Apparatus and method for regulating a pressure in a chamber

• US 5,944,049 A
• Filed: 07/15/1997
• Issued: 08/31/1999
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated, Leybold Vakuum GmbH
• Original Assignee: Applied Materials Incorporated, Leybold Vakuum GmbH
• Inventors: Gregor, Mariusch, Patel, Jayesh, Plugge, Anja, Frings, Heinz, Bahnen, Rudolph, Trenton, Keith, Beyer, Christian, Stolle, Robert, Smith, Dennis, Ronthaler, Karl-Heinz
• Primary Examiner(s): Ferensic, Denise L.
• Assistant Examiner(s): Kim, Joanne Y.
• Application Number:
  US08/893,032
• Time in Patent Office: 777 Days
• Field of Search: 137/14, 137/907, 137/487.5, 141/8
• US Class Current: 137/487.5
• CPC Class Codes: F04B 2203/0204 Frequency of the electric current
• CPC Class Codes: F04B 2205/172 after the pump outlet
• CPC Class Codes: F04B 49/08 Regulating by delivery pressure
• CPC Class Codes: F04D 19/04 specially adapted to the production of a high vacuum, e.g. molecular pumps
• CPC Class Codes: F04D 25/16 Combinations of two or more pumps ; Producing two or more separate gas flows
• CPC Class Codes: F04D 27/0253 by throttling F04D27/0246 takes precedence
• CPC Class Codes: F04D 27/0269 by changing flow path between different stages or between a plurality of compressors; load distribution between compressors
• CPC Class Codes: G05D 16/208 using a combination of controlling means as defined in G05D16/2013 and G05D16/2066 G05D16/2073 takes precedence
• CPC Class Codes: Y10S 137/907 Vacuum-actuated valves
• CPC Class Codes: Y10T 137/0396 Involving pressure control
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating with the chamber. The pressure of the chamber can be regulated by combinations of the following: controlling the variable rotational frequency of a roots vacuum pump, a pre-vacuum pump, or a high compression pump; controlling a control valve between a pre-vacuum pump and the first vacuum pump; controlling a control valve for injecting gas into the exhaust side of the first vacuum pump or into the compression stage of the first vacuum pump; and controlling a control valve or control valves for bypassing the first vacuum pump or a compression stage or compression stages of the first vacuum pump. To regulate the pressure in the chamber, several types of control rules can be used, including: a PID control rule, a gain scheduler, and a threshold comparison control rule.

Claims

1. An apparatus for regulating a pressure in a chamber comprising:

a first vacuum pump having a compression stage, an exhaust side, and an intake side communicating directly with the chamber for generating a first pressure in the chamber;

a controllable pressure regulator coupled to the first vacuum pump and having a control input for receiving a first signal for regulating an exhaust pressure at the exhaust side of the first vacuum pump or an internal pressure at the compression stage of the first vacuum pump, and to thereby regulate the pressure in the chamber; and

a controller having an input for receiving a second signal representing a control pressure in the apparatus, and an output connected to the control input of the controllable pressure regulator, the controller producing at the output the first signal as a function of the second signal.

2. An apparatus according to claim 1, wherein the controllable pressure regulator comprises:

a second vacuum pump having an intake side coupled to the exhaust side of the first vacuum pump and generating a second pressure, higher than the first pressure, at the intake side of the second vacuum pump.

3. An apparatus according to claim 2, wherein the controllable pressure regulator further comprises:

a roots vacuum pump for coupling the first and second vacuum pumps and having a variable rotational frequency, an intake side coupled to the exhaust side of the first vacuum pump, and an exhaust side coupled to the intake side of the second vacuum pump, and wherein the first signal produced by the controller controls the variable rotational frequency of the roots vacuum pump and thereby regulates the exhaust pressure of the first vacuum pump.

4. An apparatus according to claim 2, wherein the controllable pressure regulator further comprises:

a controllable valve for coupling the first and second vacuum pumps and having an intake side coupled to the exhaust side of the first vacuum pump and an exhaust side coupled the intake side of the second vacuum pump.

5. An apparatus according to claim 4, wherein the first signal from the controller controls opening and closing of the controllable valve and thereby regulates the exhaust pressure of the first vacuum pump.

