Heated pressure transducer assembly

• US 5,932,332 A
• Filed: 05/27/1997
• Issued: 08/03/1999
• Est. Priority Date: 01/16/1996
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Navarro, Paul W., Pandorf, Robert C.
• Primary Examiner(s): Davis, Jenna
• Assistant Examiner(s): Cole, Elizabeth M.
• Application Number:
  US08/863,547
• Time in Patent Office: 798 Days
• Field of Search: 442/394, 442/379, 442/391, 428/220
• US Class Current: 428/220
• CPC Class Codes: B32B 2255/10 on synthetic resin layer or on natural or synthetic rubber layer
• CPC Class Codes: B32B 2255/205 Metallic coating
• CPC Class Codes: B32B 2262/0269 Aromatic polyamide fibres
• CPC Class Codes: B32B 2262/101 Glass fibres
• CPC Class Codes: B32B 2307/304 Insulating
• CPC Class Codes: B32B 27/12 next to a fibrous or filamentary layer
• CPC Class Codes: B32B 27/281 comprising polyimides
• CPC Class Codes: B32B 5/022 Non-woven fabric
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 19/142 Multiple part housings
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: Y10T 442/657 Vapor, chemical, or spray deposited metal layer
• CPC Class Codes: Y10T 442/67 Multiple nonwoven fabric layers composed of the same inorganic strand or fiber material

Abstract

The disclosed pressure transducer assembly includes an external enclosure, a thermal shell disposed within the external enclosure, and a pressure sensor disposed within the thermal shell. The pressure sensor senses the gas or vapor pressure present in a tube coupling the sensor to a source of pressurized gas or vapor. The assembly includes a device for heating the thermal shell, and thermal insulation is disposed between the thermal shell and the external enclosure. The thermal insulation includes a plurality of metalized high temperature films stacked one on top of another and a plurality of spacer layers, each of the spacer layers being disposed between adjacent ones of the metalized high temperature films.

Claims

1. A thermal insulator, disposed between a thermal shell and an external enclosure of a heated pressure transducer assembly, wherein the external enclosure remains substantially at ambient temperature independent of the temperature of the thermal shell over normal operating temperatures of the heated pressure sensor assembly of up to about 150°

C., the thermal insulator comprising;

(A) a plurality of metalized high temperature films stacked one on top of another, wherein the high temperature films have a thickness of not more than about 0.001 inches and do not shrink or melt at the normal operating temperatures of the heated pressure sensor assembly;

(B) a plurality of thermal convection and conduction control means for trapping air and for providing a thermal conductivity lower than that of silicone rubber, each of said thermal convection and conduction control means having a thermal conductivity of less than about 0.07 W/m °

C. and being disposed between adjacent ones of said metalized high temperature films, wherein the overall thickness of one thermal convection and control means disposed between two metalized high temperature layers is on the order of about 12 thousandths of an inch or less.

2. An insulator according to claim 1, wherein one or more of said thermal convection and control means comprises a non-woven glass mat.

3. An insulator according to claim 2, wherein one or more of said thermal convection and control means comprises a non-woven E glass mat.

4. An insulator according to claim 1, wherein one or more of said high temperature films comprises polyimide.

5. An insulator according to claim 1, wherein one or more of said high temperature films comprises aluminized polyimide.