Piezoelectric actuator
First Claim
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1. A piezoelectric actuator capable of providing independently controllable motion in first and second angularly disposed planes, comprising:
- a first piezoelectric dimorph having a pair of ground electrodes and an active electrode oriented so as to cause an electrical potential across said piezoelectric portion and move said first piezoelectric dimorph in said first plane;
a second piezoelectric dimorph acting in said second plane angularly with respect to the first plane, and said second piezoelectric dimorph being in direct physical and conductive electrical contact with a ground electrode of said first piezoelectric dimorph; and
means for independently controlling an electric field in each of said first and said second piezoelectric dimorphs to produce said independent movement in said first and second piezoelectric dimorphs.
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Abstract
A piezoelectric device or actuator (30) includes dimorph stack (32) attached to a support (34). Affixed to the apex of stack (32) is friction surface (36) which is held in contact with the external friction surface of a positionable object (38).
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Citations
9 Claims
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1. A piezoelectric actuator capable of providing independently controllable motion in first and second angularly disposed planes, comprising:
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a first piezoelectric dimorph having a pair of ground electrodes and an active electrode oriented so as to cause an electrical potential across said piezoelectric portion and move said first piezoelectric dimorph in said first plane; a second piezoelectric dimorph acting in said second plane angularly with respect to the first plane, and said second piezoelectric dimorph being in direct physical and conductive electrical contact with a ground electrode of said first piezoelectric dimorph; and means for independently controlling an electric field in each of said first and said second piezoelectric dimorphs to produce said independent movement in said first and second piezoelectric dimorphs. - View Dependent Claims (2, 3, 4, 5)
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6. A piezoelectric actuator capable of providing independently controllable motion in two angularly disposed planes of motion, which comprises:
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a first ground electrode layer; a first piezoelectric wafer, layered onto and in conductive electrical contact with said first ground electrode layer; a first active electrode, layered onto and in conductive electrical contact with said first piezoelectric wafer; a second piezoelectric wafer, layered onto and in conductive electrical contact with said first active electrode, and wherein said second piezoelectric wafer is orientated so as to act antiparallel to said first piezoelectric wafer; second ground electrode, layered onto and in conductive electrical contact with said second piezoelectric wafer; a third piezoelectric wafer, layered onto and in conductive electrical contact with said second ground electrode, and wherein said third piezoelectric wafer acts angularly with respect to said first and second piezoelectric wafers; a second active electrode, layered onto and in conductive electrical contact with said third piezoelectric wafer; a fourth piezoelectric wafer, layered onto and in conductive electrical contact with said second active electrode, and wherein said fourth piezoelectric wafer is oriented so as to act antiparallel to said third piezoelectric wafer; a third ground electrode, layered onto and in conductive electrical contact with said fourth piezoelectric wafer; and means for independently controlling the electrical potential applied to said first and second active electrodes.
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7. A piezoelectric actuator capable of providing independently controllable motion in first and second angularly disposed planes, comprising:
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a first piezoelectric dimorph having first and second piezoelectric wafers positioned adjacent one another, first and second ground electrodes positioned on opposite outer surfaces of said first and second piezoelectric wafers, and a first active electrode extending between said first and second piezoelectric wafers, said first piezoelectric dimorph being oriented so as to produce motion in said first plane in response to an electrical potential applied across said first active electrode and said first and second ground electrodes; a second piezoelectric dimorph having third and fourth piezoelectric wafers positioned adjacent one another, a third ground electrode positioned on an outer surface of said fourth piezoelectric wafer, and a second active electrode extending between said third and fourth piezoelectric wafers, the outer surface of said third piezoelectric wafer being positioned in direct physical and electrical contact with said second ground electrode of said first piezoelectric dimorph, said second piezoelectric dimorph being oriented so as to produce motion in said second plane in response to an electrical potential applied across said second active electrode and said second and third ground electrodes; and means for independently controlling an electric field in each of said first and said second piezoelectric dimorphs to produce said independent movement in said first and second piezoelectric dimorphs. - View Dependent Claims (8, 9)
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Specification