×

Semiconductor wafer package, method and apparatus for connecting testing IC terminals of semiconductor wafer and probe terminals, testing method of a semiconductor integrated circuit, probe card and its manufacturing method

  • US 5,945,834 A
  • Filed: 02/29/1996
  • Issued: 08/31/1999
  • Est. Priority Date: 12/16/1993
  • Status: Expired due to Term
First Claim
Patent Images

1. A semiconductor wafer package comprising:

  • a retainer board for retaining a semiconductor wafer comprising a plurality of integrated circuit terminals, said plurality of integrated circuit terminals being operable for testing a plurality of semiconductor chips disposed on said semiconductor wafer;

    a wiring board provided so as to face said retainer board and comprising a plurality of probe terminals and a wire which are electrically connected to each other, said plurality of probe terminals facing, and being electrically connectable to, said plurality of integrated circuit terminals of said retainer board, respectively;

    a sealing member for forming a hermetic space together with said retainer board and said wiring board, said sealing member comprising an elastic material and being provided in the periphery of said formed hermetic space; and

    depressurizing means for depressurizing said hermetic space to move said retainer board and said wiring board close to each other, thereby establishing an electrical connection between said plurality of integrated circuit terminals of said semiconductor wafer retained by said retainer board and said probe terminals of said wiring board, respectively.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×