Interferometric methods and systems using low coherence illumination

• US 5,953,124 A
• Filed: 01/19/1998
• Issued: 09/14/1999
• Est. Priority Date: 01/19/1998
• Status: Expired due to Term

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Deck, Leslie L.
• Primary Examiner(s): KIM, ROBERT H
• Application Number:
  US09/008,735
• Time in Patent Office: 603 Days
• Field of Search: 356/357, 356/359
• US Class Current: 356/497
• CPC Class Codes: G01B 11/026 by measuring distance between sensor and object G01B11/0608 takes precedence
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 9/02083 characterised by particular signal processing and presentation
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01B 9/04 Measuring microscopes

Abstract

Low coherence illumination is used in interferometric methods and systems which exhibit improved precision and flexibility. According to a first aspect of the invention, both a phase shifting interferometry (PSI) analysis and a scanning white light interferometry (SWLI) analysis are applied to a single 3D interferogram. This allows the precision of PSI to be achieved without being limited by the 2π phase ambiguity constraint. According to another aspect of the invention, a position of a contrast peak of a broad-band 3D interferogram is located by calculating a single Fourier transform coefficient, using the Fourier transform coefficient to determine an analytic equation which corresponds to the derivative of the visibility function, and locating the peak contrast position by setting the derivative equal to zero. The use of analytic equation contrast peak detection improves accuracy and computational efficiency. According to another aspect of the invention, a PSI analysis is applied to a broad-band 3D interferogram generated using a low coherence illumination source. The ability to perform a PSI analysis on a broad-band 3D interferogram promotes flexibility because it allows for a device which can perform both PSI analyses and SWLI analyses without physical alterations to the illumination source.

Claims

1. A method of determining a difference in height between first and second locations on a test surface using a single three-dimensional interferogram, the method comprising the steps of:

(A) producing and acquiring the single three-dimensional interferogram; and

(B) performing both a scanning white light interferometry analysis and a phase shifting interferometry analysis on the single three-dimensional interferogram to determine the difference in height.

2. A method according to claim 1, wherein the producing step is performed using a low coherence illumination source.

3. A method of determining a profile of a test surface, the method comprising the steps of:

(A) producing a three-dimensional interferogram, including the steps of

(1) reflecting a reference light beam and a test light beam, the test light beam being reflected from the test surface,

(2) recombining the reference light beam and the test light beam, and

(3) varying a relative phase between the reference light beam and the test light beam during the performance of steps (A)(1) and (A)(2);

(B) receiving interference data at a plurality of pixels of a photosensitive device, the plurality of pixels including a first pixel which receives light reflected from a first location on the test surface and a second pixel which receives light reflected from a second location on the test surface;

(C) determining a difference in height between the first and second locations, including the steps of

(1) determining a first indication of the difference in height by (a) determining a first temporal position of a first feature of the light received at the first pixel and (b) determining a second temporal position of a second feature of the light received at the second pixel,

(2) determining a second indication of the difference in height by (a) determining a first phase of the light received at the first pixel and (b) determining a second phase of the light received at the second pixel, and

(3) combining the first and second indications of the difference in height; and

(D) determining respective differences in height between a plurality of additional locations on the test surface and the first location by repeating steps (C)(1), (C)(2) and (C)(3) using light received at a remaining one of the plurality of pixels during each repetition of steps (C)(1)(b) and (C)(2)(b).

4. A method according to claim 3, wherein the producing step is performed using a low coherence illumination source.

5. A method according to claim 3, wherein step (C)(1) comprises performing a scanning white light interferometry analysis, and wherein step (C)(2) comprises performing a phase shifting interferometry analysis.

6. A method according to claim 3, wherein the step of determining the first phase further comprises

(A) calculating first and second weighted sums of intensities, the intensities being intensities of the light received at the first pixel measured at a sequence of scan positions, and

(B) calculating an arctangent of the first and second weighted sums of intensities;

and

wherein the step of determining the second phase further comprises repeating the calculating steps (A) and (B) using the light received at the second pixel.

7. A method according to claim 6, wherein the step of determining the first indication of the difference in height further comprises

calculating an elapsed time interval between the occurrence of the first and second features,

calculating the first indication of the difference in height based on the elapsed time interval and a rate of change at which an optical path difference is varied.

8. A method according to claim 3, wherein the step of combining the first and second indications of the difference in height comprises the steps of

using the first indication of the difference in height to determine a fringe order difference between the first and second pixels, and

using the second indication of the difference in height to determine a fractional fringe difference between the first and second pixels.

9. A method according to claim 3,

wherein, during step (A), the reference light beam and the test light beam are produced using a low coherence illumination source,

wherein a portion of a first high contrast region temporally overlaps with a portion of a second high contrast region, the first high contrast region corresponding to the first location and the second high contrast region corresponding to the second location, and

wherein step (C)(2) is performed using the overlapping portions of the first and second high contrast regions.

10. A method according to claim 3, wherein the first feature is a position of a peak of a contrast function, wherein the three dimensional interferogram is comprised of a carrier modulated by the contrast function, and wherein the step of determining the first temporal location further comprises:

(A) digitally sampling an intensity variation of the three-dimensional interferogram to acquire a number N of samples, (B) determining M frequency domain transform coefficients based on the the intensity variation; and

(C) using L frequency domain transform coefficient in an equation which determines the position of the peak of the contrast function, the L frequency domain transform coefficients being among the M frequency domain transform coefficients determined in step (C), and the L frequency domain transform coefficients corresponding to a low frequency component of the intensity variation.

11. A method according to claim 3, wherein the first temporal location of the first feature is calculated based on a first sequence of intensity measurements made by the first pixel, wherein the second temporal location of the second feature is calculated based on a second sequence of intensity measurements made by the second pixel, and wherein all of the measurements of the first and second sequences of intensity measurements are made before step (C) is initiated.

12. An optical interferometer comprising:

an illumination source, the illumination source producing a light beam;

a beam splitter, the beam splitter splitting the light beam into a reference light beam and a test light beam, the test light beam being reflected from a test surface;

a phase shifter, the phase shifter varying the relative phase between the reference light beam and the test light beam;

a photosensitive device, the photosensitive device having an interferogram imaged thereon, the interferogram being a three-dimensional interferogram assembled from a plurality of frames of interferometric data, the interferometric data being produced by a recombination of the reference light beam and the test light beam, the photosensitive device having a plurality of pixels which receive light from a plurality of respective locations on the test surface, including a first pixel which receives light reflected from a first location on the test surface and a second pixel which receives light reflected from a second location on the test surface; and

a computer, the computer being coupled to the photosensitive device, the computer determining relative differences in height between the plurality of locations on the test surface, the relative differences in height being determined based on a combination of a scanning white light interferometry analysis and a phase shifting interferometry analysis both of which are performed on the same three-dimensional interferogram by the computer.

13. An optical interferometer according to claim 12, wherein the illumination source is a low coherence illumination source.

14. An optical interferometer according to claim 13, wherein a portion of a first high contrast region corresponding to the first location temporally overlaps with a portion of a second high contrast region corresponding to the second location, and wherein the phase shifting interferometry analysis is performed on the temporally overlapping portions of the first and second high contrast regions.

15. A method of determining a difference in height between first and second locations on a test surface, the method comprising the steps of:

(A) producing an interferogram using a low coherence illumination source, including the steps of

(1) reflecting a reference light beam from a reference surface and a test light beam, the test light beam being reflected from the test surface,

(2) recombining the reference light beam and the test light beam, and

(3) varying a relative phase between the reference light beam and the test light beam during the performance of steps (A)(1) and (A)(2);

(B) imaging the interferogram on a photosensitive device, the interferogram being imaged over time so as to be a three-dimensional interferogram comprised of a plurality of frames of interferometric data, the photosensitive device including a first pixel which receives light reflected from the first location and a second pixel which receives light reflected from the second location;

(C) performing a scanning white light interferometry analysis on the three-dimensional interferogram to determine a gross indication of the difference in height, including the steps of

(1) determining a first position of a first contrast peak for the light received by the first pixel,

(2) determining a second position of a second contrast peak for the light received by the second pixel,

(3) calculating an elapsed time interval between the occurrence of the first and second contrast peaks, and

(4) calculating the gross indication of the difference in height based on the elapsed time interval and a rate at which the relative phase is varied during step (A)(3);

(D) performing a phase shifting interferometry analysis on the three-dimensional interferogram to determine a fine indication of the difference in height, including the steps of

(1) calculating first and second weighted sums of intensities, the intensities being intensities of the light received at the first pixel measured at a first sequence of scan positions,

(2) calculating a first phase for the light received at the first pixel, including the step of calculating an arctangent of the first and second weighted sums of intensities,

(3) calculating third and fourth weighted sums of intensities, the intensities being intensities of the light received at the second pixel measured at a second sequence of scan positions,

(4) calculating a second phase for the light received at the second pixel, including the step of calculating an arctangent of the third and fourth weighted sums of intensities, and

(5) comparing the first phase with the second phase to yield the fine indication of the difference in height; and

(E) combining the gross indication of the difference in height with the fine indication of the difference in height to determine the difference in height.

16. A method according to claim 15,

wherein a portion of a first high contrast region temporally overlaps with a portion of a second high contrast region, the first high contrast region corresponding to the first location and the second high contrast region corresponding to the second location;

and

wherein a first sequence of optical path difference positions used to calculate the first phase and a second sequence of optical path difference positions used to calculate the second phase occur during the overlapping portions of the first and second high contrast regions, such that step (D) is performed using the overlapping portions of the first and second high contrast regions.

17. A method according to claim 15,

wherein the first position of the first contrast peak is calculated based on data received from a first sequence of scan positions;

wherein the second position of the second contrast peak is calculated based on data received from a second sequence of scan positions;

wherein all of the data from the first sequence of scan positions is received at the first pixel and all of the data from the second sequence of scan positions is received at the second pixel before steps (C) and (D) are initiated.

18. A method of determining a difference in height between first and second locations on a test surface, the method comprising the steps of producing a three-dimensional interferogram using a low coherence illumination source and performing a phase shifting interferometry analysis on the three-dimensional interferogram, the phase shifting interferometry analysis being performed using a first sequence of scan positions for the first location on the test surface and using a different second sequence of scan positions for the second location on the test surface.

19. A method according to claim 18, wherein the step of producing the three-dimensional interferogram further comprises the steps of

(A) reflecting a reference light beam from a reference surface and a test light beam, the test light beam being reflected from the test surface,

(B) recombining the reference light beam and the test light beam, and

(C) varying a relative phase between the reference beam and the test light beam during the performance of steps (A) and (B);

and

wherein the step of performing the phase shifting interferometry analysis further comprises the steps of

(D) imaging the interferogram on a photosensitive device, the photosensitive device including a first pixel which receives light reflected from the first location and a second pixel which receives light reflected from the second location, the light received at the first pixel having a first high contrast region, and the light received at the second pixel having a second high contrast region which is non-overlapping with the first high contrast region; and

(E) determining a first phase of the light received at the first pixel, the first phase being determined using a first sequence of scan positions;

(F) determining a second phase of the light received at the second pixel, the second phase being determined using a second sequence of scan positions which is different than the first sequence of scan positions;

(G) phase connecting the first phase with the second phase; and

(H) determining the difference in height between the first and second locations based on the first and second phases and based on the phase connecting step (G).

20. A method according to claim 19,

wherein step (H) further comprises the step of determining a phase difference between the first phase and the second phase, a first portion of the phase difference being attributable to the difference in height between the first and second locations, and a second portion of the phase difference being attributable to the phase variation which occurs during step (C);

and

wherein step (G) further comprises the step of determining the second portion of the phase difference.

