Magnetic microactuator

• US 5,945,898 A
• Filed: 05/31/1996
• Issued: 08/31/1999
• Est. Priority Date: 05/31/1996
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Judy, Jack W., Muller, Richard S.
• Primary Examiner(s): DONOVAN, LINCOLN D
• Application Number:
  US08/657,815
• Time in Patent Office: 1,187 Days
• Field of Search: 335/78-86, 335/124, 335/128, 257/415, 257/422, 257/686, 257/689
• US Class Current: 335/78
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009

Abstract

A selectively actuatable microstructure is provided having a base, a cantilevered element supported by at least one mechanical attachment attached to the base which permits the element to change its orientation, and at least one layer of magnetically-active material placed on one or more regions of a surface of the cantilevered element. A selectively applied magnetic field can apply torque to the cantilevered element and cause it to move. A voltage source causes a Coulombic attractive force for holding the cantilevered element against movement in the presence of an applied magnetic field. A number of the selectively actuatable microstructures may be provided in an array so that each of the microstructures may be individually actuated by the selective switching of the corresponding voltage sources.

Claims

1. A microactuated structure, comprising:

a base;

a cantilevered element affixed at one end to said base by at least one mechanical attachment to permit said element to change its orientation, the cantilevered element including a magnetically-active material; and

a voltage source to apply an electrostatic force to the cantilevered element;

such that the voltage source produces an electrostatic force to prevent the cantilevered element from changing its orientation in the presence of an applied magnetic field.

2. The microactuated structure of claim 1 in which the mechanical attachment is at least one torsional support rotatably affixing the cantilevered element to the base.

3. The microactuated structure of claim 1 in which the mechanical attachment is a flexible material such as polyimide.

4. The microactuated structure of claim 1 in which the mechanical attachment is a hinged linkage or a folding mounting.

5. The microactuated structure of claim 1 in which the cantilevered element is highly reflective to direct optical beams for displays or communications.

6. The microactuated structure of claim 1 in which the cantilevered element is strongly dispersive in an acoustic beam such that the cantilevered element is easily detectable in an acoustic field.

7. The microactuated structure of claim 1 in which the cantilevered element serves as a platform for an energy source device.

8. The microactuated structure of claim 1, wherein the electrostatic force is a Coulombic attractive force.

9. The microactuated structure of claim 1, wherein said voltage source is formed integral with the base.

10. The microactuated structure of claim 1, further including:

a first electrical contact made to the cantilevered element; and

a second electrical contact made to the base, the voltage source being electrically connected between the first and second electrical contacts.

11. The microactuated structure of claim 1 wherein the cantilevered element is formed of a layer of the magnetically-active material.

12. The microactuated structure of claim 1 wherein one or more regions of the cantilevered element include a layer of the magnetically-active material plated onto a non-magnetic material.

13. The microactuated structure of claim 7, wherein the energy source is one of an ultrasound emitter and an electromagnetic radiation emitter.

22. The microactuated structure of claim 1 wherein the cantilevered element, the mechanical attachment, and the magnetically-active material are microfabricated in one batch process.

23. The microactuated structure of claim 1 in which the source of the magnetic field is situated on the base.

14. An array of microactuated structures, each, comprising:

a base;

a cantilevered element affixed at one end to said base by at least one mechanical attachment to permit said cantilevered element to change its orientation, said cantilevered element including a magnetically-active material;

a switchable voltage source to apply an electrostatic force to the cantilevered element of each microactuated structure to prevent a change in its orientation; and

such that the cantilevered element of each of the microactuated structures may be individually selected not to change its orientation in the presence of a magnetic field if the electrostatic force is applied thereto.

15. The array of microactuated structures of claim 14, wherein the electrostatic force supplied by each of said voltage sources is a Coulombic attractive force.

16. The array of microactuated structures of claim 14, wherein the array of microactuated structures form one of an optical switch and an optical display.

24. The array of microactuated structures of claim 14 in which each cantilevered element is highly reflective to direct an optical beam.

31. The array of claim 14 wherein the voltage source is formed integral with the base.

17. A microstructure comprising:

a base;

a cantilevered element affixed at one end to said base by at least one mechanical attachment to permit said cantilevered element to move, said cantilevered element including a magnetically-active material;

a first electrical connection made to the cantilevered element;

a second electrical connection made to the base;

a voltage source electrically connected between the first and second electrical connections to apply an electrostatic force to the cantilevered element to hold the cantilevered element against movement even in the presence of an applied magnetic field; and

such that the applied magnetic field can apply a torque to the cantilevered element to cause it to move when the electrostatic force is not applied thereto.

18. A microstructure, comprising:

a base;

a movable element affixed at one end to said base by at least one mechnical attachment to permit said movable element to change its orientation, said movable element including a magnetically-active material; and

a voltage source to apply an electrostatic force to said movable element;

such that in the presence of an applied magnetic field, the forces applied to the movable element by the applied magnetic field, the electrostatic force and a reactive force from the base supply a zero net force to said movable element.

19. A microstructure, comprising:

a base;

an element affixed at one end to said base by at least one mechanical attachment to permit said element to change its orientation;

a magnetically-active material at one or more regions of the element;

a voltage source to apply an electrostatic force to the element; and

a conducting pattern on the base;

such that a current passed through the conducting pattern produces a magnetic field that moves the element if the electrostatic force is not applied thereto.

20. An array of microstructures, each of the microstructures comprising:

a base;

an element coupled at one end to at least one torsional support, the torsional support being rotatably mounted to the base;

a magnetically-active material at a region of the element;

a conducting pattern on the base; and

a switchable voltage source to apply an electrostatic force to the element;

such that a current passed through the conducting pattern produces a magnetic field to move the element such that only the elements that have current passed through a corresponding conducting pattern are moved if the electrostatic force is not applied thereto.

21. A microstructure, comprising:

a base;

an element affixed at one end to said base by at least one mechanical attachment to permit said element to change its orientation;

at least one layer of magnetically-active material placed on one or more regions of a surface of the element;

a first electrical connection made to the element;

a second electrical connection made to the base; and

a voltage source electrically connected between the first and second electrical connections;

such that the voltage source causes a Coulombic attractive force to hold the element against movement in the presence of an applied magnetic field.

25. A microactuated structure, comprising:

a base;

an element affixed to the base by a mechanical attachment that permits said element to move;

a magnetically active material at a region of the element;

an electrical connection made to the base;

an electrical connection made to the element;

a voltage source electrically connected between the electrical connection to the base and the element to apply an electrostatic force to the element such that if the electrostatic force is not applied to the element, a magnetic field causes the element to move with respect to the base, while if the electrostatic force is applied to the element, the element is held against movement in the presence of the magnetic field.

26. The microactuated structure of claim 25 wherein said voltage source is formed integral with the base.

27. The microactuated structure of claim 25 wherein the magnetic field is generated by a source formed integral with the base.

28. The microactuated structure of claim 25 wherein a region of the element includes a layer of a highly reflective material to direct optical beams.

29. The microactuated structure of claim 25 wherein a region of the element includes at least one of an ultrasound emitter, an electromagnetic radiation emitter and an energy sensor.

30. The microactuated structure of claim 25 in which the element is affixed to the base by a torsional support, a hinged linkage or a folding mounting.