Micromechanical component

• US 5,939,171 A
• Filed: 07/24/1997
• Issued: 08/17/1999
• Est. Priority Date: 01/24/1995
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: Siemens AG
• Inventors: Biebl, Markus
• Primary Examiner(s): Watkins, III, William P.
• Application Number:
  US08/875,371
• Time in Patent Office: 754 Days
• Field of Search: 428/141, 428/901, 428/156, 428/131, 216/2, 216/11, 73/514.31, 438/52
• US Class Current: 428/141
• CPC Class Codes: B81B 3/001 Structures having a reduced contact area, e.g. with bumps or with a textured surface
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10T 428/24273 including aperture
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
• CPC Class Codes: Y10T 428/24479 including variation in thickness

Abstract

Micromechanical component, wherein there are present, between a movable part (2) and a substrate (1), narrowly bounded spikes or spacers (3) which are composed of dielectric and which prevent the movable part from adhering (sticking) to the opposite surface during production and while the component is being operated during deflection in the direction of the substrate. Said spikes are produced by etching an auxiliary layer between the substrate and the structural layer (2) through etching apertures (4) to such an extent that only the layer components (3) forming such spikes are left behind.

Claims

1. A micromechanical component comprising:

a substrate comprising a substrate surface and a movable part disposed a spaced distance from the substrate, the movable part comprising a movable part surface which opposes the substrate surface, the movable part being fabricated from a first material,

the component further comprising a spacer disposed between the substrate surface and the movable part surface, the spacer being fabricated from a second material, the second material being different than the first material,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate,

wherein the movable part comprises an aperture which extends through the movable part and the movable part surface and wherein the component further comprises at least two spacers, the aperture being disposed between the two spacers, at approximately equal distances between the two spacers.

2. The component of claim 1 wherein the spacer is connected to the substrate surface.

3. The component of claim 1 wherein the spacer is connected to the movable part surface.

4. The component of claim 1 wherein the spacer is conically shaped.

5. The component of claim 1 wherein the spacer is pyramidally shaped.

6. The component of claim 1 wherein the first material comprises a dielectric material and wherein the substrate surface and movable part surface are fabricated from a conducting material.

7. The component of claim 1 wherein the component comprises a sensor and wherein the movable part and the substrate comprise layers of the sensor.

8. The component of claim 1 further comprising a plurality of spacers.

9. A method manufacturing a micromechanical component comprising:

providing a substrate,

depositing an auxiliary layer on top of the substrate,

depositing a structural layer with a plurality of apertures on top of the auxiliary layer,

selectively removing most of the auxiliary layer through the apertures of the structural layer until small spacers are formed from remaining portions of the auxiliary layer, the spacers being disposed between at least two apertures.

10. The method of claim 9 wherein the structural layer is fabricated from a first material, the auxiliary layer is fabricated from a second material, the second material capable of being selectively removed without damage to the structural layer.

11. The method of claim 9 wherein the auxiliary layer is removed by etching whereby the apertures are used a etching apertures for removal of the auxiliary layer and etching material.

12. The method of claim 9 wherein the spacers are attached to the substrate.

13. The method of claim 9 wherein the spacers are attached to the structural layer.

14. A micromechanical component comprising:

a substrate and a movable part disposed a spaced distance from the substrate,

the movable part comprising two apertures,

the component further comprising at least one spacer disposed vertically between the substrate and the movable part and laterally between the two apertures,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate.

15. A method manufacturing a micromechanical component comprising:

providing a substrate,

depositing a first material on top of the substrate to form an auxiliary layer,

depositing a mask on top of the auxiliary material, the mask comprising a plurality of gaps,

depositing a second material through the gaps of the mask to form a structural layer on top of the auxiliary layer, the mask defining a plurality of apertures in the structural layer,

selectively removing the mask,

selectively removing most of the auxiliary layer through the apertures of the structural layer and forming a small spacer from a remaining portion of the auxiliary layer, the spacer being disposed between the two apertures.

16. A micromechanical component comprising:

a substrate comprising a substrate surface and a movable part disposed a spaced distance from the substrate, the movable part comprising a movable part surface which opposes the substrate surface, the movable part being fabricated from a first material,

the component further comprising a spacer disposed between the substrate surface and the movable part surface, the spacer being fabricated from a second material, the second material being different than the first material,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate,

wherein the movable part comprises a plurality of apertures which extend through the movable part and the movable part surface and wherein the component further comprises a plurality of spacers, each of said apertures being disposed laterally and between at least two spacers, at approximately equal distances between said at least two spacers.

17. A micromechanical component comprising:

a substrate comprising a substrate surface and a movable part disposed a spaced distance from the substrate, the movable part comprising a movable part surface which opposes the substrate surface, the movable part being fabricated from a first material,

the component further comprising a spacer disposed between the substrate surface and the movable part surface, the spacer being fabricated from a second material, the second material being different than the first material,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate,

wherein the movable part comprises a plurality of apertures which extend through the movable part and the movable part surface and wherein the component further comprises a plurality of spacers, each of said apertures being disposed laterally and equidistantly between three spacers.

18. A micromechanical component comprising:

a substrate comprising a substrate surface and a movable part disposed a spaced distance from the substrate, the movable part comprising a movable part surface which opposes the substrate surface, the movable part being fabricated from a first material,

the component further comprising a spacer disposed between the substrate surface and the movable part surface, the spacer being fabricated from a second material, the second material being different than the first material,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate,

wherein the movable part comprises a plurality of apertures which extend through the movable part and the movable part surface and wherein the component further comprises a plurality of spacers, each of said apertures being disposed laterally and equidistantly between four spacers.

19. A micromechanical component comprising:

a substrate comprising a substrate surface and a movable part disposed a spaced distance from the substrate, the movable part comprising a movable part surface which opposes the substrate surface, the movable part being fabricated from a first material,

the component further comprising a spacer disposed between the substrate surface and the movable part surface, the spacer being fabricated from a second material, the second material being different than the first material,

the spacer preventing contact between the movable part and the substrate but permitting limited movement of the movable part towards the substrate,

wherein the movable part comprises a plurality of apertures which extend through the movable part and the movable part surface and wherein the component further comprises a plurality of spacers, each of said apertures being disposed laterally and equidistantly between five spacers.