Method of making a thin film magnetic slider
First Claim
1. A method for manufacturing a thin film magnetic head slider having a media opposing surface which is adapted to be opposed to a recording medium, said method comprising the steps of:
- forming a sacrificial layer on a substrate, said sacrificial layer including a tapered surface for forming at least part of said media opposing surface;
forming an air bearing layer on said sacrificial layer, said air bearing layer having an air inlet portion, said air inlet portion being formed on said tapered surface so that said air inlet portion has a tapered shape;
forming a slider body, a head element and terminal pads for said head elements on said air bearing layer; and
separating said slider body from said substrate by removing said sacrificial layer.
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Accused Products
Abstract
A method for manufacturing a thin film magnetic head slider having a media opposing surface which is adapted to be opposed to a recording medium, includes the steps of forming on a sacrificial layer, on a substrate, in such a manner that the sacrificial layer has a surface including steps for forming the media opposing surface having at least one rail, providing a slider material on the surface of the sacrificial layer, and removing the sacrificial layer and the substrate from the slider. A tracking mechanism or loading/unloading mechanism can be provided on the slider. An electrostatic actuator suitable for driving such a mechanism includes a stationary section having a plurality of teeth parallel to each other, a movable section having a plurality of teeth parallel to the teeth of the stationary section, a support spring for supporting the movable section so that the movable section can be moved with respect to the stationary section in the tooth width direction. A drive force generator moves the movable section to a position at which an electrostatic attraction force in the tooth width direction generated when a voltage is impressed between the teeth of the stationary section and those of the movable section, is balanced with the elastic force of the head suspension.
62 Citations
14 Claims
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1. A method for manufacturing a thin film magnetic head slider having a media opposing surface which is adapted to be opposed to a recording medium, said method comprising the steps of:
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forming a sacrificial layer on a substrate, said sacrificial layer including a tapered surface for forming at least part of said media opposing surface; forming an air bearing layer on said sacrificial layer, said air bearing layer having an air inlet portion, said air inlet portion being formed on said tapered surface so that said air inlet portion has a tapered shape; forming a slider body, a head element and terminal pads for said head elements on said air bearing layer; and separating said slider body from said substrate by removing said sacrificial layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for manufacturing a thin film magnetic head slider having a media opposing surface which is adapted to be opposed to a recording medium, said method comprising the steps of:
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forming a sacrificial layer on a substrate, so that said sacrificial layer has a surface including steps for forming said media opposing surface with at least one rail; providing a slider material on said surface of the sacrificial layer; and removing said sacrificial layer and said substrate from said slider, wherein said at least one rail has at least one tapered portion at a leading side of the slider, and a thickness of said sacrificial layer or an underlayer thereof is gradually increased at portions thereof corresponding to said tapered portions of the rails. - View Dependent Claims (13, 14)
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Specification