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Resonance type angular velocity sensor

  • US 5,945,599 A
  • Filed: 12/12/1997
  • Issued: 08/31/1999
  • Est. Priority Date: 12/13/1996
  • Status: Expired due to Term
First Claim
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1. A resonance based angular velocity sensor, comprising:

  • a mass portion;

    a pair of mass displacement supporting bases configured to support said mass portion therebetween and disposed in an excitation direction of the mass portion;

    at least one mass displacement direction supporting beam extending from said mass displacement supporting bases to said mass portion and configured to support said mass portion in such a manner as to allow said mass portion to be displaced by a Coriolis force generated in a direction perpendicular to both directions of the excitation direction of the mass portion and a rotational axis direction of a sensor angular velocity;

    a plurality of mass excitation supporting beam members configured to support said mass displacement supporting bases and to inhibit said mass displacement supporting bases from displacing due to said Coriolis force while allowing said mass portion to vibrate in said excitation direction;

    an exciter configured to excite said mass portion by exciting said mass displacement supporting bases; and

    a displacement detector configured to detect a displacement of said mass portion caused by said Coriolis force, thereby detecting the sensor angular velocity based on said displacement.

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