Disordered coating with cubic boron nitride dispersed therein
First Claim
1. An article comprising a substrate and a coating deposited on said substrate, said coating comprising a first region adjacent said substrate comprising disordered boron and carbon and having a thickness of from about 0.01 to 6 microns and a second region adjacent said first region comprising cubic boron nitride dispersed in disordered boron and carbon and in which the concentration of cubic boron nitride in said coating gradually increases from zero in a direction away from said first region to less than about 50 percent by weight, said second region having a thickness of from about 0.01 to 6 microns.
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Abstract
A coating of cubic boron nitride dispersed in a matrix of disordered boron and carbon, such as boron carbide, is provided by sputtering. The coating is wear resistant, adherent, lubricous, and suitable as a coating for tools, molds, and wear parts. The coating has first, second, and third regions. The first region is sputtered in an inert atmosphere onto a substrate such as tool steel and is at least one layer of disordered boron and carbon. The inert sputtering atmosphere is gradually replaced with nitrogen to form the second region, which has cubic boron nitride crystals in a gradually increasing concentration dispersed in a matrix of disordered boron and carbon. The third region atop the second region is an outer wear layer that has a substantially uniform concentration throughout of cubic boron nitride dispersed in disordered boron and carbon.
55 Citations
18 Claims
- 1. An article comprising a substrate and a coating deposited on said substrate, said coating comprising a first region adjacent said substrate comprising disordered boron and carbon and having a thickness of from about 0.01 to 6 microns and a second region adjacent said first region comprising cubic boron nitride dispersed in disordered boron and carbon and in which the concentration of cubic boron nitride in said coating gradually increases from zero in a direction away from said first region to less than about 50 percent by weight, said second region having a thickness of from about 0.01 to 6 microns.
- 16. An article comprising a substrate selected from the group consisting of tools, molds, and wear parts and a coating deposited on said substrate, said coating comprising a first region adjacent said substrate comprising disordered boron and carbon and having a thickness of from about 0.05 to 0.25 microns, a second region adjacent said first region comprising cubic boron nitride dispersed in disordered boron and carbon and in which the concentration of cubic boron nitride in said coating gradually increases from zero in a direction away from said first region to about 20 to 35 percent by weight, said second region having a thickness of from about 0.05 to 0.25 microns, and a third region adjacent the second region and separated by said second region from said first region and comprising cubic boron nitride dispersed in disordered boron and carbon at a substantially uniform concentration of from about 20 to 35 percent by weight, the third region having a thickness of from about 0.75 to 2 microns, and wherein the concentration of cubic boron nitride in said second region increases to substantially the same concentration as that of the third region adjacent the second region.
Specification