Multi-chamber treatment system

• US 5,934,856 A
• Filed: 04/28/1997
• Issued: 08/10/1999
• Est. Priority Date: 05/23/1994
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Saeki, Hiroaki, Asakawa, Teruo
• Primary Examiner(s): Keenan, James W.
• Application Number:
  US08/837,948
• Time in Patent Office: 834 Days
• Field of Search: 414/217, 414/225, 414/416, 414/744.2, 414/744.5, 414/744.6, 414/935, 414/937, 414/939, 414/941
• US Class Current: 414/217
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/67184 characterized by the presence of more than one transfer chamber
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease of the number of the vacuum process chambers, without entailing any change in a load-lock chamber and a transfer arm. The transfer arm has a minimum radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers and a maximum arm reach such that the arm can deliver an object to-be-treated between each vacuum process chamber and a transfer chamber of a maximum size corresponding to a maximum number of vacuum process chambers. Thus, even though the number of the vacuum process chambers are increased or decreased with the change of the processes, it is necessary only that the shape and size of the transfer chamber be changed, and the other components, such as the load-lock chamber, transfer arm, etc., can be used in common, so that the manufacture and assembling of the system are very easy, ensuring a reduction in cost. Also, reduced-pressure treatment apparatus and a normal-pressure treatment apparatus are connected to each other by means of the load-lock chamber for replacement between the atmosphere and vacuum.

Claims

1. A multi-chamber treatment system comprising:

a substantially polygonal transfer chamber,

a plurality of vacuum process chambers arranged in a polygonal shape around the transfer chamber, the number of which is initially variable and in each of which a process is to performed, each of the vacuum process chambers communicating with the transfer chamber through a first type gate valve,

wherein the number of vacuum process chambers to be arranged around the transfer chamber is set in direct dependence upon the desired number of processes to be performed, and wherein the transfer chamber has a shape and size designed according to the set number of vacuum process chambers,

at least one load-lock chamber communicating with the transfer chamber through a second type gate valve, and

a rotatable and expandable transfer arm having a hand portion for holding an object to-be-treated, and multi-joint arms including a first portion and a second portion which are rotatable connected, the transfer arm being located in the transfer chamber and adapted to fetch the object to-be-treated from said at least one load-lock chamber and to carry the object to-be-treated into each vacuum process chamber, and to remove the object processed from each vacuum process chamber and return the object to said at least one load-lock chamber;

the transfer arm being extendable from a minimum extension defining a radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers to a maximum arm extension such that the transfer arm can deliver the object to-be-treated to each vacuum process chamber when the transfer chamber is of a maximum size corresponding to a maximum number of vacuum process chambers,

wherein a minimum radius R of rotation of the transfer arm is defined as ##EQU3## such that when θ

₂ =0, ##EQU4## and wherein r₁ is a radius of the first portion of the multi-joint arms,

θ

₂ is a minimum opening angle between a center line (L3) of the transfer arm and a center line (L4) of the multi-joint arms,

W_r is a radius of the object to-be-treated, and

Q is a maximum arm extension.

2. The multi-chamber treatment system according to claim 1, which further comprises transfer arm control means in which can be stored information concerning:

(a) a route for processing the object to-be-treated,

(b) the number of vacuum process chambers attached to the transfer chamber,

(c) the dimensions of the transfer chamber based on the number of vacuum process chambers, and

(d) the length of the hand portion.

3. The multi-chamber treatment system according to claim 1, wherein the transfer chamber includes a cover for sealing the transfer chamber, the cover being divided into at least two divisions such that the transfer chamber is opened and closed by opening and closing one of the divisions.

4. The multi-chamber treatment system according to claim 1, wherein the hand portion of the transfer arm has two hands for individually carrying two objects to-be-treated.

5. A multi-chamber treatment system according to claim 1, further comprising a first normal-pressure treatment device and a second normal-pressure treatment device,

the first normal-pressure treatment device including a first normal-pressure transfer chamber connected by said at least one load-lock chamber to the polygonal transfer chamber, at least one normal-pressure process treatment unit, and a first normal-pressure transfer arm located within the first normal-pressure transfer chamber and being extendable to transport the object to-be-treated between said at least one load-lock chamber and at least one normal-pressure process treatment unit of the second normal-pressure treatment device, and

the second normal-pressure treatment device including a second normal-pressure transfer chamber, a process chamber with a mounting member connecting the first normal-pressure transfer chamber and the second normal-pressure transfer chamber, said at least one normal-pressure process treatment unit of the second normal-pressure treatment device, and a second normal-pressure transfer arm located within the second normal-pressure transfer chamber and being extendable to transport an object to-be-treated between the process chamber with the mounting member and the said at least one normal-pressure process treatment unit of the second normal-pressure treatment device.

6. The multi-chamber treatment system according to claim 1, which further comprises an alignment mechanism situated in a fixed position beyond the minimum radius of rotation of the transfer arm in the transfer chamber such that the alignment mechanism receives the object to-be-treated from the transfer arm, and said alignment mechanism aligns the object to-be-treated for treatment.

7. The multi-chamber treatment system according to claim 6, wherein

two load-lock chambers are arranged at a suitable angle with respect to each other so that respective center lines thereof are directed to a pivot center of the transfer arm, and wherein

the alignment mechanism is situated halfway between the respective center lines of the two load-lock chambers.

8. A multi-chamber treatment system according to claim 1, further comprising:

a normal-pressure treatment device including;

a normal-pressure process treatment unit for treating the object to-be-treated under pressure not lower than normal pressure;

a normal-pressure transfer chamber; and

a transportation means for transporting the object to-be-treated under pressure not lower than normal pressure; and

wherein said at least one load-lock chamber connects the polygonal transfer chamber and the normal-pressure transfer chamber, and wherein ambient pressure within said at least one load-lock chamber is replaceable with one of atmospheric and vacuum pressure, the not-lower-than-normal pressure transportation means being capable of loading the object to-be-treated into the normal-pressure process treatment unit and said at least one load-lock chamber.

9. A multi-chamber treatment system according to claim 8, wherein the not-lower-than-normal pressure transportation means includes a transfer arm.

10. A multi-chamber treatment system according to claim 1, further comprising:

a normal-pressure treatment device including a normal-pressure process treatment unit for treating the object to-be-treated under pressure not lower than normal pressure as the object-to-be-treated is transferred to a region within a transportation range of a transportation means for transporting the object to-be-treated under pressure not lower than normal pressure; and

wherein

said at least one load-lock chamber is located in a position where respective transportation ranges of the transfer arm located in the polygonal transfer chamber and the not-lower-than-normal pressure transportation means overlap each other, and said at least one load-lock chamber is adapted to connect locations to which the object to-be-treated is transported by the transfer arm and the not-lower-than-normal pressure transportation means and to replace ambient pressure therein with one of atmospheric and vacuum pressure.

11. A multi-chamber treatment system according to claim 10, wherein the not-lower-than-normal pressure transportation means includes a transfer arm.

12. A multi-chamber treatment system comprising:

a substantially polygonal transfer chamber,

a plurality of vacuum process chambers arranged in a polygonal shape around the transfer chamber, the number of which is initially variable and in each of which a process is to be performed, each of the vacuum process chambers communicating with the transfer chamber through a gate valve,

wherein the number of vacuum process chambers in communication with the transfer chamber is set in direct dependence upon the processes to be performed and wherein the transfer chamber has a shape and a size designed according to the set number of vacuum process chambers,

at least one load-lock chamber communicating with the transfer chamber through a gate valve, and

a rotatable and expandable transfer arm having a pair of hand portions for holding an object to-be-treated, and multi-joint arms including a first portion and a second portion which are rotatable connected, the transfer arm being located in the transfer chamber and adapted to fetch the object to-be-treated from said at least one load-lock chamber and to carry the object to-be-treated into each vacuum process chamber, and to remove the object processed from each vacuum process chamber and return the object to said at least one load-lock chamber;

the transfer arm being extendable from a minimum extension defining a radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers to a maximum arm extension such that the transfer arm can deliver the object to be-treated to each vacuum process chamber when the transfer chamber is of a maximum size corresponding to a maximum number of vacuum process chambers,

wherein a minimum radius R of rotation of the arm is defined as ##EQU5## such that when θ

₂ =0 ##EQU6## and wherein r₁, is a radius of the first portion of the multi-joint arms,

θ

₂ is a minimum opening angle between a center line (L3) of the transfer arm and a center line (L4) of the multi-joint arms,

W_r is a radius of the object to-be-treated, and

Q is a maximum arm extension.