Dual target cathode assembly with shielding

• US 5,944,967 A
• Filed: 11/07/1995
• Issued: 08/31/1999
• Est. Priority Date: 03/09/1995
• Status: Expired due to Fees

• Current Assignee: Balzers und Leybold Deutschland Holding AG (Balzers & Leybold Group)
• Original Assignee: Balzers und Leybold Deutschland Holding AG (Balzers & Leybold Group)
• Inventors: Sauer, Andreas, Kunz, Hans, Schuhmacher, Manfred, Marquardt, Dietmar, Szczyrbowski, Joachim
• Primary Examiner(s): Nguyen, Nam
• Assistant Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/554,750
• Time in Patent Office: 1,393 Days
• Field of Search: 204/192.12, 204/298.11, 204/298.12, 204/298.16, 204/298.17, 204/298.18, 204/298.19, 204/298.26
• US Class Current: 204/298.11
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target
• CPC Class Codes: H01J 37/3408 Planar magnetron sputtering
• CPC Class Codes: H01J 37/3435 Target holders (includes backing plates and endblocks)

Abstract

A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.

Claims

1. Cathode assembly comprising

a pair of elongate plate targets arranged in parallel, coplanar relationship to each other, each target having a surface to be sputtered,

a common base plate to which said targets are attached, said targets being parallel to said base plate,

a center shield plate fixed perpendicularly to said base plate and extending between said targets,

a pair of side shield plates fixed perpendicularly to said base plate and extending in parallel along said targets opposite from said center shielding plate, and

a pair of end shield plates fixed perpendicularly to said base plate and perpendicularly to said side shield plates to form enclosures which expose said surfaces to be sputtered,

said base plate being provided with recess means and said center shield plate being provided with lobe means received in said recess means, said lobe means being provided with tapped bore means, said base plate being provided with bore means perpendicular to said center shield plate, said assembly further comprising screw means received through said bore means in said base plate and threaded into said tapped bore means in order to fix said center shield plate to said base plate.

2. Cathode assembly as in claim 1 wherein said base plate has lateral edges provided with tapped bores, said side shield plates being fixed to said lateral edges by screw means.

3. Cathode assembly as in claim 1 further comprising a magnetic yoke between each target and said base plate, opening means through said base plate, and electrically insulating holding means extending through said opening means and fixed to said yoke means.