Vapor deposition of polymer films for photolithography

• US 5,925,494 A
• Filed: 02/16/1996
• Issued: 07/20/1999
• Est. Priority Date: 02/16/1996
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Horn, Mark W.
• Primary Examiner(s): Hamilton, Cynthia
• Application Number:
  US08/602,431
• Time in Patent Office: 1,250 Days
• Field of Search: 430/270.1, 427/488, 528/220, 528/396
• US Class Current: 430/270.1
• CPC Class Codes: G03F 7/167 from the gas phase, by plasma deposition G03F7/2035 takes precedence

Abstract

The invention provides a method for vapor-depositing a polymer film having constituents that are synthesized during the deposition and that can therefore be customized by time-dependent process control during the deposition. In the vapor-deposition process, a hydrocarbon precursor is reacted with an oxygen-containing precursor in a plasma environment. The plasma reaction synthesizes O--H bonds and forms a polymer having O--H bonds, C--C bonds, and C--H_x bonds. Preferably, the hydrocarbon and oxygen-containing precursors are employed in a ratio selected such that the resulting polymer film has a selected level of oxygen constituency providing a corresponding selected ratio of O--H bond concentration to C--H_x bond concentration. The precursor ratio is preferably varied as a function of time during the plasma reaction to result in a corresponding distribution, e.g., a depth-dependent distribution, of O--H bonds in the film. The vapor-deposited polymer film provided by the invention is particularly well-suited as an all-dry positive-tone silylation photoresist because the vapor-deposition process can custom-synthesize a constituent hydroxyl group concentration and distribution in the photoresist film for a given photolithographic application.

Claims

1. A plasma synthesized polymer film disposed on a semiconductor wafer, the film having C--C bonds, C--H bonds, and plasma synthesized O--H bonds, the film having a level of oxygen constituency that is selected to provide a ratio of O--H bond concentration to C--H bond concentration that yields substantially a prespecified concentration of reactive silylation sites in the film.

4. The film of claim 1 wherein the O--H bond concentration is distributed through the polymer as a function of film depth.

5. The film of claim 1 wherein the O--H bond concentration is homogeneously distributed through depth of the film.

6. The film of claim 1 wherein the semiconductor wafer comprises a silicon wafer.

7. The film of claim 1 wherein the semiconductor wafer includes varying surface topology.

8. The film of claim 7 including a planarizing surface profile over the varying surface topology of the semiconductor wafer.

9. The film of any one of claims 1, 2, or 3 characterized by a permeability to silicon-containing vapor.

10. The film of claim 9 wherein the silicon-containing vapor is characterized by a reactivity with reactive silylation sites in the film.

11. The film of any one of claims 1, 2, or 3 characterized by a tendency to crosslink upon exposure to radiation of between about 10 nm and about 400 nm at a dose of less than about 200 mJ/cm².

12. The film of claim 11 characterized by a tendency to a reduction in permeability to silicon-containing vapor subsequent to crosslinking of the film.

13. The film of any one of claims 1, 2, or 3 characterized by a tendency to crosslink upon exposure to an electron beam at a dose of less than about 500 μ

C/cm².

14. The film of any one of claims 1, 2, or 3 wherein the level of oxygen constituency is further selected to provide a corresponding selected plasma etch resistance of the film subsequent to silylation of reactive silylation sites in the film.

2. A plasma synthesized polymer film having C--C bonds, C--H bonds, and plasma synthesized O--H bonds, the film having a level of oxygen constituency that is selected to provide a corresponding selected ratio of O--H bond concentration to C--H bond concentration, the O--H bond concentration being distributed through film depth from a relatively higher concentration at shallow depths to a relatively lower concentration at lower depths.

3. A plasma synthesized polymer film having C--C bonds, C--H bonds, and plasma synthesized O--H bonds the film having a level of oxygen constituency that is selected to provide a corresponding selected ratio of O--H bond concentration to C--H bond concentration, the O--H bond concentration being distributed through film depth from a relatively lower concentration at shallow depths to a relatively higher concentration at central depths and substantially zero concentration at lower depths.