Wafer sample retainer for an electron microscope

• US 5,923,040 A
• Filed: 12/01/1997
• Issued: 07/13/1999
• Est. Priority Date: 12/01/1997
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Carroll, Lynn J.
• Primary Examiner(s): Westin, Edward P.
• Assistant Examiner(s): Wells, Nikita
• Application Number:
  US08/980,932
• Time in Patent Office: 589 Days
• Field of Search: 250/440.11, 250/442.11, 250/492.2, 269/238, 269/254 CS
• US Class Current: 250/440.11
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Abstract

A wafer sample retainer for an electron microscope includes a clamp arranged to engage one or more wafer samples against a post. The clamp may be spring biased and may be operable by depressing a portion of a spring biased member to pivot the spring biased member away from a support post to create an opening to receive the samples. The sample holder may be removably mounted on a base which may be positioned using a conventional electron microscope positioner.

Claims

1. A wafer sample retainer for an electron microscope comprising:

a rail;

a base adjustably positionable along said rail;

a sample holder removably connectable to said base, said holder having an upstanding post;

an L-shaped spring biased member mounted for pivotal rotation on said holder, said member having first and second elements, said first element having a free end, said free end pivotal towards and away from said post against said spring biased member, said second element having a manually displaceable free end such that when said free end of said second element is manually displaced, said free end of said first element is displaced away from said post; and

a sample retainer opening (slot) arranged between said post and said member to receive a wafer such that said wafer is spring biased against said post by said member when said member is not manually displaced and when said member is manually displaced, the spring bias of said member against said wafer is removed, allowing said wafer to be removed from said slot.

2. The retainer of claim 1 wherein said free end includes a rounded portion arranged to engage said sample.

3. The retainer of claim 1 wherein said spring biased member is adapted to secure a plurality of wafer samples to said post at one time.

4. The retainer of claim 1 wherein said spring biased member is L-shaped, having a pair of portions connected at a corner, said member being mounted for rotation about said corner, one of said portions being depressible to rotate the other of said portions towards and away from said post.

5. The retainer of claim 4 including pair of spring biased members each arranged to pivot towards and away from said post.

6. The retainer of claim 5 wherein each of said spring biased members is arranged to pivot towards and away from an opposite side of said post.