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Method for producing silicon nitride reaction sintered body

  • US 5,928,601 A
  • Filed: 10/17/1997
  • Issued: 07/27/1999
  • Est. Priority Date: 02/28/1994
  • Status: Expired due to Fees
First Claim
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1. A method for producing a silicon nitride reaction-sintered body comprising the steps of (1) mixing a silicon powder mixture having an average particle size of 5 μ

  • m to 300 μ

    m with a sintering aid;

    (2) forming the resultant powder mixture into a green body;

    (3) nitrogenating said green body in an atmosphere of nitrogen and 20% or less of hydrogen for nitrogenation; and

    (4) sintering the nitrogenated green body;

    wherein said silicon powder mixture comprises a first silicon powder and a second silicon powder having substantially independent particle size distribution ranges which do not substantially overlap with each other, such that said first and second silicon powders when mixed form a bimodal particle size distribution.

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