Method of and apparatus for minimizing plasma instability in an RF processor

• US 5,929,717 A
• Filed: 01/09/1998
• Issued: 07/27/1999
• Est. Priority Date: 01/09/1998
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Richardson, Brett C., Ngo, Tuan
• Primary Examiner(s): GENSLER, PAUL L
• Application Number:
  US09/005,146
• Time in Patent Office: 564 Days
• Field of Search: 333/17.3, 333/99 PL, 315/111.21, 364/482
• US Class Current: 333/17.3
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems

Abstract

Variable reactances of a matching network connected between an r.f. source and a plasma load of a vacuum plasma chamber processing a workpiece are varied so a tendency of the plasma to change in an unstable manner which can adversely affect processing of the workpiece is avoided while matching is approached. The plasma tendency to change in an unstable manner is detected by monitoring an electrical parameter resulting from r.f. current flowing between the source and load via the network. The parameter can be (1) statistically based, e.g. variance of percent delivered power, or (2) amplitude modulation in one or both of the 2-20 kHz and 50-200 kHz ranges.

Claims

1. A method of supplying an r.f. field to a plasma in a vacuum plasma chamber processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source that can generate the r.f. field, the r.f. field having a frequency and power level sufficient to ignite a gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances, the plasma having a tendency to change in an unstable manner which can adversely affect processing of the workpiece, the method comprising detecting that the plasma is tending to change in an unstable manner, and changing the value of said reactances of the matching network in response to the detecting step so the tendency of the plasma to change in an unstable manner which can adversely affect processing of the workpiece is overcome and the plasma is maintained in a stable state and a match is approached between the source and the impedance seen looking from the output terminals of the source.

2. The method of claim 1 wherein the tendency of the plasma to change unstably is detected by detecting a function of an electrical parameter resulting from current coupled between the source and the load.

3. The method of claim 2 wherein the parameter is power coupled between the source and the load.

4. The method of claim 2 wherein the parameter is r.f. current coupled between the source and the load.

5. The method of claim 4 wherein modulation of the current is detected.

6. The method of claim 5 wherein the modulation is in at least one predetermined frequency band.

7. The method of claim 6 wherein the frequency band is from 2 to 20 kHz.

8. The method of claim 6 wherein the frequency band is from 50 to 200 kHz.

9. The method of claim 6 wherein the frequency bands are from 2 to 20 kHz and 50 to 200 kHz.

10. The method of claim 2 wherein the function is dependent on the spread of values of the electrical parameter.

11. The method of claim 1 wherein the match is approached by simultaneously varying both of the reactances in response to detection of an onset of the plasma tendency to become unstable.

12. The method of claim 1 wherein the values of the reactances are, prior to detection of an onset of the plasma tendency to become unstable, simultaneously changed along a predetermined trajectory between a starting point for the values of the reactances toward a finish point where the values of the reactances are such that a substantial match exists between the source and load, the trajectory extending through a region defined by a set of values for the reactances where the plasma is unstable, and varying the values of the reactances so they deviate from the trajectory and the region is substantially avoided in response to detection of the onset of the tendency of the plasma to change in the unstable manner.

13. The method of claim 12 wherein the region is avoided by simultaneously varying the values of both reactances to establish a series of straight line trajectories in the vicinity of the periphery of an x-y plot of an unstable region of the plasma, where the values of x and y indicate values of the reactances.

14. The method of claim 13 wherein every other trajectory is at right angles to the immediate preceding trajectory, and determining the slope of the immediate preceding trajectory from the values of the reactances as the two most recent values of best impedance match that define a slope different from the slope of the immediate preceding trajectory.

15. The method of claim 14 wherein each trajectory is traversed until detection of the unstable region or a local best impedance match.

16. The method of claim 14 wherein some of the trajectories in the series extend into the region and others of the trajectories in the series extend about the periphery of the region, and exchanging the magnitudes of the reactances and thereby changing at right angles between said some and said others of the trajectories in the series in response to detection of the plasma going between instability and stability.

17. The method of claim 16 wherein a measure of the plasma stability is determined by combining (a) a factor determined by an indication of plasma stability and (b) an indication of percent of power delivered by the source to the reactive impedance element, said measure changing value in a first direction while said some trajectories are being traversed and the plasma is stable, detecting that the plasma has changed from stable to unstable when said measure is sensed as reversing direction of change in a second direction while said some of the trajectories in the series are being traversed, and establishing starting points of the others of the trajectories in the series at the values the reactances had when the plasma was detected as changing from stable to unstable, and changing the values of the reactances so the others of the trajectories in the series are traversed until said measure is sensed as reversing in value from the first direction to the second direction.

