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Laser beam machining method

  • US 5,948,289 A
  • Filed: 11/25/1996
  • Issued: 09/07/1999
  • Est. Priority Date: 11/29/1995
  • Status: Expired due to Fees
First Claim
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1. A laser beam machining method comprising the steps of:

  • emitting light from a light source so that said light illuminates a mask comprising openings through which light can pass and blocking parts through which substantially no light can pass;

    illuminating an object to be machined with light passing through said openings of the mask thereby supplying working light to said object;

    forming an energy distribution corresponding to a machining configuration on said object by interfering said light which is diffracted at said openings, wherein each of said openings has a width of from 5 μ

    m to 30 μ

    m, and each of said blocking parts has a width which is less than or equal to 30 μ

    m; and

    machining said object by the energy of said working light by means of ablation.

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