Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator

• US 5,920,418 A
• Filed: 06/20/1995
• Issued: 07/06/1999
• Est. Priority Date: 06/21/1994
• Status: Expired due to Term

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Mizuguchi, Shinichi, Shiono, Teruhiro, Ito, Tatsuo, Yokoyama, Kazuo, Ueda, Michihito
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): BEY, DAWN MARIE
• Application Number:
  US08/492,894
• Time in Patent Office: 1,477 Days
• Field of Search: 359/246, 359/247, 359/254, 359/263, 359/290, 359/291, 359/295, 359/566, 359/569, 359/572, 250/338.1, 250/338.2, 250/338.3, 250/351
• US Class Current: 359/246
• CPC Class Codes: G01J 1/04 Optical or mechanical part supplementary adjustable parts
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/0205 Mechanical elements; Supports for optical elements
• CPC Class Codes: G01J 5/0235 Spacers, e.g. for avoidance of stiction
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/04 Casings
• CPC Class Codes: G01J 5/045 Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements getter arrangements per se H01L23/26 and H01L21/3221
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0803 Arrangements for time-dependent attenuation of radiation signals
• CPC Class Codes: G01J 5/0806 Focusing or collimating elements, e.g. lenses or concave mirrors
• CPC Class Codes: G01J 5/0831 Masks; Aperture plates; Spatial light modulators
• CPC Class Codes: G01J 5/084 Adjustable or slidable
• CPC Class Codes: G01J 5/0893 Arrangements to attach devices to a pyrometer, i.e. attaching an optical interface; Spatial relative arrangement of optical elements, e.g. folded beam path G01J5/049 takes precedence
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: G03B 9/18 More than two members
• CPC Class Codes: H04N 5/7416 involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal

Abstract

The diffractive optical modulator of the invention includes: a plate having a portion functioning as a first electrode; a spacer layer formed on the plate; and a grating consisting of a plurality of beams having a portion functioning as a second electrode, both ends of the beams being supported on the spacer layer. In the diffractive optical modulator, by adjusting a voltage applied between the first electrode and the second electrode, a distance between the beams and the plate is varied, thereby controlling the diffraction efficiency. An insulating layer is further provided between the plate and the plurality of beams.

Claims

1. An infrared sensor comprising:

a lens for converging infrared light and a pyroelectric element,

wherein a diffractive optical modulator for receiving the infrared light converged by the lens and for outputting at least a part of the infrared light toward the pyroelectric element is further provided,

the diffractive optical modulator comprising;

a plate having a portion functioning as a first electrode;

a spacer layer formed on the plate; and

a grating consisting of a plurality of beams having a portion functioning as a second electrode, both ends of the beams being supported on the spacer layer;

wherein, by adjusting a voltage applied between the first electrode and the second electrode, a distance between the beams and the plate is varied, thereby controlling the diffraction efficiency of the diffractive optical modulator,

wherein an amount of zero-order diffracted light is varied in accordance with a variation of a distance between the beams and the plate of the diffractive optical modulator, and

wherein the plate is disposed being inclined so that a normal with respect to a principal plane of the plate is not parallel to an optical axis of the lens.

2. An infrared sensor according to claim 1, further comprising:

a signal amplifier, connected to the pyroelectric element, for outputting an electric signal indicating an amount of infrared light received by the pyroelectric element; and

a plurality of electrode pins connected to the first and the second electrodes of the diffractive optical modulator and the signal amplifier and the pyroelectric element, the electrode pins externally protruding from the bottom surface of the seal case.

3. An infrared sensor according to claim 2, further comprising a supporting plate for supporting the pyroelectric element and the signal amplifier.

4. An infrared sensor according to claim 3, wherein at least one of the plurality of electrode pins extends to an inside of the seal case, and the at least one electrode pin supports the supporting plate.

5. An infrared sensor according to claim 2, further comprising a shield which is disposed between the pyroelectric element and the diffractive optical modulator and is grounded.

6. An infrared sensor according to claim 1, wherein the diffractive optical modulator has an inclination angle (θ

_t) of 45 degrees or less with respect to an upper surface of the seal case.

7. An infrared sensor according to claim 6, wherein the angle (θ

_t) is 25 degrees or less.

8. An infrared sensor according to claim 1, wherein the diffractive optical modulator is disposed so that only zero-order diffracted light of light diffracted by the grating is incident on the pyroelectric element and that the diffracted light other than the zero-order diffracted light is not incident on the pyroelectric element.

9. An infrared sensor according to claim 1, wherein a seal case having an opening includes the diffractive optical modulator and the pyroelectric element.

10. An infrared sensor according to claim 9, wherein the lens for converging the infrared light is provided so as to cover the opening of the seal case.

11. An infrared sensor according to claim 10, wherein the seal case comprises:

an upper surface for supporting the lens;

a bottom surface parallel to the upper surface; and

an inclined member for supporting the diffractive optical modulator so that the diffractive optical modulator is inclined with respect to the bottom surface by an inclination angle θ

_t,

and wherein the diffractive optical modulator is disposed on the inclined member.

12. An infrared sensor according to claim 1, wherein the lens for converging the infrared light is a diffractive lens.

13. An infrared sensor according to claim 12, wherein the lens for converging the infrared light has a corrugated structure corresponding to a phase modulation of the lens and is made of a material selected from the group consisting of Si, Ge, GaAs, InP, GaP, ZnSe and ZnS.

14. An infrared sensor according to claim 1, wherein a period of the grating is seven times or more of a wavelength of the infrared light.

15. An infrared sensor according to claim 1, wherein the plurality of beams are arranged so that a movable distance of the grating becomes minimum on an optical axis of incoming infrared light.

