Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system
First Claim
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1. A chemical mechanical polishing apparatus, comprising:
- a pad support plate having a projection extending from a bottom surface thereof;
a polishing pad attachable to a top surface of the pad support plate;
a rotatable platen configured to support the pad support pad plate, the platen including an aperture to receive the projection; and
a fastener coined to the rotatable platen, the fastener configured to engage the projection and secure the pad support plate to the platen.
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Abstract
A chemical mechanical polishing apparatus includes a rotatable platen for receiving a polishing pad. The polishing pad is attached to a polishing pad support plate. The polishing pad support plate is removably secured to the platen by a fastening assembly.
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Citations
18 Claims
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1. A chemical mechanical polishing apparatus, comprising:
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a pad support plate having a projection extending from a bottom surface thereof; a polishing pad attachable to a top surface of the pad support plate; a rotatable platen configured to support the pad support pad plate, the platen including an aperture to receive the projection; and a fastener coined to the rotatable platen, the fastener configured to engage the projection and secure the pad support plate to the platen. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A chemical mechanical polishing apparatus, comprising:
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a rotatable platen having a recess in a surface thereof; and an arm positionable at least partially in the recess and pivotally movable between a first position in which the arm engages a projection of a pad support plate and a second position in which the arm does not engage the projection. - View Dependent Claims (9, 10, 11)
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12. An article for use with a chemical mechanical polishing apparatus, comprising:
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a substantially rigid disk-shaped member; a plurality of pins projecting from a bottom surface of the disk-shaped member, the pins positioned and configured to fit into apertures in a top surface of a platen; and a polishing pad attachable to a top surface of the disk-shaped member.
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13. A chemical mechanical polishing apparatus, comprising:
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a pad support plate having a plurality of pins extending from a bottom surface thereof; a polishing pad attached to a top surface of the pad support plate; a rotatable platen having a top surface to support the pad support pad plate, the platen having a plurality of cavities and a plurality of apertures connecting the top surface to the cavities and configured to receive the pins; and a plurality of fasteners connected to the platen, each fastener disposed at least partially in one of the cavities and movable between a first position in which the fastener engages one of the pins to secure the pad support plate to the platen and a second position in which the fastener does not engage that pin. - View Dependent Claims (14, 15, 16, 17)
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18. A method of securing a polishing pad to a platen, comprising:
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attaching the polishing pad to a pad support plate having a projection extending from a bottom surface thereof; positioning the pad support plate on a platen so that the projection extends at least partially into an aperture in the platen; and moving a fastener connected to the platen to engage the projection.
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Specification