Vibrating structure gyroscope
First Claim
1. A vibrating structure gyroscope including a substantially planar vibrating resonator having a substantially ring or hoop-like shape structure with inner and outer peripheries extending around a common axis, electromagnetic drive means for causing the resonator to vibrate, support means including a plurality of flexible support beams for supporting the resonator and for allowing the resonator to vibrate in response to the electromagnetic drive means, in a substantially undamped oscillation mode such as to permit the resonator to move relative to the support means in response to turning rate, which said support beams and said resonator are made from silicon, and electromagnetic sensing means for sensing movement of the resonator, which said electromagnetic drive means and said electromagnetic sensing means include metal tracks on the ring or hoop-like shape structure resonator and on the support beams, together with means for generating or providing a magnetic field substantially perpendicular to the plane of the vibratory resonator.
6 Assignments
0 Petitions
Accused Products
Abstract
A vibrating structure gyroscope has a vibratory resonator having a substantially ring or hoop-like shape structure, an electromagnetic drive for causing the resonator to vibrate, a support structure including a plurality of flexible support beams for supporting the resonator whilst allowing it to vibrate and an electromagnetic sensor for sensing movement of the resonator. The support beams and resonator are made from silicon and the electromagnetic drive and sensor include metal tracks which extend externally along each support beam onto and along respective segments of an outer substantially planar surface of the ring-like resonator. The resonator is substantially planar and means is produced a magnetic field substantially perpendicular to the plane of the resonator.
44 Citations
9 Claims
- 1. A vibrating structure gyroscope including a substantially planar vibrating resonator having a substantially ring or hoop-like shape structure with inner and outer peripheries extending around a common axis, electromagnetic drive means for causing the resonator to vibrate, support means including a plurality of flexible support beams for supporting the resonator and for allowing the resonator to vibrate in response to the electromagnetic drive means, in a substantially undamped oscillation mode such as to permit the resonator to move relative to the support means in response to turning rate, which said support beams and said resonator are made from silicon, and electromagnetic sensing means for sensing movement of the resonator, which said electromagnetic drive means and said electromagnetic sensing means include metal tracks on the ring or hoop-like shape structure resonator and on the support beams, together with means for generating or providing a magnetic field substantially perpendicular to the plane of the vibratory resonator.
Specification