16. An infrared sensor according to claim 1, wherein a thickness of the plurality of beams is adjusted so as to be minimum on an optical axis of incoming infrared light.

17. An infrared sensor according to claim 1, wherein the diffractive optical modulator is disposed so that a direction parallel to a principal plane of the plate and vertical to the beams is vertical to an optical axis of the lens.

18. An infrared sensor according to claim 1, wherein a movable distance of the beams is set to be λ

/(4 cos θ

), where λ

is a wavelength of the infrared light, and θ

is an angle formed between a normal with respect to the principal plane of the plate of the diffractive optical modulator and the optical axis of the lens.

19. An infrared sensor according to claim 1, wherein a thickness of the beams is set to be λ

/(4 cos θ

), where λ

is a wavelength of the infrared light, and θ

is an angle formed between a normal with respect to the principal plane of the plate of the diffractive optical modulator and the optical axis of the lens.

20. An infrared sensor according to claim 1, wherein an insulating layer is provided between the plate of the diffractive optical modulator and the beams.

21. An infrared sensor according to claim 20, wherein at least lower surfaces of the beams are made of a conductive material which resists oxidation.

22. An infrared sensor according to claim 21, wherein a reflection film is formed on a surface of the insulating layer and on surfaces of the beams.

23. An infrared sensor according to claim 20, wherein the beads of the diffractive optical modulator are made of a conductive material.

24. An infrared sensor comprising:

a diffractive optical modulator for outputting at least a part of incoming infrared light;

a lens; and

a pyroelectric element,

wherein the lens converges the infrared light output from the diffractive optical modulator on the pyroelectric element,

the diffractive optical modulator comprising;

a plate having a portion functioning as a first electrode;

a spacer layer formed on the plate; and

a grating consisting of a plurality of beams having a portion functioning as a second electrode, both ends of the beams being supported on the spacer layer;

wherein, by adjusting a voltage applied between the first electrode and the second electrode, a distance between the beams and the plate is varied, thereby controlling the diffraction efficiency of the diffractive optical modulator,

wherein an amount of zero-order diffracted light is varied in accordance with a variation of a distance between the beams and the plate of the diffractive optical modulator, and

wherein the plate is disposed being inclined so that a normal with respect to a principal plane of the plate is not parallel to an optical axis of the lens.

25. An infrared sensor according to claim 24, wherein at least lower surfaces of the beams are made of a conductive material which resists oxidation.

26. An infrared sensor according to claim 24, further comprising:

a signal amplifier, connected to the pyroelectric element, for outputting an electric signal indicating an amount of infrared light received by the pyroelectric element; and

a plurality of electrode pins connected to the first and the second electrodes of the diffractive optical modulator and the signal amplifier and the pyroelectric element, the electrode pins externally protruding from the bottom surface of the seal case.

27. An infrared sensor according to claim 26, further comprising a supporting plate for supporting the pyroelectric element and the signal amplifier.

28. An infrared sensor according to claim 26, wherein at least one of the plurality of electrode pins extends to an inside of the seal case, and the at least one electrode pin supports the supporting plate.

29. An infrared sensor according to claim 28, further comprising a shield which is disposed between the pyroelectric element and the diffractive optical modulator and is grounded.

30. An infrared sensor according to claim 24, wherein the diffractive optical modulator has an inclination angle (θ

_t) of 45 degrees or less with respect to an upper surface of the seal case.

31. An infrared sensor according to claim 24, wherein the angle (θ

_t) is 25 degrees or less.

32. An infrared sensor according to claim 24, wherein the diffractive optical modulator is disposed so that only zero-order diffracted light of light diffracted by the grating is incident on the pyroelectric element and that the diffracted light other than the zero-order diffracted light is not incident on the pyroelectric element.

33. An infrared sensor according to claim 24, wherein a seal case having an opening includes the diffractive optical modulator and the pyroelectric element.

34. An infrared sensor according to claim 24, wherein the lens for converging the infrared light is a diffractive lens.

35. An infrared sensor according to claim 34, wherein the lens for converging the infrared light has a corrugated structure corresponding to a phase modulation amount of the lens and is made of a material selected from the group consisting of Si, Ge, GaAs, InP, GaP, ZnSe and ZnS.

36. An infrared sensor according to claim 24, wherein a period of the grating is seven times or more of a wavelength of the infrared light.

37. An infrared sensor according to claim 24, wherein the diffractive optical modulator is disposed so that a direction parallel to a principal plane of the plate and vertical to the beams is vertical to an optical axis of the lens.

38. An infrared sensor according to claim 24, wherein a movable distance of the beams is set to be λ

/(4 cos θ

), where λ

is a wavelength of the infrared light, and θ

is an angle formed between a normal with respect to the principal plane of the plate of the diffractive optical modulator and the optical axis of the lens.

39. An infrared sensor according to claim 24, wherein a thickness of the beams is set to be λ

/(4 cos θ

), where λ

is a wavelength of the infrared light, and θ

is an angle formed between a normal with respect to the principal plane of the plate of the diffractive optical modulator and the optical axis of the lens.

40. An infrared sensor according to claim 24, wherein an insulating layer is provided between the plate and the beams of the diffractive optical modulator.

41. An infrared sensor according to claim 40, wherein the beams of the diffractive optical modulator are made of a conductive material.

42. An infrared sensor according to claim 24, wherein a seal case having an opening includes the diffractive optical modulator, the pyroelectric element and the lens.

43. An infrared sensor according to claim 42, wherein an infrared wavelength filter is provided so as to cover the opening of the seal case.

44. An infrared sensor according to claim 42, further comprising an opening control means provided for the opening.