Fine pattern inspection device capable of carrying out inspection without pattern recognition

• US 5,949,900 A
• Filed: 03/11/1997
• Issued: 09/07/1999
• Est. Priority Date: 03/11/1996
• Status: Expired due to Fees

• Current Assignee: NEC Electronics Corporation (Renesas Electronics Corporation)
• Original Assignee: NEC Corporation
• Inventors: Komatsu, Yoshikazu, Nakamura, Toyokazu
• Primary Examiner(s): Tran, Phuoc
• Assistant Examiner(s): Mariam, Daniel G.
• Application Number:
  US08/814,342
• Time in Patent Office: 910 Days
• Field of Search: 382/141, 382/144, 382/145, 382/147, 382/149, 348/126
• US Class Current: 382/145
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence
• CPC Class Codes: G06T 2207/10061 from scanning electron microscope
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0002 Inspection of images, e.g. flaw detection
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

In a fine pattern inspection device for inspecting a fine pattern comprising a plurality of pattern elements which have the same form and which are formed on an inspection sample, the device detects a defect in the plurality of pattern elements by the use of an image derived from the fine pattern. An image obtaining unit obtains the image from the fine pattern and produces an image signal representing the image. The image signal is divided into first and second divided image signals. A processing unit extracts a defect image and an inverted defect image that is inverted in lightness of the defect image, by carrying out a first process that gives a predetermined delay to the first divided image signal and then inverts the lightness thereof to obtain a processed image signal and carrying out a second process that adds the processed image signal and the second divided image signal to obtain a difference image signal representing a difference image which includes the defect image and the inverted defect image. A display device displays the defect image and the inverted defect image.

Claims

1. A fine pattern inspection device for inspecting a fine pattern comprising a plurality of pattern elements which have the same form and which are formed on an inspection sample, in order to detect a defect in said plurality of pattern elements by the use of an image derived from said fine pattern, said device comprising:

image obtaining means for obtaining said image from said fine pattern to produce an image signal representing said image, said image signal comprising a plurality of pattern element image signals each of which lasts for a predetermined time duration, said image signal being divided into first and second divided image signals;

a processing unit supplied with said first and said second divided image signals for extracting a defect image and an inverted defect image that is inverted in lightness of said defect image, by carrying out a first process that gives a predetermined delay to said first divided image signal and then inverts the lightness thereof to obtain a processed image signal and carrying out a second process that adds said processed image signal and said second divided image signal to obtain a difference image signal representing a difference image which includes said defect image and said inverted defect image; and

image displaying means supplied with said difference image signal for displaying said defect image and said inverted defect image.

2. A fine pattern inspection device as claimed in claim 1, wherein said processing unit comprises:

a delay circuit supplied with said first divided image signal for giving said predetermined delay to said first divided image signal to produce a delayed image signal;

a lightness inverting circuit supplied with said delayed image signal for inverting the lightness of said delayed image signal to produce a lightness inverted image signal as said processed image signal; and

an adding circuit supplied with said lightness inverted image signal and said second divided image signal for adding said lightness inverted image signal and said second divided image signal to produce said difference image signal.

3. A fine pattern inspection device as claimed in claim 2, wherein said processing unit further comprises a delay adjusting circuit supplied with said difference image signal for controlling said delay circuit so as to have said predetermined delay which is equal to said predetermined time duration or equal to a multiple of said predetermined time duration by detecting a variance value of the lightness in said difference image signal and by adjusting said predetermined delay so that said variance value becomes equal to a minimum value.

4. A fine pattern inspection device as claimed in claim 3, said inspection sample having a reference position predetermined thereon, said defect image and said inverted defect image being defined by positional information on said difference image, said device detecting a position of said pattern element having said defect on said inspection sample by the use of said reference position and at least one of said positional information of said defect image and said inverted defect image.

5. A fine pattern inspection device as claimed in one of claims 1 to 4, wherein said image obtaining means is implemented by a scanning electron microscope.

6. A fine pattern inspection device as claimed in one of claims 1 to 4, wherein said image obtaining means comprises:

a laser beam injector for injecting a laser beam;

a reflection beam detector for detecting a reflection laser beam reflected from said inspection sample; and

scanning means for scanning said inspection sample by said laser beam.

7. A fine pattern inspection device as claimed in one of claims 1 to 4, wherein said image obtaining means comprises:

a light source for irradiating light onto said inspection sample;

image pickup means for picking up said image by detecting reflection light reflected from said inspection sample; and

moving means for moving at least one of said inspection sample and a combination of said light source and said image pickup means.

