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Optical apparatus for rapid defect analysis

  • US 5,926,266 A
  • Filed: 09/23/1996
  • Issued: 07/20/1999
  • Est. Priority Date: 09/23/1996
  • Status: Expired due to Fees
First Claim
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1. Inspection apparatus for inspecting a surface of a sample, wherein said apparatus comprises:

  • a wide scanning interferometer determining locations of surface defects;

    a narrow scanning interferometer determining the profiles of said surface defects located by said wide scanning interferometer; and

    means for establishing relative motion between said sample and said wide scanning and narrow scanning interferometers, with said surface adjacent to said wide scanning and narrow scanning interferometers.

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