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Microfabricated particle thin film filter and method of making it

  • US 5,948,255 A
  • Filed: 05/02/1997
  • Issued: 09/07/1999
  • Est. Priority Date: 03/07/1994
  • Status: Expired due to Term
First Claim
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1. A filter, comprising:

  • a first thin film structure having openings therethrough; and

    a second thin film structure having openings therethrough, said second thin film structure positioned relative to said first thin film structure such that said openings of said first thin film structure are partially blocked by said second thin film structure and said openings of said second thin film structure are partially blocked by said first thin film structure to produce pores of a substantially uniform predetermined width and length, said pores being spaces between said first thin film structure and said second thin film structure and said pores being formed as a result of removing a sacrificial layer from between said first thin film structure and said second thin film structure.

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