Monolithic optical assembly and associated retroreflector with beamsplitter assembly

• US 5,949,543 A
• Filed: 11/12/1997
• Issued: 09/07/1999
• Est. Priority Date: 11/12/1997
• Status: Expired due to Term

• Current Assignee: PLX Incorporated
• Original Assignee: PLX Incorporated
• Inventors: Bleier, Zvi, Vishnia, Itai
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US08/967,624
• Time in Patent Office: 664 Days
• Field of Search: 356/345, 356/346, 356/358, 356/363, 356/244, 250/339.07, 250/339.08
• US Class Current: 356/451
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 9/02051 Integrated design, e.g. on-chip or monolithic
• CPC Class Codes: G01J 3/453 by correlation of the amplitudes
• CPC Class Codes: G02B 27/14 operating by reflection only
• CPC Class Codes: G02B 5/122 cube corner, trihedral or triple reflector type

Abstract

In accordance with the invention, an improved optical assembly having a monolithic structure, and an improved optical assembly having a monolithic structure and a retroreflector/beamsplitter combination is provided. The monolithic optical assembly comprises top and bottom plates which are joined into a monolithic structure by first and second mounting members and a beamsplitter. The assembly also comprising a first reflecting assembly in reflecting relation with the beamsplitter. An alternate embodiment of the invention substitutes the monolithic structure having the above six components, with a monolithically constructed hollow corner-cube retroreflector, wherein one of the retroreflector panels is a reflecting surface, another panel (situated at a 45 degree angle to the reflecting surface of the first panel) is a beamsplitter, and the third panel is a support panel used to complete the construction of the hollow corner-cube retroreflector.

Claims

1. A monolithic optical assembly for use with an interferometer, comprising:

a top plate having top, bottom and edge surfaces;

a bottom plate having top, bottom and edge surfaces;

a first mounting member having first and second edges, wherein a portion of said first edge is adhered to a portion of a first edge of said top plate and another portion of said first edge is adhered to a portion of a first edge of said bottom plate;

a second mounting member having a first surface and a first edge, wherein a portion of said first surface is adhered to a portion of a second edge of said top plate and another portion of said first surface is adhered to a portion of a second edge of said bottom plate;

a first mirror assembly having at least one reflecting surface, wherein said first mirror assembly is adhered between at least two of either said first mounting member and said top plate or said bottom plate, or between said second mounting member and said top plate or said bottom plate; and

a beamsplitter assembly having a surface having a beamsplitter coating, said surface being in reflecting relation with said first mirror assembly, and having top and bottom edges, said top edge of said beamsplitter assembly adhered along a portion of said bottom surface of said top plate and said bottom edge of said beamsplitter assembly adhered along another portion of said top surface of said bottom plate;

wherein said adhesion of said first and second mounting members and said beamsplitter assembly to said top and bottom plates creates a substantially stable, substantially vibration and shock resistant structure regarding said reflective relationship between said first mirror assembly and said beamsplitter assembly.

2. A monolithic optical assembly as recited in claim 1, wherein said at least one reflecting surface of said first mirror assembly is optically flat.

3. A monolithic optical assembly as recited in claim 2, wherein said surface of said beamsplitter assembly is optically flat.

4. A monolithic optical assembly as recited in claim 1, further comprising a third mounting member having an edge, wherein a portion of said edge is adhered to a portion of a third edge of said top plate and another portion of said edge is adhered to a portion of a third edge of said bottom plate.

5. A monolithic optical assembly as recited in claim 4, wherein said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are made of material having substantially the same coefficient of thermal expansion.

6. A monolithic optical assembly as recited in claim 4, wherein said surfaces and said edges of said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are lapped.

7. A monolithic optical assembly as recited in claim 4, wherein said top and bottom surfaces of said top plate lie in planes which are substantially parallel to each other, said top and bottom surfaces of said bottom plate lie in planes which are substantially parallel to each other, and said edges of said plates lie in planes which are substantially perpendicular to said planes of said surfaces of said plates.

8. A monolithic optical assembly as recited in claim 7, wherein said edges of said first mounting member lie in planes which are substantially perpendicular to each other.

9. A monolithic optical assembly as recited in claim 8, wherein said first surface of said second mounting member and said first edge of said second mounting member lie in planes which are substantially perpendicular to each other.

