×

Deformable mirror device and manufacturing method thereof

  • US 5,936,760 A
  • Filed: 06/10/1997
  • Issued: 08/10/1999
  • Est. Priority Date: 06/10/1996
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of manufacturing a deformable mirror device, comprising, stated in the following order, the steps of:

  • forming an electrode layer on a substrate in a predetermined pattern;

    forming a thick film on upper surfaces of said substrate and said electrode layer;

    forming a support plate having a predetermined pattern on an upper surface of said thick film;

    situating a mask having a predetermined pattern on an upper surface of said support plate and partially etching said support plate and said thick film to form at least one through hole;

    coating a photoresist on the upper surface of said support plate and within said through hole and exposing and etching said coated photoresist using a mask having a predetermined pattern so that edge portions of said support plate are removed, thereby to separate said support plate from adjacent support plates;

    forming a post on one side of an inner surface of said through hole by a sputtering process;

    forming a reflecting plate on an upper surface of said support plate; and

    removing said thick film.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×