Spatially-multiplexed imaging microscope

• US 5,923,036 A
• Filed: 02/11/1997
• Issued: 07/13/1999
• Est. Priority Date: 02/11/1997
• Status: Expired due to Fees

• Current Assignee: Bruker Optics, Inc. (Bruker Corporation)
• Original Assignee: Bruker Instruments Incoporated
• Inventors: Tague, Thomas J. Jr., Mortensen, Norman, Bellamy, Michael K.
• Primary Examiner(s): Hannaher, Constantine
• Application Number:
  US08/797,713
• Time in Patent Office: 882 Days
• Field of Search: 250/339.05, 250/339.06, 250/339.07, 250/339.08, 250/341.1, 250/341.2, 250/350, 250/351, 250/353, 356/310, 356/330
• US Class Current: 250/339.07
• CPC Class Codes: G01J 3/2823 Imaging spectrometer
• CPC Class Codes: G01J 3/2846 using modulation grid; Grid spectrometers
• CPC Class Codes: G01J 3/457 Correlation spectrometry, e.g. of the intensity G01J3/453 takes precedence
• CPC Class Codes: G02B 21/24 Base structure

Abstract

An infrared imaging microscope uses spatial encoding to divide an sample being examined into a plurality of pixel regions. The spatial encoding is provided by a digitally controlled mask, which is preferably a multiple mirror array, and which masks the imaging radiation directed from a radiation source to the sample. The signal reflected or transmitted from the sample is detected using a single-element detector. As the mask pattern provided by the mask changes, the output signal of the detector is monitored, and the spectroscopic composition of each of the pixel regions is resolved using a spatial decoding method, such as a Hadamard transform. The digital control of the mask allows fast, easily-implemented changes to the masking pattern, and provides a low processing load relative to imaging devices that use multiple-element detectors. The invention may be implemented in a stand-alone microscope, or as a probe in which most of the elements of the device are located in a main housing, while the mask is located in a remote probe housing connected to the main housing by fiber optic cables. This allows reflective-mode scanning of free-standing objects. In one alternative embodiment, a multiple-element detector is used with the digitally-controlled mask. In this embodiment, visible light is spatially encoded by the mask along with the imaging radiation. By masking the visible light in this manner, visual examination of the sample allows correlation between the area of the sample being examined and the output of the appropriate element of the detector.

Claims

1. An imaging apparatus for providing spectroscopic imaging of a sample, the apparatus comprising:

a source of electromagnetic imaging radiation;

a digitally-controllable mask for spatially encoding the radiation from the radiation source, the mask comprising a multiple mirror array having a plurality of pixel elements which are each independently controllable in response to digital voltage signals applied directly to the mask, spatially encoded radiation from the mask being directed to the sample;

a detector for detecting a spectroscopic signal comprising radiation directed from the sample to the detector and outputting a detection signal in response thereto; and

a controller for controlling the application of said digital voltage signals to the mask.

2. An imaging apparatus according to claim 1 wherein the radiation source is an infrared radiation source.

3. An imaging apparatus according to claim 1 wherein the detector has a single detection element.

4. An imaging apparatus according to claim 1 wherein the detector detects radiation transmitted through the sample.

5. An imaging apparatus according to claim 1 wherein the detector detects radiation reflected from the sample.

6. An imaging apparatus according to claim 1 wherein the imaging apparatus comprises an imaging microscope.

7. An imaging apparatus according to claim 1 wherein the imaging apparatus comprises:

a main housing in which the radiation source, the detector and the controller are located; and

a remote probe in which the mask is located and which is manually manipulable relative to the sample.

8. An imaging apparatus according to claim 1 wherein the pixel elements of the mask are individual mirror segments of the mirror array, and wherein each of the mirror segments is electrostatically controlled between at least two positions by the application of one of two digital logic signals to an electrode of that mirror segment.

9. An imaging apparatus according to claim 1 wherein the detector is a multiple-element detector, each element of which outputs an independent signal indicative of spectroscopic content of radiation detected by that detector.