10. A monolithic optical assembly as recited in claim 1, wherein said surface of said beamsplitter assembly lies in a plane which is aligned at a substantially 450 angle to a second plane in which said at least one reflecting surface of said first mirror assembly lies.

11. A monolithic optical assembly as recited in claim 10, wherein said beamsplitter assembly comprises first and second panels, said first panel having a first surface and said second panel having a second surface, with said panels being joined together along said first and second surfaces.

12. A monolithic optical assembly as recited in claim 11, wherein said beamsplitter coating is located between said adhered together first and second panels of said beamsplitter assembly.

13. A monolithic optical assembly as recited in claim 12, wherein said top plate has a plurality of openings extending therethrough in positions proximate to said placement of said beamsplitter assembly and said top plate, so that portions of said beamsplitter assembly are accessible through said openings.

14. A monolithic optical assembly as recited in claim 1, further comprising a fourth mounting member adhered to said second mounting member and to still another portion of said top surface of said bottom plate, to be in reflecting relation with said beamsplitter assembly.

15. A monolithic optical assembly as recited in claim 14, said fourth mounting member having at least one opening extending therethrough for translation of radiation therethrough.

16. A monolithic optical assembly as recited in claim 14, said fourth mounting member having at least two openings extending therethrough, one for translation of radiation therethrough and another having mounted therein a reflecting assembly.

17. A monolithic optical assembly as recited in claim 16, wherein said reflecting assembly of said fourth mounting member is a hollow corner cube retroreflector.

18. A monolithic optical assembly as recited in claim 17, wherein the reflecting surfaces of said retroreflector of said fourth mounting member face away from said beamsplitter assembly.

19. A monolithic optical assembly for use with an interferometer, comprising:

a top plate having top, bottom and edge surfaces;

a bottom plate having top, bottom and edge surfaces;

a first mounting member having first and second edges, wherein a portion of said first edge is adhered to a portion of a first edge of said top plate and another portion of said first edge is adhered to a portion of a first edge of said bottom plate;

a second mounting member having a first surface and a first edge, wherein a portion of said first surface is adhered to a portion of a second edge of said top plate and another portion of said first surface is adhered to a portion of a first edge of said bottom plate;

a first mirror assembly having at least one reflecting surface, wherein said first mirror assembly is adhered between at least two of either said first mounting member and said top plate or said bottom plate, or between said second mounting member and said top plate or said bottom plate;

a beamsplitter assembly having a surface having a beamsplitter coating, said beamsplitter assembly adhered to either said top or bottom plate of said monolithic optical assembly, so that said surface is in reflecting relation with said first mirror assembly; and

a third mounting member having an edge, wherein a portion of said edge is adhered to a portion of a third edge of said top plate and another portion of said edge is adhered to a portion of a third edge of said bottom plate;

wherein said adhesion of said first, second and third mounting members to said top and bottom plates creates a substantially stable, substantially vibration and shock resistant structure regarding said reflective relationship between said first mirror assembly and said beamsplitter assembly.

20. An interferometer assembly, comprising:

a radiation source;

a first mirror assembly having at least one reflecting surface;

a monolithic reflecting structure having at least two reflecting surfaces in reflecting relation with said first mirror assembly, said monolithic reflecting structure, comprising;

a top plate having top, bottom and edge surfaces;

a bottom plate having top, bottom and edge surfaces;

a first mounting member having first and second edges, wherein a portion of said first edge of said first mounting member is adhered to a portion of a first edge of said top plate and another portion of said first edge of said first mounting member is adhered to a portion of a first edge of said bottom plate;

a second mounting member having a first surface and a first edge, wherein a portion of said first surface of said second mounting member is adhered to a portion of a second edge of said top plate and another portion of said first surface of said second mounting member is adhered to a portion of a second edge of said bottom plate;

a second mirror assembly having at least one reflecting surface, wherein said second mirror assembly is adhered between at least two of either said first mounting member and said top plate or said bottom plate, or between said second mounting member and said top plate or said bottom plate; and

a beamsplitter assembly having a surface having a beamsplitter coating, said surface being in reflecting relation with said first and second mirror assemblies, and having top and bottom edges, said top edge of said beamsplitter assembly adhered to a portion of said bottom surface of said top plate and said bottom edge of said beamsplitter assembly adhered to another portion of said top surface of said bottom plate;

wherein said adhesion of said first and second mounting members and said beamsplitter assembly to said top and bottom plates creates a substantially stable, substantially vibration and shock resistant structure regarding said reflective relationship between said second mirror assembly and said beamsplitter assembly; and

a radiation detector for detecting differences in the intensity variation of said radiation reaching said detector from said radiation source after leaving said beamsplitter assembly and reflecting off of said first and second mirror assemblies.

