Low temperature encapsulation system
First Claim
1. A method of processing a thin film surface to prepare said surface for etching, said thin film surface comprising at least one raised portion bordered by at least one adjacent recess, said method comprising the steps of:
- a) applying an adhesive film to said raised portion;
b) depositing a fluid into said recess, said fluid held in said recess by said film;
c) curing said fluid; and
d) removing said film.
3 Assignments
0 Petitions
Accused Products
Abstract
A method for preparing the air bearing surface of a slider for etch patterning including the steps of applying a first thin film to a carrier, applying a second thin film to the carrier, the first thin film and the second thin film separated by a recess, each of the first and second thin films having respective first and second air bearing surfaces, applying an adhesive film over the first and second thin films, depositing a fluid in the recess, the fluid held in the recess by the adhesive film, curing the fluid, and removing the adhesive film. The method of the invention may also include coating the first and second air bearing surfaces with an etch mask, developing the etch mask, and patterning the first and second air bearing surfaces.
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Citations
28 Claims
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1. A method of processing a thin film surface to prepare said surface for etching, said thin film surface comprising at least one raised portion bordered by at least one adjacent recess, said method comprising the steps of:
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a) applying an adhesive film to said raised portion; b) depositing a fluid into said recess, said fluid held in said recess by said film; c) curing said fluid; and d) removing said film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for preparing the air bearing surface of a slider for etch patterning, said method comprising the steps of:
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a) applying a first thin film to a carrier; b) applying a second thin film to said carrier, said first thin film and said second thin film separated by a recess, each of said first and second thin films comprising respective first and second air bearing surfaces; c) applying an adhesive film over said first and second thin films adjacent said first and second air bearing surfaces; d) depositing a fluid in said recess, said fluid held in said recess by said adhesive film; e) curing said fluid; and f) removing said adhesive film. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification