Method and apparatus for ionized sputtering

• US 5,948,215 A
• Filed: 04/21/1997
• Issued: 09/07/1999
• Est. Priority Date: 04/21/1997
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Lantsman, Alexander D.
• Primary Examiner(s): Nguyen, Nam
• Assistant Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/844,757
• Time in Patent Office: 869 Days
• Field of Search: 204/298.06, 204/298.08, 204/298.11, 204/298.16, 204/192.12, 204/298.03, 118/723 I, 118/723 IR
• US Class Current: 204/192.12
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/3405 Magnetron sputtering

Abstract

An ionized physical vapor deposition apparatus is provided with an RF coil that surrounds the space between a target and a substrate holder and is energized with RF energy, preferably in the 0.1 to 60 MHz range, to form a secondary plasma in a volume of the space between the substrate holder and the main plasma that is adjacent the target. A dielectric material, such as a quartz window, either in the wall of the chamber or inside the chamber, or insulation on the coil, protects the coil from adverse interaction with plasma. Shields between the space and the dielectric material prevent sputtered particles from forming a coating on the dielectric material. The shields are partitioned to prevent eddy currents. The shields may be biased to control contamination and may be commonly or individually biased to optimize the uniformity of coating on the substrate and the directionality of the flux of ionized material at the substrate.

Claims

1. An ionized physical deposition method comprising the steps of:

creating, with a main energy source, a main plasma in a vacuum chamber and sputtering a target therewith to produce particles of coating material in a space between the target and a substrate to be coated;

with a coil surrounding the space and through a dielectric material interposed between the coil and the space, inductively coupling RF energy from the coil through the dielectric material and into a volume of the space between the substrate and the main plasma to energize with the coupled RF energy a secondary plasma in the volume and ionizing particles of the coating material in the volume with the secondary plasma;

while the main plasma creating step is being performed and with a shield spaced from the dielectric material and positioned between the space and the dielectric material, physically shielding the dielectric material from particles of coating material without electrically shielding the volume from the RF energy; and

electrically directing ionized particles of coating material from the volume onto the substrate.

2. The method of claim 1 further comprising the step of:

biasing the shield to control substrate contamination from a film forming on the shield.

3. The method of claim 1 further comprising the step of:

biasing the shield to control the distribution of a film being deposited on the substrate.

4. The method of claim 3 wherein:

the biasing step includes the step of individually and selectively biasing a plurality of electrically distinct sections of the shield to control the distribution of film being deposited on the substrate.

5. The method of claim 1 wherein:

the coupling step is performed through a dielectric window in a wall of the vacuum chamber.

6. The method of claim 1 wherein:

the coupling step is performed with the coil positioned outside of the chamber and through a dielectric window in a wall of the vacuum chamber.

7. The method of claim 1 wherein:

the coupling step is performed with the coil positioned inside the chamber and through a dielectric window inside the chamber.

8. The method of claim 1 wherein:

the coupling step is performed with the coil inside of the chamber having the dielectric material coating the coil.

23. The method of claim 1 wherein:

the ionized particle electrically directing step includes the step of biasing the substrate to attract ionized particles of coating material from the volume onto the substrate.

9. An ionized physical vapor deposition apparatus comprising:

a vacuum sputtering chamber;

a sputtering target in the chamber having a sputtering surface thereon;

a cathode power supply connected to the target to energize the target to produce a main plasma in proximity to the sputtering surface;

a substrate support in the chamber spaced from the target, oriented to support a substrate thereon facing the target and parallel thereto, and defining a space between the target and the substrate holder;

a coil surrounding a volume of the chamber between the main plasma and the substrate holder;

an RF energy source connected to the coil to energize the coil to inductively couple RF energy into the volume to form a secondary plasma to ionize in-flight sputtered material passing through the volume;

means for electrically directing ions of the sputtered material in a direction normal to the substrate;

electrically non-conductive protective structure interposed between the coil and the space to isolate the coil from plasma in the space; and

a shield disposed circumferentially around and outside of the space, inside the vacuum chamber and spaced inwardly from the electrically non-conductive protective structure between the target and the electrically non-conductive protective structure so as to physically shield the electrically non-conductive protective structure from sputtered material, the shield having at least one axially extending gap at least partially electrically separating the shield sufficiently to circumferential currents in the shield.

10. The apparatus of claim 9 wherein:

the shield includes an array of a plurality of distinct shield segments spaced by gaps which electrically separate the segments.

11. The apparatus of claim 9 wherein:

the electrically non-conductive protective structure includes a dielectric window in a wall of the chamber, the coil being located behind the window outside of the chamber.

12. The apparatus of claim 9 wherein:

the coil is positioned inside of the chamber; and

the electrically non-conductive protective structure includes a dielectric window inside the chamber between the coil and the space.

13. The apparatus of claim 9 wherein:

the coil is positioned inside the chamber; and

the electrically non-conductive protective structure includes an insulation layer on the coil.

14. The apparatus of claim 13 wherein:

the insulation layer completely covers the coil.

15. The apparatus of claim 13 wherein:

the insulation layer includes a plurality of discrete insulation segments separated by gaps having insufficient widths to support penetration of plasma through the gaps to the coil.

16. The apparatus of claim 9 wherein:

the RF energy source is operative to energize the coil at a frequency of between 0.1 MHz and 60 MHz.

17. The apparatus of claim 9 further comprising:

means for electrically biasing the shield.

18. The apparatus of claim 9 wherein:

the shield includes an array of a plurality of distinct shield segments spaced by gaps electrically separating the segments; and

the apparatus further comprises means for electrically biasing the shield segments of the array.

22. The apparatus of claim 9 wherein:

the means for directing ions of sputtered material includes a bias energy generator connected to the substrate support to electrically bias a substrate on the support to accelerate ions of the sputtered material in a direction normal to the substrate.

19. An ionized physical deposition method comprising the steps of:

producing a main plasma in a vacuum chamber with a main energy source;

sputtering a target of electrically conductive coating material with the main plasma in the vacuum chamber and producing thereby sputtered particles of electrically conductive coating material in a space between the target and a substrate to be coated which is supported in the chamber;

inductively coupling RF energy from a coil surrounding the space through a dielectric window between the coil and the space and forming with the coupled RF energy a secondary plasma in a volume of the space that lies between the substrate and the target;

ionizing sputtered particles of the coating material in the volume with the secondary plasma;

physically shielding the dielectric window from the sputtered particles of electrically conductive coating material with a shield, in the vacuum chamber and spaced inwardly from the window, such that, if the shield is coated with the electrically conductive coating material it allows passage of RF energy from the coil into the volume; and

directing ionized particles of the coating material from the volume toward the substrate.

20. The method of claim 19 wherein:

the ionized particle directing step includes the step of electrically biasing the substrate and thereby electrostatically attracting ionized particles of coating material toward the substrate.

21. The method of claim 19 wherein:

the shielding step is performed with a shield that provides no circumferential current path around the space.