MBE deposition method employing effusion cell having a unibody crucible

• US 5,932,294 A
• Filed: 03/12/1997
• Issued: 08/03/1999
• Est. Priority Date: 05/03/1995
• Status: Expired due to Term

• Current Assignee: Veeco Compound Semiconductor Incorporated (Veeco Instruments Incorporated)
• Original Assignee: Chorus Corporation
• Inventors: Donadio, Robert F., Colombo, Paul E.
• Primary Examiner(s): DYE, RENA
• Application Number:
  US08/816,166
• Time in Patent Office: 874 Days
• Field of Search: 427/469, 427/576, 427/562, 427/577, 427/578, 427/255.1, 427/566, 427/529, 118/726, 392/388, 392/389, 219/420, 219/421, 432/263, 432/265, 432/156, 432/157
• US Class Current: 427/469
• CPC Class Codes: C04B 35/583 based on boron nitride
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/342 Boron nitride
• CPC Class Codes: C30B 23/066 Heating of the material to be evaporated
• CPC Class Codes: F27B 14/10 Crucibles
• CPC Class Codes: F27B 2014/102 Form of the crucibles
• CPC Class Codes: F27D 1/1636 Repairing linings by projecting or spraying refractory materials on the lining
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]

Abstract

A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.

Claims

1. A method for depositing a thin film of material epitaxially on a substrate located within a vacuum growth chamber, comprising:

providing an effusion cell comprising;

a support assembly comprising a mounting flange and at least one support post extending from the mounting flange; and

a head assembly connected to the at least one support post, the head assembly comprising a container for holding the material and a heater surrounding at least a portion of the container for heating the material in the container, the container comprising a rigid wall structure enclosing an interior space, said wall structure defining a base portion and a neck portion attached to the base portion, the neck portion having a negative draft angle extending away from the base portion and terminating in a neck orifice, the base portion having a first peripheral dimension and the neck orifice having a second peripheral dimension, said second peripheral dimension being less than said first peripheral dimension;

placing the material to be deposited on the substrate within said container;

mounting the effusion cell to the growth chamber such that the head assembly is located within the growth chamber and the orifice of the container is directed toward the substrate; and

forming a molecular beam of material by heating the material in the container under conditions sufficient to form the molecular beam which effuses out of the container and is deposited epitaxially on the substrate.

2. The method as claimed in claim 1, wherein said wall structure is made of a material which is inert, corrosion resistant, and heat stable in air having a predetermined oxidation temperature.

3. The method as claimed in claim 2, wherein said wall structure is made of pyrolytic boron nitride.

4. The method as claimed in claim 1, wherein the wall structure has a substantially uniform wall thickness.

5. The method as claimed in claim 1, wherein the base portion of the wall structure is substantially cylindrical in shape, and the neck portion of the wall structure is substantially conical in shape.

6. The method as claimed in claim 1, wherein said wall structure further comprises a conical section connected to the neck portion at the neck orifice, the conical section having a second orifice, said second orifice having a third peripheral dimension which is greater than the second peripheral dimension.

7. The method as claimed in claim 6, wherein said container further comprises a lip disposed about the second orifice.

8. The method as claimed in claim 1, wherein said container is constructed of one piece material and is made of pyrolytic boron nitride.

9. The method as claimed in claim 1, wherein said second peripheral dimension is between approximately 1.5 cm and 2.2 cm.

10. The method as claimed in claim 1, wherein the ratio of said first peripheral dimension to said second peripheral dimension is between approximately 2.3/1 and 3.2/1.