6. An apparatus according to claim 4, wherein the controllable pressure regulator further comprises:

a stepping motor for opening and closing the controllable valve, and wherein the first signal from the controller controls stepping of the stepping motor and thereby regulates the exhaust pressure of the first vacuum pump.

7. An apparatus according to claim 2, wherein the second vacuum pump has a variable rotational frequency, and wherein the first signal produced by the controller controls the variable rotational frequency of the second vacuum pump and thereby regulates the exhaust pressure of the first vacuum pump.

8. An apparatus according to claim 1, wherein the first pressure generated by the first vacuum pump is less than atmospheric pressure;

wherein the exhaust pressure of the first vacuum pump is at atmospheric pressure;

wherein the first vacuum pump has a variable rotational frequency and a control input for receiving the first signal for varying the rotational frequency of the first vacuum pump;

wherein the controller produces the first signal for varying the variable rotational frequency of the first vacuum pump; and

wherein the controllable pressure regulator passes the first signal from its control input to the control input of the first vacuum pump.

9. The apparatus according to claim 1, wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to a gas supply and an exhaust side coupled to the exhaust side of the first vacuum pump.

10. The apparatus according to claim 9, wherein the controllable pressure regulator further comprises a vacuum pump having a variable rotational frequency, an exhaust side, and an intake side coupled to the exhaust sides of the first vacuum pump and the controllable valve.

11. The apparatus according to claim 1, wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to a gas supply and an exhaust side coupled to the compression stage of the first vacuum pump.

12. The apparatus according to claim 1, wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the exhaust side of the first vacuum pump.

13. The apparatus according to claim 1, wherein the first vacuum pump has a second compression stage, and wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the second compression stage of the first vacuum pump.

14. The apparatus according to claim 1, wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the intake side of the first vacuum pump.

15. The apparatus according to claim 1, wherein the controllable pressure regulator comprises a controllable valve having an intake side coupled to the intake side of the first vacuum pump and an exhaust side coupled to the exhaust side of the first vacuum pump.

16. The apparatus according to claim 1, wherein the controllable pressure regulator comprises:

a second vacuum pump having an intake side coupled to the exhaust side of the first vacuum pump;

a first controllable valve having an intake side coupled to the compression stage of the first vacuum pump and an exhaust side; and

a second controllable valve for coupling the first and second vacuum pumps and having an intake side coupled to the exhaust side of the first vacuum pump and an exhaust side coupled to the intake side of the second vacuum pump and the exhaust side of the first controllable valve.

17. An apparatus according to claim 1, wherein the control pressure in the apparatus is the pressure in the chamber;

and

wherein the controller receives at its input a third signal representing a desired pressure in the chamber; and

wherein the controller produces the first signal as a function of the second signal, the third signal, and a proportional-integral-derivative control rule.

18. An apparatus according to claim 17, wherein the proportional-integral-derivative control rule comprises a proportional gain, an integral gain, and a derivative gain.

19. An apparatus according to claim 18, wherein the derivative gain of the proportional-integral-derivative control rule is zero.

20. An apparatus according to claim 1, wherein the controller comprises:

a control rule having at least one gain, the control rule for producing the first signal; and

a gain scheduler for determining the at least one gain of the control rule.

21. An apparatus according to claim 20, wherein the control pressure in the apparatus is a desired pressure in the chamber;

wherein the gain scheduler comprises a plurality of gains; and

wherein the gain scheduler selects the at least one gain from the plurality of gains according to the second signal.

22. An apparatus according to claim 1, wherein the control pressure in the apparatus is a desired pressure in the chamber;

and

wherein the controller produces the first signal as a function of a comparison between the second signal and a threshold value.

23. An apparatus according to claim 1, wherein the control pressure in the apparatus is the pressure in the chamber, a desired pressure in the chamber, the exhaust pressure at the exhaust side of the first vacuum pump, or the internal pressure at the compression stage of the first vacuum pump.

24. A method for regulating a pressure in a chamber, wherein a first vacuum pump has a compression stage, an exhaust side, and an intake side communicating directly with the chamber, comprising the steps of:

generating a first pressure in the chamber with the first vacuum pump; and

controlling an exhaust pressure at the exhaust side of the first vacuum pump or an internal pressure at the compression stage of the first vacuum pump as a function of a control pressure in the apparatus to thereby regulate the pressure in the chamber.

