Low net stress multilayer thin film coatings

• US 5,930,046 A
• Filed: 09/30/1997
• Issued: 07/27/1999
• Est. Priority Date: 02/13/1997
• Status: Expired due to Term

• Current Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Original Assignee: Optical Coating Laboratory, Inc. (Lumentum Holdings Inc.)
• Inventors: Pond, Bradley James, Solberg, Scott Eugene
• Primary Examiner(s): HENRY, JON W
• Application Number:
  US08/940,305
• Time in Patent Office: 665 Days
• Field of Search: 359/580, 359/582, 359/583, 359/584, 359/585, 359/586, 359/588, 359/589, 359/884, 359/359, 359/360
• US Class Current: 359/580
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/10 Glass or silica
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: G02B 1/115 Multilayers

Abstract

It has been discovered that control of the intra-layer stress in layers of high refractive index materials, such as zirconia and titania, permits low net stress multilayer thin film stacks comprising alternating layers of the high refractive index material and silica, a low refractive index material, to be sputter-deposited on glass substrates. In particular, a simple, cost-effective and readily reproducible post-deposition annealing process is used, i.e., an annealing process that can be effected within a broad temperature range and for a brief and substantially open-ended time period, to change the post-deposition microstructure of the high refractive index film layers and create a selected intra-layer tensile stress. The intra-layer tensile stress created during such an annealing process is largely dependent on the post-deposition microstructure of the high refractive index thin film layers. It has been further discovered that the deposition conditions and, in particular, ion bombardment energy, can be controlled to provide a selected and reproducible post-deposition microstructure that is partially amorphous and partially crystalline and which transforms during annealing to a very dense crystalline microstructure. This transformation results in film shrinkage and, because the film is constrained by the glass substrate, the film shrinkage produces a selected amount of tensile stress that compensates for the compressive stress of the silica thin film layers.

Claims

1. A low net stress optical device comprising multiple layers of metal oxide materials deposited by a sputtering process that sequentially uses magnetron sputter sources to deposit metal and an ion gun to effect oxidization of the metal to convert at least one of the layers of metal oxide to a partially crystalline state, and subjected to a post-deposition annealing process, said low net stress optical device comprising:

a) a glass substrate;

b) multiple thin layers of high refractive index metal oxide material deposited onto said glass substrate, said layers of high refractive index metal oxide material being dense, substantially crystalline, and moisture-stable; and

c) multiple thin layers of silicon dioxide deposited onto said glass substrate alternatingly with said thin layers of high refractive index metal oxide material.

2. The low net stress optical device described in claim 1 wherein said high refractive index metal oxide material is zirconium oxide.

3. The low net stress optical device described in claim 1 wherein said high refractive index metal oxide material is titanium oxide.

8. The low net stress optical device described in claim 1 wherein said layers of metal oxide material provide an amount of tensile stress such that net stress of the optical device is less than about 30 MPa.

4. A low net stress optical device comprising multiple layers of metal oxide materials deposited by a sputtering process that sequentially uses magnetron sputter sources to deposit metal and an ion gun to effect oxidization of the metal, and subjected to a post-deposition annealing process, said low net stress optical device comprising:

a) a glass substrate;

b) multiple thin layers of high refractive index metal oxide material deposited onto said glass substrate, said layers of high refractive index metal oxide material being dense and moisture-stable; and

c) multiple thin layers of silicon dioxide deposited onto said glass substrate alternatingly with said thin layers of high refractive index metal oxide material;

wherein at least one layer of said metal oxide is split into a plurality of sub-layers separated by at least one very thin layer of isolator material.

5. The low net stress optical device described in claim 4 wherein said isolator material is less than about 20 nm thick such that said isolator material has minimal optical effect.

6. The low net stress optical device described in claim 5 wherein said isolator material is less than about 2 nm thick.

7. The low net stress optical device described in claim 6 wherein said optical device is a visible light transmitting optical interference filter.

9. The low net stress optical device described in claim 4 wherein said metal oxide is selected from the group consisting of zirconium oxide and titanium oxide.

10. The low net stress optical device described in claim 4 wherein said isolator material is silicon dioxide.

11. The low net stress optical device described in claim 4 wherein said layers of metal oxide material have a crystalline microstructure and provide an amount of tensile stress such that net stress of the optical device is less than about 30 MPa.

12. A low net stress optical device comprising multiple layers of metal oxide materials deposited by a sputtering process that sequentially uses magnetron sputter sources to deposit metal and an ion gun to effect oxidization of the metal, and subjected to a post-deposition annealing process, said low net stress optical device comprising:

a) a glass substrate;

b) multiple thin layers of high refractive index metal oxide material deposited onto said glass substrate, said layers of high refractive index metal oxide material being dense and moisture-stable, wherein said high refractive index metal oxide material is zirconium oxide; and

c) multiple thin layers of silicon dioxide deposited onto said glass substrate alternatingly with said layers of high refractive index metal oxide material,

wherein at least one layer of said zirconium oxide is split into a plurality of sub-layers separated by at least one very thin layer of isolator material.

13. The low net stress optical device described in claim 12 wherein said isolator material is less than about 20 nm thick such that said isolator material has minimal optical effect.

14. The low net stress optical device described in claim 12 wherein said isolator material is less than about 2 nm thick.

15. The low net stress optical device described in claim 12 wherein said isolator material is silicon dioxide.

16. The low net stress optical device described in claim 12 wherein said optical device is a visible light transmitting optical interference filter.

17. The low net stress optical device described in claim 12 wherein said layers of metal oxide material have a crystalline microstructure and provide an amount of tensile stress such that net stress of the optical device is less than about 30 MPa.