Method and apparatus for optical data analysis

• US 5,953,446 A
• Filed: 10/09/1998
• Issued: 09/14/1999
• Est. Priority Date: 05/17/1996
• Status: Expired due to Term

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Inventors: Opsal, Jon, Sidorowich, John J.
• Primary Examiner(s): Couso, Jose L.
• Assistant Examiner(s): Dang, Duy M.
• Application Number:
  US09/169,753
• Time in Patent Office: 340 Days
• Field of Search: 382/141, 382/142, 382/143-152, 395/10, 395/13, 250/560, 356/381, 356/382, 364/444, 364/554, 364/513
• US Class Current: 382/141
• CPC Class Codes: G01N 21/8422 Investigating thin films, e.g. matrix isolation method

Abstract

An optical inspection device generates a plurality of measured optical data from inspection of a thin film stack. A processor evolves models of theoretical data, which are compared to the measured data, and a "best fit" solution is provided as the result. Each model of theoretical data is represented by an underlying "genotype" which is an ordered list of "genes." Each gene corresponds to a selected thin film parameter of interest. Many such individual genotypes are created thereby forming a "population" of genotypes, which are evolved through the use of a genetic algorithm. Each genotype has a fitness associated therewith based on how much the theoretical data derived therefrom differs from the measured data. Individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained.

Claims

1. A method for evaluating parameters of a semiconductor wafer comprising:

identifying a group of parameters associated with the semiconductor wafer to be evaluated;

defining a genotype as a collection of genes, each gene corresponding to a selected one of the group of parameters to be evaluated;

defining a population as a collection of genotypes;

initializing a current population with theoretical parameters corresponding to the actual parameters of the semiconductor wafer to be evaluated;

for each group of theoretical parameters, deriving a set of theoretical data corresponding thereto;

inspecting the semiconductor wafer and generating therefrom a set of measured data;

comparing the set of measured data to the sets of derived theoretical data for each genotype to determine a level of fitness for each genotype;

evolving a next population by selecting at least one genotype from the current population based on the fitness level of the genotype and performing a genetic operation on the at least one genotype, thereby creating at least one new genotype and adding the at least one new genotype to the next population; and

repeating the comparing and evolving steps so that the theoretical parameters of the selected genotype become increasingly more representative of the actual parameters of the semiconductor wafer.

2. The method of claim 1 wherein the likelihood of selecting a genotype from the current population is proportional to how close the derived theoretical data associated with that genotype matches the measured data.

3. The method of claim 1 wherein the level of fitness of a genotype is determined by calculating the fitness as a function of the difference between the theoretical data and the measured data.

4. The method of claim 1 wherein the performing step includes reproducing an identical copy of the at least one genotype.

5. The method of claim 1 wherein the performing step includes selecting a gene from the at least one genotype and mutating the gene.

6. The method of claim 1 wherein the performing step includes selecting corresponding genes in a pair of genotypes and exchanging the genes.

7. The method of claim 6 wherein the step of selecting a gene includes randomly selecting the gene.

8. The method of claim 7 wherein the step of selecting corresponding genes includes randomly selecting the genes.

9. The method of claim 1 wherein the semiconductor wafer is optically inspected.

10. The method of claim 1 wherein the semiconductor wafer is optically inspected.

11. A method for evaluating parameters of a semiconductor wafer comprising:

identifying a group of parameters associated with the semiconductor wafer to be measured;

mapping the parameters into a genotype, said genotype comprising a plurality of genes, each gene being correlated to a respective one of the group of parameters to be measured;

defining a population of genotypes;

deriving a set of theoretical data for each genotype based on the parameters in each genotype;

inspecting the semiconductor wafer and generating therefrom a set of measured data;

comparing the set of derived theoretical data associated with each genotype to the set of measured data and assigning a fitness to each genotype based on the comparison;

evolving a new population of genotypes by selecting at least one genotype from the current population based on the fitness of the genotype and performing a genetic operation on the at least one genotype to form at least one new genotype, said genetic operation being selected from one of the following;

reproducing an identical copy of the at least one genotype;

selecting a gene from the at least one genotype and mutating the gene;

or selecting corresponding genes in a pair of genotypes and exchanging the genes, and adding the at least one new genotype to a next population; and

repeating the comparing and evolving steps to select the genotype associated with the set of theoretical data having a best fit with the set of measured data, with the parameters of the selected genotype being increasingly more representative of the parameters of the semiconductor wafer.

12. The method of claim 11 wherein the step of selecting at least one genotype includes selecting at least one genotype in proportion to its fitness.

13. The method of claim 11 wherein the step of selecting a gene includes randomly selecting the gene.

14. The method of claim 11 wherein the step of selecting corresponding genes includes randomly selecting the genes.

15. A system for evaluating parameters of a semiconductor wafer comprising:

a device for inspecting the semiconductor wafer and generating therefrom a set of measured data; and

a processor for generating a population of genotypes, each genotype having a collection of genes, each gene corresponding to a theoretical parameter of said semiconductor wafer, said theoretical parameters corresponding to the actual parameters of the semiconductor wafer to be evaluated and deriving sets of theoretical data corresponding to each genotype, said processor comparing the derived sets of theoretical data for each genotype to the measured data to determine a level of fitness for each genotype, said processor evolving a new population of genotypes by selecting at least one genotype from the current population based on the fitness level of the genotype and performing a genetic operation on the at least one genotype and adding the at least one new genotype to a next population, said processor further selecting the genotype having a set of theoretical data which best matches the measured data, with the theoretical parameters of the selected genotype being increasingly more representative of the actual parameters associated with the semiconductor wafer.

16. The system of claim 15 wherein said processor including a plurality of memory stores organized into populations, each population having a plurality of genotypes, each genotype having a plurality of genes, wherein each gene is an individual memory store correlated to a respective one of the parameters to be evaluated, and wherein said processor functions to evolve a plurality of populations by performing genetic operations on at least one selected genotype.

17. The system of claim 16 wherein the processor further functions to perform various operations including reproducing an identical copy of the at least one genotype, selecting a gene from the at least one genotype and mutating the gene, and by selecting corresponding genes in a pair of genotypes and exchanging the genes.

18. The system of claim 15 wherein said device functions to optically inspect the semiconductor wafer.