Magnetoresistance device
First Claim
1. A magnetoresistance device comprising a magnetoresistance effect element, conductive films and electrode portions, wherein said conductive films are conductively connected to said magnetoresistance effect element through said electrode portions, and said magnetoresistance effect element comprises a magnetic multilayer film including a non-magnetic metal layer, a ferromagnetic layer formed on one surface of the non-magnetic metal layer, a soft magnetic layer formed on the other surface of said non-magnetic metal layer, and a pinning layer which is formed on (a surface opposite to a surface abutting the non-magnetic metal layer) said ferromagnetic layer to pin a direction of magnetization of said ferromagnetic layer, and wherein said pinning layer is formed of FeOx (1.35≦
- x≦
1.55, unit;
atomic ratio).
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Abstract
According to the present invention on a magnetoresistance device having a magnetoresistance effect element, since iron oxide FeOx exhibiting antiferromagnetism is used as a pinning layer, a spin-valve type magnetoresistance effect element can be obtained which is particularly excellent in corrosion resistance and has a magnetoresistance ratio with an MR slope no less than 0.7% Oe in the region of the high-frequency magnetic field of 1 MHz. Further, the rise-up characteristic of an MR curve at the zero magnetic field is extremely excellent with small hysteresis, and it has high heat resistance. The heat resistance is further improved by interposing an oxygen blocking layer between the pinning layer and a ferromagnetic layer. In the magnetoresistance device, for example, an MR head, using the magnetoresistance effect element having a magnetic multilayer film, an output voltage is approximately five times as high as that of the conventional material. Accordingly, there can be provided an excellent MR head which has extremely high reliability and enables the reading for ultrahigh density magnetic recording exceeding 1 Gbit/inch2.
63 Citations
39 Claims
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1. A magnetoresistance device comprising a magnetoresistance effect element, conductive films and electrode portions, wherein said conductive films are conductively connected to said magnetoresistance effect element through said electrode portions, and said magnetoresistance effect element comprises a magnetic multilayer film including a non-magnetic metal layer, a ferromagnetic layer formed on one surface of the non-magnetic metal layer, a soft magnetic layer formed on the other surface of said non-magnetic metal layer, and a pinning layer which is formed on (a surface opposite to a surface abutting the non-magnetic metal layer) said ferromagnetic layer to pin a direction of magnetization of said ferromagnetic layer, and wherein said pinning layer is formed of FeOx (1.35≦
- x≦
1.55, unit;
atomic ratio). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
- x≦
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24. A magnetoresistance device comprising a magnetoresistance effect element, conductive films and electrode portions, wherein said conductive films are conductively connected to said magnetoresistance effect element through said electrode portions, wherein said magnetoresistance effect element has a substrate on which a pinning layer for pinning a direction of magnetization of a ferromagnetic layer, said ferromagnetic layer, a non-magnetic metal layer and a soft magnetic layer are laminated successively, and wherein said pinning layer is formed of FeOx (1.35≦
- x≦
1.55, unit;
atomic ratio) and an oxygen blocking layer formed of Co or an alloy containing Co no less than 80 weight % and having a thickness of 4 to 30Å
is interposed between said pinning layer and said ferromagnetic layer. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
- x≦
Specification