18. Apparatus for supplying r.f. energy to a plasma in a vacuum plasma chamber for processing a workpiece comprising a reactive impedance element positioned so it can be electrically coupled with a gas in the chamber, an r.f. electric source, a matching network having variable impedance properties connected between the source and the reactive impedance, the r.f. source having a frequency and power level to cause the reactive impedance element to supply an r.f. field to the gas to ignite the gas to the plasma, the plasma having a tendency to change in an unstable manner which adversely affects processing of the workpiece, and a controller for the variable impedance properties responsive to a function of an electric parameter resulting from current flowing between the source and load via the network, the electric parameter indicating that the plasma is tending to change in an unstable manner which can adversely affect processing of the workpiece, the controller varying the variable impedance properties in response to the parameter so the tendency of the plasma to change in an unstable manner which can adversely affect processing of the workpiece is overcome and the plasma is maintained in a stable state and a match is approached between the source and the impedance seen looking from the output terminals of the source.

19. The apparatus of claim 18 wherein the function of the electric parameter to which the controller is responsive to indicate the unstable tendency of the plasma is a measure of the spread of values of a function resulting from current being coupled between the source and load via the network.

20. The apparatus of claim 18 wherein the controller includes a detector for the unstable tendency of the plasma, the unstable detector including an amplitude modulation detector responsive to at least one predetermined frequency band imposed on r.f. current flowing from the source to the load via the network.

21. The apparatus of claim 20 wherein one of the frequency bands is from 2 kHz to 20 kHz.

22. The apparatus of claim 20 wherein one of the frequency bands is from 50 kHz to 200 kHz.

23. The apparatus of claim 22 wherein another of the frequency bands is from 2 kHz to 20 kHz.

24. The apparatus of claim 18 wherein the variable impedance properties include first and second variable reactances of the network, the controller substantially simultaneously varying both of said variable reactances in a direction to achieve the match until an onset of the plasma tending to change in an unstable manner is indicated, the controller varying the values of the reactances so they deviate from the trajectory and the region is substantially avoided in response to detection of the onset of the tendency of the plasma to change in the unstable manner.

25. The apparatus of claim 24 wherein the region is avoided by the controller simultaneously varying the values of both reactances to establish a series of straight line trajectories in the vicinity of the periphery of an x-y plot of an unstable region of the plasma, where the values of x and y indicate values of the reactances.

26. The apparatus of claim 25 wherein the controller:

(a) varies the reactances so every other trajectory is at right angles to the immediate preceding trajectory, and (b) determines the slope of the immediate preceding trajectory from the values of the reactances as the two most recent values of best impedance match that define a slope different from the slope of the immediate preceding trajectory.

27. The apparatus of claim 26 wherein the controller varies the reactances so certain of the trajectories are traversed until detection of the unstable region and others of the trajectories are traversed until detection of a decrease of a measure of impedance match.

28. The apparatus of claim 26 wherein the controller:

(a) controls the reactances so some of the trajectories in the series extend into the region and others of the trajectories in the series extend about a periphery of the region, and (b) exchanges the magnitudes of the reactances and thereby changes at right angles between said some of said others of the trajectories in the series in response to detection of the plasma going between instability and stability.

29. The apparatus of claim 28 wherein the controller determines a measure of plasma stability by combining (a) a factor determined by an indication of plasma stability and (b) an indication of percent of power delivered by the source to the reactive impedance element, said measure changing value in a first direction while said some trajectories are being traversed and the plasma is stable, the controller detecting that the plasma has changed from stable to unstable when said measure is sensed as reversing direction of change in a second direction while said some of the trajectories in the series are being traversed, and establishing starting points of the others of the trajectories in the series at the values the reactances had when the plasma was detected as changing from stable to unstable, and changing the values of the reactances so the others of the trajectories in the series are traversed until said measure is sensed as reversing in value from the first direction to the second direction.

30. A memory for use with a computer in combination with an apparatus for supplying r.f. energy to a plasma in a vacuum plasma chamber for processing a workpiece, the apparatus being such that a gas in the chamber is coupled with a reactive impedance element for coupling an r.f. field to the gas, the r.f. field being such that it can excite the gas to the plasma, the reactive impedance element being connected via a matching network to an r.f. source that can generate the r.f. field, the matching network including variable impedance properties, the matching network being coupled to a load including the reactive impedance element and the plasma, the plasma having a tendency to change in an unstable manner which adversely affects processing of the workpiece, the apparatus deriving signals indicative of values of electrical parameters resulting from current flowing between the source and the load via the network, the memory comprising a medium storing signals for controlling the computer so the computer can (a) derive signals indicative of the plasma being in an unstable state in response to the signals indicative of the values of the electrical parameters, and (b) in response to the plasma being indicated as being at the onset of the unstable state, control the value of the variable impedance properties of the matching network so the plasma unstable tendency is substantially avoided and the plasma is maintained in a stable state while an impedance match is approached between the source and the impedance seen looking from the output terminals of the source.