25. A method according to claim 24, wherein a second vacuum pump having an intake side is coupled to the exhaust side of the first vacuum pump, and further comprising the step of:

generating a second pressure, higher than the first pressure, at the intake side of the second vacuum pump.

26. A method according to claim 25, wherein a roots vacuum pump couples the first and second vacuum pumps and has a variable rotational frequency, and

wherein controlling the exhaust pressure comprises varying the variable rotational frequency of the roots vacuum pump.

27. A method according to claim 25, wherein a controllable valve couples the first and second vacuum pumps, and

wherein the step of controlling comprises opening and closing the controllable valve.

28. A method according to claim 25, wherein the second vacuum pump has a variable rotational frequency, and

wherein the step of controlling comprises varying the variable rotational frequency of the second vacuum pump.

29. A method according to claim 24, wherein the first pressure generated by the first vacuum pump is less than atmospheric pressure;

wherein the exhaust pressure of the first vacuum pump is at atmospheric pressure;

wherein the first vacuum pump has a variable rotational frequency; and

wherein the step of controlling comprises varying the variable rotational frequency of the first vacuum pump.

30. A method according to claim 24, wherein a controllable valve has an intake side coupled to a gas supply and an exhaust side coupled to the exhaust side of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

31. A method according to claim 30, wherein a vacuum pump has a variable rotational frequency, an exhaust side, and an intake side coupled to the exhaust sides of the first vacuum pump and the controllable valve, and

wherein the step of controlling further comprises varying the variable rotational frequency of the vacuum pump.

32. A method according to claim 24, wherein controllable valve has an intake side coupled to a gas supply and an exhaust side coupled to the compression stage of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

33. A method according to claim 24, wherein a controllable valve has an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the exhaust side of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

34. A method according to claim 24, wherein the first vacuum pump has a second compression stage, and wherein a controllable valve has an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the second compression stage of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

35. A method according to claim 24, wherein controllable valve has an intake side coupled to the compression stage of the first vacuum pump and an exhaust side coupled to the intake side of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

36. A method according to claim 24, wherein a controllable valve has an intake side coupled to the intake side of the first vacuum pump and an exhaust side coupled to the exhaust side of the first vacuum pump, and

wherein the step of controlling comprises opening and closing the controllable valve.

37. A method according to claim 24, wherein a second vacuum pump has an intake side coupled to the exhaust side of the first vacuum pump;

wherein a first controllable valve has an intake side coupled to the compression stage of the first vacuum pump and an exhaust side; and

wherein a second controllable valve couples the first and second vacuum pumps and has an intake side coupled to the exhaust side of the first vacuum pump and an exhaust side coupled to the intake side of the second vacuum pump and the exhaust side of the first controllable valve; and

wherein the step of controlling comprises opening and closing the first and second controllable valves.

38. A method according to claim 24, wherein the control pressure in the apparatus is the pressure in the chamber;

and

wherein the step of controlling comprises controlling the exhaust pressure at the exhaust side of the first vacuum pump or the internal pressure at the compression stage of the first vacuum pump as a function of the control pressure in the apparatus, a desired pressure in the chamber, and a proportional-integral-derivative control rule.

39. A method according to claim 38, wherein the proportional-integral-derivative control rule comprises a proportional gain, an integral gain, and a derivative gain.

40. A method according to claim 39, wherein the derivative gain of the proportional-integral-derivative control rule is zero.

41. A method according to claim 24, wherein the control pressure in the apparatus is the pressure in the chamber;

and

wherein the step of controlling comprises;

selecting at least one gain from a plurality of gains according to the control pressure in the apparatus;

controlling the exhaust pressure at the exhaust side of the first vacuum pump or the internal pressure at the compression stage of the first vacuum pump as a function of a control rule, the selected at least one gain, the control pressure of the apparatus, and a desired pressure in the chamber.

42. A method according to claim 24, wherein the control pressure in the apparatus is a desired pressure in the chamber;

and

wherein the step of controlling comprises controlling the exhaust pressure at the exhaust side of the first vacuum pump or the internal pressure at the compression stage of the first vacuum pump as a function of the control pressure in the apparatus and a comparison between the control pressure in the apparatus and a threshold value.

43. A method according to claim 24, wherein the control pressure in the apparatus is the pressure in the chamber, a desired pressure in the chamber, the exhaust pressure at the exhaust side of the first vacuum pump, or the internal pressure at the compression stage of the first vacuum pump.