21. An interferometer assembly as recited in claim 20, wherein said at least one reflecting surface of said first mirror assembly is optically flat.

22. An interferometer assembly as recited in claim 20, wherein said surface of said beamsplitter assembly is optically flat.

23. An interferometer assembly as recited in claim 20, wherein said at least one reflecting surface of said second mirror assembly is optically flat.

24. An interferometer assembly as recited in claim 20, further comprising a third mounting member having an edge, wherein a portion of said edge of said third mounting member is adhered to a portion of a third edge of said top plate and another portion of said edge of said third mounting member is adhered to a portion of a third edge of said bottom plate.

25. An interferometer assembly as recited in claim 24, wherein said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are made of material having substantially the same coefficient of thermal expansion.

26. An interferometer assembly as recited in claim 24, wherein said surfaces and said edges of said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are lapped.

27. An interferometer assembly as recited in claim 24, wherein said top and bottom surfaces of said top plate lie in planes which are substantially parallel to each other, said top and bottom surfaces of said bottom plate lie in planes which are substantially parallel to each other, and said edges of said plates lie in planes which are substantially perpendicular to said planes of said surfaces of said plates.

28. An interferometer assembly as recited in claim 27, wherein said edges of said first mounting member lie in planes which are substantially perpendicular to each other.

29. An interferometer assembly as recited in claim 28, wherein said first surface of said second mounting member and said first edge of said second mounting member lie in planes which are substantially perpendicular to each other.

30. An interferometer assembly as recited in claim 20, wherein said surface of said beamsplitter assembly lies in a plane which is aligned at a substantially 45°

angle to a second plane in which said at least one reflecting surface of said first mirror assembly lies.

31. An interferometer assembly as recited in claim 30, wherein said beamsplitter assembly comprises first and second panels, said first panel having a first surface and said second panel having a second surface, with said panels being joined together along said first and second surfaces.

32. An interferometer assembly as recited in claim 31, wherein said beamsplitter coating is located between said adhered together first and second panels of said beamsplitter assembly.

33. An interferometer assembly as recited in claim 32, wherein said top plate has a plurality of openings extending therethrough in positions proximate to said placement of said beamsplitter assembly and said top plate, so that portions of said beamsplitter assembly are accessible through said openings.

34. An interferometer assembly as recited in claim 20, further comprising a fourth mounting member adhered to said second mounting member and to still another portion of said top surface of said bottom plate, to be in reflecting relation with said beamsplitter assembly.

35. An interferometer assembly as recited in claim 34, said fourth mounting member having at least one opening extending therethrough for translation of radiation therethrough.

36. An interferometer assembly as recited in claim 34, said fourth mounting member having at least two openings extending therethrough, one for translation of radiation therethrough and another having mounted therein a reflecting assembly, wherein said reflecting assembly is in reflecting relation with said first mirror assembly.

37. An interferometer assembly as recited in claim 36, wherein said reflecting assembly of said fourth mounting member is a hollow corner cube retroreflector.

38. An interferometer assembly as recited in claim 37, wherein the reflecting surfaces of said retroreflector of said fourth mounting member face away from said beamsplitter assembly.

39. An interferometer assembly as recited in claim 20, wherein said first mirror assembly is selectively moveable along a path substantially parallel to a path followed by radiation received and/or reflected by said first mirror assembly.

40. An interferometer assembly as recited in claim 39, wherein said first mirror assembly is a hollow corner cube retroreflector.

