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Thin film resonant chemical sensor with resonant acoustic isolator

  • US 5,936,150 A
  • Filed: 04/13/1998
  • Issued: 08/10/1999
  • Est. Priority Date: 04/13/1998
  • Status: Expired due to Term
First Claim
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1. A chemical sensor for sensing chemicals in an environment, comprising:

  • a substrate;

    a chemically sensitive thin-film acoustic resonator, comprising;

    a piezoelectric resonator having an acoustic resonance quality, andan organic coating on a surface of said piezoelectric resonator and exposed to the environment, said coating and said piezoelectric resonator together having an acoustic resonance quality less than that of said piezoelectric resonator by itself; and

    a resonant acoustic isolator, interfacing between said chemically sensitive thin film acoustic resonator and said substrate and having a resonant frequency substantially matching that of said thin film acoustic resonator, thereby acoustically isolating said chemically sensitive thin film acoustic resonator from said substrate at said resonant frequency.

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