Color microdisplays and methods of manufacturing same
First Claim
1. A method for manufacturing a color generation device comprising:
- providing a semiconductor substrate; and
forming an array of pixels on the substrate, which comprisesa) forming a planar array of diffraction grating elements, such that each pixel diffracts color components of incident light into a single order having a specific direction; and
b) forming an array of driving and addressing circuitry on the substrate.
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Abstract
A color microdisplay utilizes diffraction gratings to provide an array of high efficiency color pixels. The microdisplay includes a semiconductor substrate and source of light disposed adjacent thereto. A cover plate may be disposed above the substrate and has a layer of conductive material on a surface of the cover plate opposite the substrate. An optically active material, such as liquid crystal material, may be disposed between the substrate and the cover plate. An array of pixels are formed on the substrate. The pixel array includes an array of diffraction grating elements. Each element includes one or more diffraction gratings. The pitch of each diffraction grating can be a function of the angle of the incident light and the desired diffraction output spectrum. An optical system directs the diffracted light from each grating through the optically active material into viewing optics.
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Citations
20 Claims
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1. A method for manufacturing a color generation device comprising:
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providing a semiconductor substrate; and forming an array of pixels on the substrate, which comprises a) forming a planar array of diffraction grating elements, such that each pixel diffracts color components of incident light into a single order having a specific direction; and b) forming an array of driving and addressing circuitry on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing a color generation device comprising:
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providing a semiconductor substrate; forming an array of pixels on the substrate, which comprises forming a planar array of diffraction grating elements each having a pitch which compensates for incident uncollimated light, such that each pixel diffracts color components of incident light into a specific direction. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification