Microfabricated filter and capsule using a substrate sandwich

• US 5,938,923 A
• Filed: 04/15/1997
• Issued: 08/17/1999
• Est. Priority Date: 04/15/1997
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Tu, Jay Kuang-Jieh, Ferrari, Mauro
• Primary Examiner(s): Drodge, Joseph W.
• Application Number:
  US08/842,686
• Time in Patent Office: 854 Days
• Field of Search: 210/348, 210/321.6, 210/490, 210/488, 210/500.22, 210/500.26, 210/321.84, 210/500.25, 604/490.1, 604/491.1, 604/492.1, 424/423, 424/424, 424/451, 216/2, 216/56, 156/643, 156/645
• US Class Current: 210/490
• CPC Class Codes: A61K 2035/128 capsules, e.g. microcapsules
• CPC Class Codes: B01D 2323/081 Heating
• CPC Class Codes: B01D 2325/04 Characteristic thickness
• CPC Class Codes: B01D 39/2072 the material being particulate or granular
• CPC Class Codes: B01D 67/0058 by selective elimination of components, e.g. by leaching
• CPC Class Codes: B01D 67/0062 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: B01D 67/0072 by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B01D 71/0213 Silicon
• CPC Class Codes: B01D 71/0215 Silicon carbide; Silicon nitride; Silicon oxycarbide
• CPC Class Codes: G03F 7/0015 Production of aperture devices, microporous systems or stamps

Abstract

A microfabricated filter made up of two bonded substrate structures, each consisting of single crystalline silicon can optionally be formed into a capsule. The pores of the filter consist of one or more channels disposed between the two substrate structures. The width of the channels are defined by a thickness of a sacrificial layer formed on one of the substrate structures. The filter includes pores having a precisely controlled pore width which may be as small as 5 nanometers. The filter provides a relatively high mechanical strength relative to filters having polycrystalline silicon structures and also has a high throughput and can be modified to have high resistance to adsorption of particles.

Claims

1. A filter comprising:

a first substrate structure directly bonded to a second substrate structure; and

,

at least one pore located between the first and second substrate structures having a pore size less than about 500 nm and having a pore uniformity of ±

1-3 nm,

wherein said first substrate structure and second substrate structure each comprise single crystalline silicon.

2. The filter of claim 1, wherein said at least one pore is formed by sacrificing at least one sacrificial layer formed by a thin-film deposition process.

3. The filter of claim 1, wherein said pore size is a width.

4. The filter of claim 1, wherein said pore size is less than about 50 nanometers.

5. The filter of claim 1, wherein said pore size is in the range of about 5-20 nanometers.

6. The filter of claim 1, wherein said pore size is in the range of about 1-5 nanometers and the pore uniformity is about ±

1 nm.

7. The filter of claim 1, wherein said pore size is less than about 1 nm and the pore uniformity is ±

1 nm.

8. The filter of claim 1, wherein said pore size is about 5 nanometers and the pore uniformity is about ±

1 nm.

9. The filter of claim 1, wherein said pore size is about 2 nanometers and the pore uniformity is about ±

1 nm.

10. The filter of claim 1, wherein said pore size is about 1 nanometer and the pore uniformity is about ±

1 nm.

11. The filter of claim 1, further comprising a plurality of anchor points located proximate to the pores and connecting the first and second substrate structures.

12. The filter of claim 1, wherein the first substrate structure is directly bonded to the second substrate structure by a fusion or anodic bond.

13. The filter of claim 1, wherein the at least one pore is linear and about 8-150 mm in length.

14. The filter of claim 1, wherein the at least one pore is serpentine-shaped and is about 600 mm in length.

15. The filter of claim 1 comprising a plurality of pores.

16. The filter of claim 1 comprising a plurality of pores, wherein at least two of the pores have different pore sizes to sequentially filter a throughput having more than one specie.

17. A method of fabricating a filter comprising the steps of:

providing a first single crystalline silicon substrate having masked and unmasked portions;

depositing a first sacrificial layer having a thickness t on said unmasked portions;

creating a pore width of about t÷

2.27±

1-5 nm by removing said first sacrificial layer from said first single crystalline substrate forming a recess; and

directly bonding a second single crystalline silicon substrate to the first crystalline substrate.

18. The method of claim 17 further comprising:

depositing a second sacrificial layer in said recess to prevent the second substrate from blocking off the pore; and

removing said second sacrificial layer from said recess.

19. The method of claim 17, wherein the first substrate is directly bonded to the second substrate by a fusion or anodic bond.

20. A capsule having a porous region comprising:

a first substrate structure having at least one first cavity;

a second substrate structure having at least one second cavity directly bonded to said first substrate structure, wherein said at least one first and second cavity define at least one chamber;

at least one pore having a pore size of less than about 500 nm and having a pore uniformity of ±

1-3 nm,

wherein said first and second substrate structures each comprise since crystalline silicon.

21. The capsule of claim 20, further comprising a biologically-active substance disposed within said at least one chamber.

22. The capsule of claim 20, wherein said at least one chamber includes a plurality of projections.

23. The capsule of claim 20, wherein the first substrate structure is directly bonded to the second substrate structure by a fusion or anodic bond.

24. The capsule of claim 20, wherein the at least one pore is linear and about 8-150 mm in length.

25. The capsule of claim 20, wherein the at least one pore is serpentine-shaped and is about 600 mm in length.

26. The capsule of claim 20 comprising a plurality of pores.

27. A method of fabricating a capsule having a porous region comprising the steps of:

providing a first single crystalline silicon substrate;

forming a recess in said first single crystalline silicon substrate;

forming a first cavity in said first single crystalline silicon substrate;

providing a second single crystalline silicon substrate;

forming a second cavity in said second single crystalline silicon substrate; and

directly bonding said first and second single crystalline silicon substrates, wherein the first and second cavities are aligned.

28. The method of claim 27, wherein said forming the recess includes:

forming a first sacrificial layer on said first single crystalline substrate; and

removing said first sacrificial layer from said first single crystalline substrate.

29. The method of claim 27 wherein the recess forming act includes the acts of:

depositing a mask on a portion of the first crystalline substrate to produce masked and unmasked portions;

depositing a second sacrificial layer having a thickness t on said unmasked portions and

removing said second sacrificial layer producing the recess having a depth of t divided by about 1.27.

30. The method of claim 27, wherein the first substrate is directly bonded to the second substrate by a fusion or anodic bond.

31. A capsule comprising:

a plurality of directly bonded single crystalline silicon substrates having a plurality of anchor points each located between the substrates;

a plurality of chambers each located between the substrates; and

,

a plurality of pores, each located between the substrates, each having a pore size less than about 500 nm, and having a pore uniformity of about ±

1-3 nm.