10. An imaging apparatus for providing spectroscopic imaging of a sample, the apparatus comprising:

a source of electromagnetic imaging radiation;

a digitally-controllable mask for spatially encoding the radiation from the radiation source, the mask having a plurality of pixel elements which are each independently controllable in response to digital voltage signals applied directly to the mask, spatially encoded radiation from the mask being directed to the sample;

a detector for detecting a spectroscopic signal comprising radiation directed from the sample to the detector and outputting a detection signal in response thereto;

a controller for controlling the application of said digital voltage signals to the mask;

a main housing in which the radiation source, the detector and the controller are located; and

a remote probe in which the mask is located and which is manually manipulable relative to the sample.

11. An imaging apparatus for providing spectroscopic imaging of a sample, the apparatus comprising:

a source of electromagnetic imaging radiation;

a digitally-controllable mask for spatially encoding the radiation from the radiation source and directing it to the sample, the mask comprising a multiple mirror array having a plurality of electrostatically-controlled multiple mirror segments each of which is electrostatically controlled between at least two positions by the application of one of at least two digital logic signals to an electrode of that mirror segment;

a detector having a single detection element for detecting a spectroscopic signal comprising radiation directed from the sample to the detector and outputting an electrical signal in response thereto; and

a controller for controlling the application of said digital voltage signals to the mask.

12. A method of spectroscopically imaging a sample, the method comprising:

providing a source of electromagnetic imaging radiation;

spatially encoding the radiation from the radiation source using a digitally-controllable mask comprising a multiple mirror array having a plurality of pixel elements each of which are independently controllable in response to digital voltage signals applied directly to the mask;

directing spatially encoded radiation from the mask to the sample;

detecting radiation from the sample and outputting a detection signal in response thereto; and

controlling the spatial encoding of the radiation from the radiation source by controlling said digital voltage signals applied to the mask such as to create a series of different masking patterns with the pixel elements of the mask while simultaneously monitoring the detection signal.

13. A method according to claim 12 wherein providing a source of imaging radiation comprises providing a source of imaging radiation which is infrared radiation.

14. A method according to claim 12 wherein detecting radiation from the sample comprises detecting radiation with a single-element detector.

15. A method according to claim 12 further comprising:

locating the radiation source and detector in a main housing; and

locating the mask in a remote probe which is manually manipulable relative to the sample.

16. A method according to claim 15 wherein the sample is part of a free-standing object, and the method further comprises changing the sample by moving the probe manually relative to said object.

17. A method according to claim 12 wherein detecting radiation from the sample comprises detecting radiation from the sample with a multiple element detector.

18. A method according to claim 17 further comprising:

providing a source of visible light;

masking the visible light with the mask such that the visible light and the imaging radiation have the same spatial encoding;

directing visible light from the mask to the sample; and

viewing the visible light incident on the sample.

19. A method of spectroscopically imaging a sample, the method comprising:

providing a source of electromagnetic imaging radiation located within a main housing;

spatially encoding the radiation from the radiation source using a digitally-controllable mask having a plurality of pixel elements each of which are independently controllable in response to digital voltage signals applied directly to the mask, the mask being located in a remote probe that is manually manipulable relative to the sample;

directing spatially encoded radiation from the mask to the sample;

detecting radiation from the sample with a detector located within the main housing and outputting a detection signal in response thereto; and

controlling the spatial encoding of the radiation from the radiation source by controlling said digital voltage signals applied to the mask such as to create a series of different masking patterns with the pixel elements of the mask while simultaneously monitoring the detection signal.

20. A method of spectroscopically imaging a sample, the method comprising:

providing a source of electromagnetic imaging radiation;

spatially encoding the radiation from the radiation source using a digitally-controllable mask having a plurality of pixel elements each of which are independently controllable in response to digital voltage signals applied directly to the mask;

directing spatially encoded radiation from the mask to the sample;

detecting radiation from the sample and outputting a detection signal in response thereto;

providing a source of visible light;

masking the visible light with the mask such that the visible light and the imaging radiation have the same spatial encoding;

directing visible light from the mask to the sample;

viewing the visible light incident on the sample; and

controlling the spatial encoding of the radiation from the radiation source by controlling said digital voltage signals applied to the mask such as to create a series of different masking patterns with the pixel elements of the mask while simultaneously monitoring the detection signal.