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Thermosensitive flow rate detecting element and flow rate sensor using same

  • US 5,936,157 A
  • Filed: 11/12/1997
  • Issued: 08/10/1999
  • Est. Priority Date: 07/03/1997
  • Status: Expired due to Term
First Claim
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1. A thermosensitive flow rate detecting element comprising:

  • a flat substrate provided with a gap having an opening on at least one side thereof for the flow of a fluid;

    an insulating support film provided on said one side of said flat substrate;

    a sensor unit which comprises a heating element for heating said fluid and a thereoosensitive element for detecting temperature of said fluid provided in the upper position of said opening on said insulating support film; and

    a fluid temperature measuring element, provided at a distance from said sensor unit on said one side of said flat substrate, for detecting temperature of said fluid,wherein said thermosensitive flow rate detecting element measures flow rate or flow velocity of said fluid on the basis of a temperature detected by said thermosensitive element, by keeping heating temperature of said heating element at a level higher than a temperature detected by said fluid temperature measuring element by a prescribed difference in temperature, andwherein a first notch is provided on said flat substrate near said fluid temperature measuring element and is formed by removing a part of said flat substrate from either side thereof so as not to reach the remaining side thereof.

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