first impurity at a dosage of approximately 3×
1015 ions per cm2, a second region formed by a second implantation of the first impurity at a dosage of approximately 4×
1014 ions per cm2 and by a first implantation of a second impurity at a dosage of approximately 2×
1013 ions per cm2, whereby the reverse short-channel effect is reduced. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification