Silicon oxide on a substrate

• US 5,952,108 A
• Filed: 09/26/1997
• Issued: 09/14/1999
• Est. Priority Date: 04/29/1993
• Status: Expired due to Term

• Current Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Original Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Inventors: Slootman, Frank, Bouard, Pascal, Coeuret, Fran.cedilla.ois, Prinz, Eckhard, Jouvaud, Dominique
• Primary Examiner(s): PIANALTO, BERNARD D
• Application Number:
  US08/939,079
• Time in Patent Office: 718 Days
• Field of Search: 428/446, 428/450, 428/688, 428/469, 428/336, 428/337, 428/412, 428/473.5, 428/522, 428/523, 427/580, 427/255.3, 427/579
• US Class Current: 428/450
• CPC Class Codes: C23C 16/402 Silicon dioxide
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: Y10S 422/907 Corona or glow discharge means
• CPC Class Codes: Y10T 428/265 1 mil or less
• CPC Class Codes: Y10T 428/266 of base or substrate
• CPC Class Codes: Y10T 428/31507 Of polycarbonate
• CPC Class Codes: Y10T 428/31721 Of polyimide
• CPC Class Codes: Y10T 428/31935 Ester, halide or nitrile of addition polymer
• CPC Class Codes: Y10T 428/31938 Polymer of monoethylenically unsaturated hydrocarbon

Abstract

A product substrate coated with a uniform deposit of silicon oxide created by subjecting the substrate to an electrical discharge with a dielectric barrier in the presence of a controlled atmosphere containing a silane and an oxidizing gas, the atmosphere being at a pressure higher than 10,000 Pa, and wherein the atmosphere is maintained in the immediate vicinity of an electrode in the region where the electrical discharge is produced and further wherein any entrainment of oxygen other than that forming part of the atmosphere in the region is prevented.

Claims

1. A product comprising a deposit of silicon oxide on a substrate formed by a method comprising the steps of moving the substrate through an electrical discharge region;

subjecting the substrate to an electrical discharge in said region in the presence of an atmosphere containing (a) a silane, (b) oxygen or a gaseous compound containing oxygen and (c) a carrier gas;

maintaining said atmosphere at a pressure higher than 10,000 Pa;

circulating said atmosphere in said region and preventing entrainment of oxygen other than that forming part of said atmosphere in said region, thereby forming silicon oxide on said substrate.

2. The product as claimed in claim 1, wherein said electrical discharge is created with a dielectric barrier.

3. The product as claimed in claim 1, wherein said pressure is greater than about 50,000 Pa.

4. The product as claimed in claim 1, wherein said product is in the form of a continuous sheet on a roll.

5. The product as claimed in claim 1, wherein said silane is a silicon hydride.

6. The product as claimed in claim 1, wherein said substrate comprises aluminum.

7. The product as claimed in claim 1, wherein said substrate comprises a thermoplastic material.

8. The product as claimed in claim 1, wherein said substrate comprises a polymeric material.

9. The product as claimed in claim 8, wherein said polymeric material is selected from the group consisting of polyolefin, polyethylene, polypropylene, polystyrene, polyamide, polyvinyl chloride and polycarbonate.

10. The product as claimed in claim 8, wherein said polymeric material is polyolefin.

11. The product as claimed in claim 1, wherein said substrate is a metal.

12. The product as claimed in claim 1, wherein said substrate is in the form of a sheet.

13. The product as claimed in claim 1, wherein said substrate is in the form of a film.

14. The product as claimed in claim 1, wherein said substrate has a thickness between 5 μ

m and 2 cm.

15. The product as claimed in claim 1, wherein said substrate has a thickness between 10 μ

m and 200 μ

m.

16. The product as claimed in claim 1, wherein said product has a surface tension greater than 58 mN/m.

17. A coated product comprising a polymeric substrate coated with a uniform deposit of silicon oxide, wherein said product has a surface tension greater than 58 mN/m.

18. The product as claimed in claim 17, wherein said uniform deposit of silicon oxide has a thickness between about 10 μ

m and 200 μ

m.

19. The product as claimed in claim 18, wherein said product is in the form of a continuous sheet on a roll.

20. The product as claimed in claim 17, wherein said polymeric material is selected from the group consisting of polyolefin, polyethylene, polypropylene, polystyrene, polyamide, polyvinyl chloride and polycarbonate.