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Apparatus for packaging a chip

  • US 5,945,334 A
  • Filed: 06/07/1995
  • Issued: 08/31/1999
  • Est. Priority Date: 06/08/1994
  • Status: Expired due to Term
First Claim
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1. An apparatus for packaging a chip, said apparatus comprising:

  • a chip having a first surface and a second surface, said first surface comprising a probe array and said second surface being an outer periphery of said first surface;

    a body having a mounting surface, an upper surface, and a cavity bounded by said mounting surface and said upper surface, said second surface being attached to said cavity and said first surface being within said cavity;

    a cover attached to said mounting surface for defining an upper boundary to said cavity;

    a first channel fluidly coupled to said cavity, the first channel having a diffuser portion that tapers outward towards said cavity for dispersing fluid as the fluid passes into the cavity; and

    a second channel fluidly coupled to said cavity, the second channel having a concentrator portion that tapers outward towards said cavity for collecting fluid as the fluid egresses the cavity.

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