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Electric field fingerprint sensor having enhanced features and related methods

DC
  • US 5,940,526 A
  • Filed: 05/16/1997
  • Issued: 08/17/1999
  • Est. Priority Date: 05/16/1997
  • Status: Expired due to Term
First Claim
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1. A fingerprint sensor comprising:

  • a substrate;

    a plurality of semiconductor devices on said substrate and defining active circuit portions;

    a first metal layer on said substrate interconnecting predetermined ones of said plurality of semiconductor devices;

    a first dielectric layer on said first metal layer;

    a second metal layer on said first dielectric layer defining a ground plane;

    a second dielectric layer on said second metal layer; and

    a third metal layer on said second dielectric layer and comprising an array of electric field sensing electrodes connected to active circuit portions for generating signals related to a sensed fingerprint.

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