Gas sensor test chip

• US 5,945,069 A
• Filed: 03/21/1997
• Issued: 08/31/1999
• Est. Priority Date: 03/21/1996
• Status: Expired due to Fees

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Buehler, Martin
• Primary Examiner(s): SNAY, JEFFREY R
• Application Number:
  US08/820,877
• Time in Patent Office: 893 Days
• Field of Search: 422/90, 422/98, 338/34, 340/632, 340/634
• US Class Current: 422/90
• CPC Class Codes: G01N 27/126 comprising organic polymers
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27

Abstract

A polymeric gas sensor utilizes a variety of electrode geometries to generate varied responses to selective gases. The characteristic response to various gases of each electrode geometry permits the construction of a gas sensor having desirable and reproducible characteristic responses to specific gases. The gas sensor array of the invention produces characteristic responses from a plurality of sensors. These responses collectively produce a characteristic response pattern that can be used for the identification of specific gases with pattern recognition techniques.

Claims

1. A method of fabricating a gas sensor comprising:

(a) providing a substrate;

(b) depositing a plurality of electrodes on the substrate, the plurality of said electrodes having conductive paths of geometric configurations that are optimized for sensing a predetermined gas;

(c) depositing a polymer film over said electrodes;

(d) depositing conductive paths on said substrate between one side of said electrode and a plurality of output contacts; and

(e) depositing conductive paths connecting one side of each electrode to a common output contact.

2. A method according to claim 1 further comprising:

prior to said step of depositing a polymer film, depositing a heater element; and

raising the temperature of said deposited polymer film using said heater element, whereby the polymerization of said deposited polymer is controlled.

3. A method according to claim 1 further comprising the step of depositing an insulating layer over portions of said electrodes to prevent electrical contact with said polymer film.

4. A method according to claim 1 further comprising the step of depositing a polypyrrole film.

5. A method according to claim 1 further comprising the step of heating said polymer film with a heater mounted on said gas sensor.

6. A method according to claim 1 wherein further comprising the step of doping said polymer film.

7. A method of claim 6 further comprising the step of doping said polymer film with carbon.

8. A semiconductor polymer-based gas sensor comprising:

a semiconductor substrate;

a plurality of electrodes;

a polymer film deposited over said electrodes, the polymer film having a resistance that is affected by exposure to gases;

conductive paths connecting one side of each said electrodes to a common output contact; and

conductive paths connecting the other side of each of said electrodes to different output contacts.

9. A semiconductor gas sensor according to claim 8 wherein said electrodes are in different geometric configurations including Comb and U-Bend electrodes.

10. A semiconductor gas sensor according to claim 8 wherein said electrodes comprise Contact, Serpentine and Isolation electrodes.

11. A semiconductor gas sensor according to claim 8 comprising a plurality of heaters disposed beneath said polymer films for controlling polymerization of said films.

12. A semiconductor gas sensor according to claim 8 wherein said electrodes include a plurality of gold electrodes.

13. A semiconductor gas sensor according to claim 8 wherein said film is a polypyrrole film.

14. A gas sensor system comprising:

a semiconductor substrate;

a plurality of electrodes;

a polymer film deposited over said electrodes wherein the resistance of the polymer film is affected by exposure to gases;

conductive paths connecting one side of each said electrodes to a common output contact;

conductive paths connecting the other side of each of said electrodes to different output contacts; and

a pattern recognition system having stored therein a representation of prior responses to known gases for each sensor; and

a current-measuring circuit connected to said electrodes, wherein said pattern recognition system receives the output of said current measuring circuit and compares said responses to unknown gases with said responses to known gases.

15. A system for testing the characteristic changes in the conduction of polymer films in the presence of selected gases, the system comprising:

(a) a substrate;

(b) a plurality of electrodes;

(c) a polymer film deposited over said electrodes, the resistance of the polymer film being affected by exposure to gases;

(d) current measuring circuit connected to the electrodes, wherein said current measuring circuit outputs a current proportional to the resistance of said polymer in response to said gases, said current varying in a different manner for the different electrodes.

16. A gas sensor comprising:

a substrate;

a plurality of electrodes;

a polymer film deposited over said electrodes, wherein the resistance of the polymer film as measured across said electrodes changes when the film is exposed to gases; and

current measuring circuit connected to said electrodes, wherein the geometric configurations of said electrodes are determined according to the following method;

(a) fabricating a gas sensor comprising a plurality of resistor elements, each having a plurality of electrodes with different geometric configurations;

(b) exposing said resistor elements to said predetermined gas;

(c) measuring and storing patterns of characteristic changes in resistance of said resistor elements in response to said gas exposure; and

(d) selecting geometric configurations of the electrodes bonded based on said measured patterns.