Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample

• US 5,929,643 A
• Filed: 12/03/1996
• Issued: 07/27/1999
• Est. Priority Date: 12/07/1995
• Status: Expired due to Fees

• Current Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Original Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Inventors: Sakai, Nobuaki, Matsuyama, Katsuhiro
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US08/757,131
• Time in Patent Office: 966 Days
• Field of Search: 324/750, 324/758, 324/754, 324/767, 324/662, 250/306, 250/307, 250/423 F, 73/105
• US Class Current: 324/754.26
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/30 Scanning potential microscopy
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/864 Electrostatic force probe

Abstract

A scanning probe microscope for measuring the electrical properties of the surface of a sample comprises a first sensor for detecting electrical information for the sample surface and outputting a first electrical signal corresponding thereto, the first sensor including an electrically conductive probe located near the surface of the sample, a second sensor for detecting the distance between the probe and the sample and outputting a second electrical signal corresponding thereto, an actuator for relatively moving the probe and the sample in a three-dimensional manner, a servo control mechanism for adjusting the distance between the probe and the sample to a desired value by servo control in accordance with the second electrical signal while the electrical information is being detected by the first sensor, and a processing unit for processing the first electrical signal.

Claims

1. A scanning probe microscope for measuring electrical properties of a surface of an electrically conductive sample, comprising:

a first sensor, which includes an electrically conductive first probe located near the surface of the sample, for detecting electrical information concerning electrical properties of the sample surface, including the state of electrons on the sample surface and the electrical potential of the sample surface, and then outputting a first electrical signal corresponding to the detected information;

a second sensor for detecting the distance between the first probe and the sample, and then outputting a second electrical signal corresponding thereto;

moving means for relatively moving the first probe and the sample in a three-dimensional manner;

a servo controller for adjusting the distance between the first probe and the sample to a desired value by servo control in accordance with the second electrical signal delivered from the second sensor while the electrical information concerning electrical properties of the sample surface is being detected by the first sensor; and

a processing unit for processing the first electrical signal delivered from the first sensor.

2. A scanning probe microscope according to claim 1, wherein said first sensor includes:

a bias voltage supply for applying a bias voltage between the first probe and the sample, and

a current-to-voltage converter for converting a tunneling current flowing through the first probe into a voltage, and then outputting the voltage as the first electrical signal,

the bias voltage supply changing the bias voltage applied between the first probe and the sample while the electrical information concerning electrical properties of the sample surface is being detected by the first sensor.

3. A scanning probe microscope according to claim 2, wherein said second sensor includes:

a second probe located in front of the sample surface,

a cantilever having the second probe supported on a free end thereof so as to be displaceable depending on a force acting between the second probe and the sample, and

a displacement sensor for sensing a displacement of the free end of the cantilever, and then outputting a signal corresponding to the sensed displacement as the second electrical signal.

4. A scanning probe microscope according to claim 3, wherein said servo controller includes:

a servo circuit for controlling the moving means so that a signal supplied thereto is coincident with a servo reference signal therefor,

a first switch device for selectively supplying one of the first and second electrical signals to the servo circuit,

first servo reference signal output means for outputting a first servo reference signal which is a target value that the first electrical signal should take to attain a desired distance between the first probe and the sample,

second servo reference signal output means for outputting a second servo reference signal which is the second electrical signal produced when the first electrical signal is coincident with the first serve reference signal, and

a second switch device for selectively supplying one of the first and second servo reference signals to the servo circuit,

the second switch device being shifted in association with the first switch device, the first switch device being adapted to supply the servo circuit selectively with the second electrical signal, and the second switch device being adapted to supply the servo circuit selectively with the second servo reference signal, while the electrical information concerning electrical properties of the sample surface is being detected by the first sensor.

5. A scanning probe microscope according to claim 4, wherein said second servo reference signal output means includes a memory for storing the second electrical signal when the first electrical signal is coincident with the first servo reference signal, said second servo reference signal output means outputting the stored electrical signal as the second servo reference signal.

6. A scanning probe microscope according to claim 3, wherein:

said first and second sensors include a single cantilever chip, the single cantilever chip including a support section, a relatively short first cantilever extending from the support section, and a relatively long second cantilever extending from the support section, and

wherein the first probe is supported on a free end of the first cantilever, and the second probe is supported on a free end of the second cantilever, the first and second probes being electrically insulated from each other.

7. A scanning probe microscope according to claim 6, wherein:

said first cantilever has a relatively small spring constant, and

said second cantilever has a relatively large spring constant.

8. A scanning probe microscope according to claim 6, wherein:

said first and second cantilevers substantially share a common longitudinal axis, and

a straight line connecting said first and second probes is substantially coincident with the common longitudinal axis.

9. A scanning probe microscope according to claim 8, wherein:

said second cantilever is U-shaped and includes a distortion resistance layer formed therein, the distortion resistance layer being arranged so as to undergo a change in resistance corresponding to a displacement of the free end of the second cantilever, and

said second sensor includes means for outputting a signal corresponding to the resistance of the distortion resistance layer, said second sensor outputting the signal as the second electrical signal.

10. A scanning probe microscope according to claim 9, wherein said means for outputting the signal corresponding to the resistance includes:

a DC constant voltage source connected electrically to one end of the distortion resistance layer, and

an operational amplifier connected electrically to another end of the distortion resistance layer.

11. A scanning probe microscope according to claim 2, which further comprises:

a dummy sample located near the sample to be measured, substantially on a same level with the sample to be measured, and

wherein said second sensor includes;

a second probe located in front of the surface of the dummy sample,

a cantilever having the second probe supported on a free end thereof so as to be displaceable depending on a force acting between the second probe and the dummy sample, and

a displacement sensor for sensing a displacement of the free end of the cantilever, and outputting a signal corresponding to the sensed displacement as the second electrical signal.

12. A scanning probe microscope according to claim 11, wherein said servo controller includes:

a servo circuit for controlling the moving means so that a signal supplied thereto is coincident with a servo reference signal therefor,

a first switch device for selectively supplying one of the first and second electrical signals to the servo circuit,

first servo reference signal output means for outputting a first servo reference signal for the first electrical signal,

second servo reference signal output means for outputting a second servo reference signal for the second electrical signal, and

a second switch device for selectively supplying one of the first and second servo reference signals to the servo circuit,

the second switch device being shifted in association with the first switch device, the first switch device being adapted to supply the servo circuit selectively with the second electrical signal, and the second switch device being adapted to supply the servo circuit selectively with the second servo reference signal, while the electrical information concerning electrical properties of the sample surface is being detected by the first sensor.

13. A scanning probe microscope according to claim 12, wherein said second servo reference signal output means includes a memory for storing the second electrical signal when the first electrical signal is coincident with the first servo reference signal, said second servo reference signal output means outputting the stored electrical signal as the second servo reference signal.

14. A scanning probe microscope according to claim 2, which further comprises:

an electrically conductive dummy sample located near the sample to be measured, substantially on a same level with the sample to be measured, and

wherein said second sensor includes;

a second electrically conductive probe located near the surface of the dummy sample,

second bias voltage applying means for applying a bias voltage between the second probe and the dummy sample, and

a current-to-voltage converter for converting a tunneling current flowing through the probe into a voltage, and then outputting the voltage as the second electrical signal.

15. A scanning probe microscope according to claim 14, wherein said servo controller includes:

a servo circuit for controlling the moving means so that the second electrical signal is coincident with a servo reference signal therefor, and

second servo reference signal output means for outputting a second servo reference signal as the second electrical signal.