8. A fine pattern inspection device for inspecting a fine pattern comprising a plurality of fine pattern elements which have the same form and which are formed on an inspection sample, in order to detect a defect in said plurality of fine pattern elements by the use of an image derived from said fine pattern, said device comprising:

image obtaining means for obtaining said image from said fine pattern to produce an image signal representing said image, said image comprising a plurality of fine pattern element image signals each of which lasts for a predetermined time duration, said image signal being divided into first and second divided image signals;

a primary processing unit supplied with said first and said second divided image signals for extracting a primary defect image and a primary inverted defect image that is inverted in lightness of said primary defect image by carrying out a primary first process that gives a predetermined delay to said first divided image signal to produce a primary delayed image signal and then inverts the of said primary delayed image signal to produce a primary inverted image signal in order to obtain a primary processed image signal and carrying out a primary second process that adds said primary processed image signal and said second divided image signal to obtain a primary difference image signal representing a primary difference image which includes said primary defect image and said primary inverted defect image;

a secondary processing unit supplied with said primary delayed image signal for extracting a secondary defect image and a secondary inverted defect image that is inverted in lightness of said secondary defect image by carrying out a secondary first process that gives said predetermined delay to said primary delayed image signal to produce a secondary delayed image signal and then inverts the lightness of said secondary delayed image signal to produces a secondary inverted image signal in order to obtain a secondary processed image signal and carrying out a secondary second process that adds said secondary processed image signal from said primary delayed image signal to obtain a secondary difference image signal representing a secondary difference image which includes said secondary defect image and said secondary inverted defect image;

a first absolute-value circuit supplied with said primary difference image signal for carrying out absolute operation of said primary difference image signal in each of the pattern element images to produce a primary absoluted image signal;

a second absolute-value circuit supplied with said secondary difference image signal for carrying out the absolute operation of said secondary difference image signal in each of the pattern element images to produce a secondary absoluted image signal;

a selecting circuit supplied with said primary and said secondary absoluted image signals for selecting in each of the pattern element images one absoluted image signal that is lower, in absolute value, than another absoluted image signal from said primary and said secondary absoluted image signals to produce a selected image signal representing a selected image which includes said defect image; and

image displaying means supplied with said selected image signal for displaying said defect image.

9. A fine pattern inspection device as claimed in claim 8, wherein said primary processing unit comprises:

a first delay circuit supplied with said first divided image signal for giving said predetermined delay to said first divided image signal to produce said primary delayed image signal;

a first lightness inverting circuit supplied with said primary delayed image signal for inverting the lightness of said primary delayed image signal to produce said primary lightness inverted image signal; and

a first adding circuit supplied with said primary lightness inverted image signal and said second divided image signal for adding said primary lightness inverted image signal and said second divided image signal to produce said primary difference image signal;

said secondary processing unit comprises;

a second delay circuit supplied with said primary delayed image signal for giving said predetermined delay to said primary delayed image signal to produce said secondary delayed image signal;

a second lightness inverting circuit supplied with said secondary delayed image signal for inverting the lightness of said secondary delayed image signal to produce said secondary lightness inverted image signal; and

a second adding circuit supplied with said secondary lightness inverted image signal and said primary delayed image signal for adding said secondary lightness inverted image signal and said primary delayed image signal to produce said secondary difference image signal.

10. A fine pattern inspection device as claimed in claim 9, wherein said primary processing unit further comprises a delay adjusting circuit supplied with said primary difference image signal for controlling said first and said second delay circuits so as to have said predetermined delay which is equal to said predetermined time duration or equal to a multiple of said predetermined time duration by detecting a variance value of the lightness in said primary difference image signal and by adjusting said predetermined delay so that said variance value becomes equal to a minimum value.

11. A fine pattern inspection device as claimed in one of claims 8 to 10, said inspection sample having a reference position predetermined thereon, said defect image being defined by positional information on said selected image, said device detecting a position of said pattern element having said defect on said inspection sample by the use of said reference position and said positional information of said defect image.

12. A fine pattern inspection device as claimed in one of claims 8 to 10, wherein said image obtaining means is implemented by a scanning electron microscope.

13. A fine pattern inspection device as claimed in one of claims 8 to 10, wherein said image obtaining means comprises:

a laser beam injector for injecting a laser beam;

a reflection beam detector for detecting a reflection laser beam reflected from said inspection sample; and

scanning means for scanning said inspection sample by said laser beam.

14. A fine pattern inspection device as claimed in one of claims 8 to 10, wherein said image obtaining means comprises:

a light source for irradiating light onto said inspection sample;

image pickup means for picking up said image by detecting reflection light reflected from said inspection sample; and

moving means for moving at least one of said inspection sample and a combination of said light source and said image pickup means.