21. A method according to claim 20, wherein the step of determining the second portion of the phase difference further comprises the step of determining a scan variation for a third sequence of scan positions which extends from one of the scan positions of the first sequence of scan positions to one of the scan positions of the second sequence of scan positions, the scan variation being a phase difference, attributable to the scanning which occurs during step (C), between each consecutive scan position of the third sequence of scan positions.

22. A method according to claim 21, wherein the step of determining the scan variation further comprises the steps of

determining temporal phase histories for a plurality of additional pixels which receive light from a plurality of locations whose heights are intermediate to the first and second locations, including the step of temporally unwrapping phase measurements from each of the plurality of additional pixels;

and

temporally phase stitching the temporal phase histories to produce a stitched temporal phase history.

23. A method according to claim 22 wherein, at each one of the scan positions of the third sequence of scan positions, the phase difference between each consecutive scan position is determined using a plurality of pixels, such that the scan variation is an average scan variation.

24. A method according to claim 23, wherein steps (E) and (F) each comprise the steps of

performing a least-squares fit of a measured intensity variation to an expected intensity variation using the average scan variation;

solving for unknowns of the least-squares fit to determine a respective one of the first phase and the second phase.

25. A method according to claim 19, wherein the photosensitive device comprises a total of N pixels receiving light from a total of N locations on the test surface, the N pixels including the first and second pixels and the N locations including the first and second locations, and wherein the method further comprises the steps of:

histogramming the N pixels according to the relative heights of the N locations;

grouping the N pixels according to height to form M groups of pixels corresponding to M groups of locations on the test surface;

performing a phase shifting interferometry analysis within each of the M groups of pixels, so as to determine the relative heights of locations within each of the M groups of locations; and

phase connecting the M groups so as to determine the heights of all of the N locations relative to all other of the N locations.

26. A method of determining a difference in height between first and second locations on a test surface using an interferometer, the method comprising the steps of:

(A) producing an interferogram using a low coherence illumination source, including the steps of

(1) reflecting a reference light beam from a reference surface and a test light beam, the test light beam being reflected from the test surface,

(2) recombining the reference light beam and the test light beam, and

(3) varying a relative phase between the reference light beam and the test light beam during the performance of steps (A)(1) and (A)(2) such that the interferogram is a three-dimensional interferogram;

(B) imaging the interferogram on a photosensitive device, the interferogram being imaged over time so as to be a three-dimensional interferogram comprised of a plurality of frames of interferometric data, the photosensitive device including a first pixel which receives light reflected from the first location and a second pixel which receives light reflected from the second location;

(C) determining information regarding scan variation throughout a range of scan positions, including the steps of

(1) determining a first temporal phase history for the light reflected from the first location, including the step of temporally unwrapping the phase of the light reflected from the first location,

(2) determining a second temporal phase history for the light reflected from the second location, including the step of temporally unwrapping the phase of the light reflected from the second location, and

(3) temporally stitching the first temporal phase history together with the second temporal phase history to form a stitched temporal phase history;

(D) determining a first phase of the light received at the first pixel using a first sequence of scan positions, and determining a second phase of the light received at the second pixel using a second sequence of scan positions; and

(E) determining the difference in height using the three-dimensional interferogram, including the steps of determining a phase difference between the first phase and the second phase, a first portion of the phase difference being attributable to the difference in height between the first and second locations, and a second portion of the phase difference being attributable to the variation in phase which occurs during step (A)(3), and phase connecting the first sequence of scan positions with the second sequence of scan positions using the scan variation information By determining the second portion of the phase difference using the scan variation information to determine the second portion of the phase difference using the scan variation information.

27. A method according to claim 26, wherein the scan variation information is average scan variation information determined using a plurality of pixels at each scan position of the range of scan positions.