Laser beam machining method
First Claim
Patent Images
1. A laser beam machining method comprising the steps of:
- emitting light from a light source so that said light illuminates a mask comprising openings through which light can pass and blocking parts through which substantially no light can pass;
illuminating an object to be machined with light passing through said openings of the mask thereby supplying working light to said object;
forming an energy distribution corresponding to a machining configuration on said object by interfering said light which is diffracted at said openings, wherein each of said openings has a width of from 5 μ
m to 30 μ
m, and each of said blocking parts has a width which is less than or equal to 30 μ
m; and
machining said object by the energy of said working light by means of ablation.
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Abstract
A laser beam machining method includes emitting light from a light source to illuminate a mask which has both openings through which light can pass to the object to be machined and blocking parts through which substantially no light can pass. By utilizing the energy of the light, those portions of the object which are exposed through the openings are machined by ablation. The shape and width of both the openings and the blocking parts can be adjusted so as to provide the energy distribution required to form an object of the desired shape and size.
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Citations
9 Claims
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1. A laser beam machining method comprising the steps of:
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emitting light from a light source so that said light illuminates a mask comprising openings through which light can pass and blocking parts through which substantially no light can pass; illuminating an object to be machined with light passing through said openings of the mask thereby supplying working light to said object; forming an energy distribution corresponding to a machining configuration on said object by interfering said light which is diffracted at said openings, wherein each of said openings has a width of from 5 μ
m to 30 μ
m, and each of said blocking parts has a width which is less than or equal to 30 μ
m; andmachining said object by the energy of said working light by means of ablation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification