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Distance measuring apparatus and shape measuring apparatus

  • US 5,929,980 A
  • Filed: 02/03/1998
  • Issued: 07/27/1999
  • Est. Priority Date: 08/07/1995
  • Status: Expired due to Fees
First Claim
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1. A distance measuring apparatus for measuring a distance from a reference plane to a laser lit position by beaming a laser beam from a laser oscillator to an article and sensing a reflected laser beam, characterized in that the apparatus comprises:

  • a lens array including a plurality of lenses having identical lens characteristics and disposed at uniform intervals on a plane, the lens array having a hole formed within the plane for allowing passage of the laser beam projected from the laser oscillator;

    a photodetector array including a plurality of photodetectors disposed on a plane and corresponding to each lens constituting the lens array, the photodetectors in the photodetector array being disposed at a distance of a focal length of the lens from the lenses in the lens array, the photodetector array having a hole formed within the plane for allowing passage of the laser beam projected from the laser oscillator;

    the laser oscillator projecting the laser beam toward the article in such a manner that a direction of the laser beam becomes perpendicular to the photodetector array and the lens array and that the laser beam passes through each of the holes formed in the photodetector array and the lens array;

    the lens array, the photodetector array, and the laser oscillator being disposed in front of the article so as to be separated from the article in that order; and

    calculating means for calculating an effective area on the photodetector array on the basis of an output of each photodetector in the photodetector array, when the laser beam reflected from the article is sensed by the photodetector array via the lens array, and for calculating a distance from the lens array to the article on the basis of the effective area and an angle of view of the lenses constituting the lens array.

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