In-line cell for absorption spectroscopy
First Claim
1. An in-line cell useful in absorption spectroscopy, comprising a sample region, a light entry port in communication with the sample region to allow a light beam to enter the cell and pass through the sample region, a light exit port in communication with the sample region to allow a light beam after passing through the sample region to exit the cell, the light entry port and light exit port being the same or separate ports, each said port containing a light transmissive window, a mirror having a light reflective surface facing the sample region for reflecting a light beam within the cell, and a heater effective to heat the light reflective surface of the mirror.
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Abstract
Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
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Citations
20 Claims
- 1. An in-line cell useful in absorption spectroscopy, comprising a sample region, a light entry port in communication with the sample region to allow a light beam to enter the cell and pass through the sample region, a light exit port in communication with the sample region to allow a light beam after passing through the sample region to exit the cell, the light entry port and light exit port being the same or separate ports, each said port containing a light transmissive window, a mirror having a light reflective surface facing the sample region for reflecting a light beam within the cell, and a heater effective to heat the light reflective surface of the mirror.
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11. A system for performing an absorption spectroscopy measurement, comprising:
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a sample region, a light entry port in communication with the sample region to allow a light beam to enter the cell and pass through the sample region, a light exit port in communication with the sample region to allow a light beam after passing through the sample region to exit the cell, the light entry port and light exit port being the same or separate ports, each said port containing a light transmissive window, a mirror having a light reflective surface facing the sample region for reflecting a light beam within the cell, and a heater effective to heat the light reflective surface of the mirror, and a light source for generating a light beam which passes through the light entry port into the cell, and a main detector for measuring the light beam exiting the cell through the light exit port. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A semiconductor processing apparatus, comprising:
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a vacuum chamber in communication with a vacuum pump for evacuating the vacuum chamber, an in-line cell disposed between and in communication with the vacuum chamber and the vacuum pump, the cell comprising a sample region, a light entry port and a light exit port being the same or separate ports, each said port being in communication with the sample region and containing a light transmissive window, a mirror having a light reflective surface facing the sample region, and a heater effective to heat the light reflective surface of the mirror a light source for directing a light beam through the light entry port into the cell, and a main detector for measuring the light beam exiting the cell through the light exit port.
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Specification