41. A monolithic optical assembly for use with an interferometer, comprising:

a top plate having top, bottom and edge surfaces;

a bottom plate having top, bottom and edge surfaces;

a first mounting member having first and second edges, wherein a portion of said first edge is adhered to a portion of a first edge of said top plate and another portion of said first edge is adhered to a portion of a first edge of said bottom plate;

a second mounting member having a first surface and a first edge, wherein a portion of said first surface is adhered to a portion of a second edge of said top plate and another portion of said first surface is adhered to a portion of a second edge of said bottom plate;

a first mirror assembly having at least one reflecting surface, wherein said first mirror assembly is adhered between at least two of either said first mounting member and said top plate or said bottom plate, or between said second mounting member and said top plate or said bottom plate;

a beamsplitter assembly having a surface having a beamsplitter coating, said surface being in reflecting relation with said first mirror assembly, and having top and bottom edges, said top edge of said beamsplitter assembly adhered along a portion of said bottom surface of said top plate and said bottom edge of said beamsplitter assembly adhered along another portion of said top surface of said bottom plate, wherein said adhesion of said first and second mounting members and said beamsplitter assembly to said top and bottom plates creates a substantially stable, substantially vibration and shock resistant structure regarding said reflective relationship between said first mirror assembly and said beamsplitter assembly; and

a fourth mounting member adhered to said second mounting member and to still another portion of said top surface of said bottom plate, and extending across an optical path of a radiation beam transmitted through said beamsplitter assembly.

42. A monolithic optical assembly as recited in claim 41, wherein said at least one reflecting surface of said first mirror assembly is optically flat.

43. A monolithic optical assembly as recited in claim 41, wherein said surface of said beamsplitter assembly is optically flat.

44. A monolithic optical assembly as recited in claim 41, said fourth mounting member having at least one opening extending therethrough for translation of radiation therethrough.

45. A monolithic optical assembly as recited in claim 41, said fourth mounting member having at least two openings extending therethrough, one for translation of radiation therethrough and another having mounted therein a reflecting assembly.

46. A monolithic optical assembly as recited in claim 45, wherein said reflecting assembly of said fourth mounting member is a hollow corner cube retroreflector.

47. A monolithic optical assembly as recited in claim 46, wherein the reflecting surfaces of said retroreflector of said fourth mounting member face away from said beamsplitter assembly.

48. A monolithic optical assembly as recited in claim 41, further comprising a third mounting member having an edge, wherein a portion of said edge is adhered to a portion of a third edge of said top plate and another portion of said edge is adhered to a portion of a third edge of said bottom plate.

49. A monolithic optical assembly as recited in claim 48, wherein said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are made of material having substantially the same coefficient of thermal expansion.

50. A monolithic optical assembly as recited in claim 48, wherein said surfaces and said edges of said top and bottom plates, said first, second and third mounting members, said first mirror assembly and said beamsplitter assembly are lapped.

51. A monolithic optical assembly as recited in claim 48, wherein said top and bottom surfaces of said top plate lie in planes which are substantially parallel to each other, said top and bottom surfaces of said bottom plate lie in planes which are substantially parallel to each other, and said edges of said plates lie in planes which are substantially perpendicular to said planes of said surfaces of said plates.

52. A monolithic optical assembly as recited in claim 51, wherein said edges of said first mounting member lie in planes which are substantially perpendicular to each other.

53. A monolithic optical assembly as recited in claim 52, wherein said first surface of said second mounting member and said first edge of said second mounting member lie in planes which are substantially perpendicular to each other.

54. A monolithic optical assembly as recited in claim 41, wherein said surface of said beamsplitter assembly lies in a plane which is aligned at a substantially 45°

angle to a second plane in which said at least one reflecting surface of said first mirror assembly lies.

55. A monolithic optical assembly as recited in claim 54, wherein said beamsplitter assembly comprises first and second panels, said first panel having a first surface and said second panel having a second surface, with said panels being joined together along said first and second surfaces.

56. A monolithic optical assembly as recited in claim 55, wherein said beamsplitter coating is located between said adhered together first and second panels of said beamsplitter assembly.

57. A monolithic optical assembly as recited in claim 56, wherein said top plate has a plurality of openings extending therethrough in positions proximate to said placement of said beamsplitter assembly and said top plate, so that portions of said beamsplitter assembly are accessible through said openings.

58. A retroreflector assembly for use in an interferometer, comprising:

a first panel having a reflecting surface;

a beamsplitter panel having a beamsplitter coating on a surface of said panel, said beamsplitter coating in reflecting relation with said reflecting surface of said first panel; and

a support panel having a receiving surface;

wherein each of said panels has a side at substantially a right angle to said surface of said panel, and wherein each of said panels is abutting and joined along said side to said surface of said panel immediately adjacent to said side.

59. A retroreflector assembly as recited in claim 58, wherein said reflecting surface of said first panel is optically flat.

60. A retroreflector assembly as recited in claim 58, wherein said surface of said beamsplitter panel is optically flat.