Arrangement and method for detecting sequential processing effects in manufacturing using predetermined sequences within runs

• US 5,930,138 A
• Filed: 09/10/1997
• Issued: 07/27/1999
• Est. Priority Date: 08/22/1995
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Ling, Zhi-Min, Pak, James, Lin, Yung-Tao, Shiau, Ying
• Primary Examiner(s): Grant, William
• Assistant Examiner(s): PATEL, RAMESH B
• Application Number:
  US08/926,487
• Time in Patent Office: 685 Days
• Field of Search: 364/468.15, 364/468.16, 364/468.17, 364/461.28, 364/551.01, 364/551.02, 364/580, 364/578, 364/420, 364/490, 395/21, 395/22, 395/24, 395/26, 395/27, 438/9, 438/16, 438/17, 324/765, 382/145, 382/226, 382/228, 437/8, 437/939, 437/7, 348/6, 348/21, 348/14, 348/46
• US Class Current: 700/108
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y10S 148/162 Testing steps

Abstract

An arrangement and method for detecting sequential processing effects on products to be manufactured in a manufacturing process orders a first set of the products in a first specified processing sequence for a first process step in the manufacturing process. In order to prevent any positional trend created at one process step from being carried over into the next process step, the first set of the products is re-ordered into a second, different specified processing sequence for a second process step in the manufacturing process. Data regarding responses of the first set of the products to the process steps are extracted. The extracted data are correlated with the first and second processing sequences and data analysis is performed on the correlated extracted data. These steps are repeated for subsequent sets of the products, so that although the specified processing sequence is different for each of the individual process steps for a set of products, the same processing sequences for the individual processing steps are used for subsequent sets of the products to be manufactured. Since the processing sequences are not randomized from set to set and do not have to be provided to a database, the amounts of interfacing and disk storage needed are greatly reduced.

Claims

1. An arrangement for detecting sequential processing effects on products to be manufactured in a manufacturing process, comprising:

a plurality of processing apparatuses that perform different respective processing steps of the manufacturing process on the products;

a detector that detects a response variable of the devices;

a memory for storing a processing sequence of the products for each processing step, the processing sequence of each processing step being different from the processing sequence of each other processing step, wherein the processing sequences for the different processing steps are maintained for different lots of products such that each lot of products is processed in the same respective processing sequence at each of the different processing steps of the manufacturing process; and

a data processor that produces plots of the response variable for each product against the stored processing sequence of the products for each processing step and determines whether there are any systematic, product-positional effects on yield of the products.

2. The arrangement of claim 1, wherein the data processor includes means for applying control chart rules to the plots, determining whether there are any rule violations based on the application of the control chart rules to the plots, and generating a control chart having a rule violation in response to the determination of a rule violation.

3. The arrangement of claim 2, further comprising a plurality of product handlers, each product handler re-ordering the products between processing steps in accordance with the processing sequence for the next processing step to be performed on the products.

4. The arrangement of claim 3, wherein each product handler includes means for storing the processing sequence for the next processing step,.

5. The arrangement of claim 3, further comprising means for initially randomly generating the processing sequences for the different processing steps for a first set of the products to be manufactured, the same processing sequences being used for the different processing steps for all subsequent sets of products to be manufactured within a run of sets of products.

6. The arrangement of claim 3, wherein the product handlers are wafer handlers, and the devices are wafers.

7. The arrangement of claim 1, wherein the memory includes means for storing the processing sequences for the different processing steps in tabular form.