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Capacitive differential pressure detector

  • US 5,925,824 A
  • Filed: 06/27/1997
  • Issued: 07/20/1999
  • Est. Priority Date: 07/01/1996
  • Status: Expired due to Term
First Claim
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1. A capacitive differential pressure detector for measuring differential pressure based on capacitance between a diaphragm and each of fixed electrodes having the same shape and size and being insulatively fixed through spacers on respective sides of said diaphragm displaced in response to differential pressure, wherein each of said fixed electrodes comprises:

  • an insulating plate having a first pressure-introduction center hole and fixed to a corresponding one of said spacer so that said insulating plate is located opposite from said diaphragm with respect to said corresponding one of said spacer;

    a conductive plate fixed on said insulating plate, said conductive plate facing said diaphragm and being surrounded by said corresponding one of said spacer through a gap, said conductive plate having a second pressure-introduction central hole; and

    a conductive film integrally deposited on said insulating plate, said conductive film including;

    a first portion covering an entire inner circumference of said first pressure-introduction center hole and being electrically connected to said conductive plate at an end of said first press-introduction hole;

    a second portion surrounding the opposite end of said first pressure-introduction hole and being formed on a surface of said insulating plate opposite from said conductive plate; and

    a third portion extending from said second portion up to an outer periphery of said insulating plate at which said third portion is electrically connected to a terminal for extracting capacitance.

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