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Asymmetrical thermal actuation in a microactuator

  • US 5,954,079 A
  • Filed: 04/30/1996
  • Issued: 09/21/1999
  • Est. Priority Date: 04/30/1996
  • Status: Expired due to Fees
First Claim
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1. A method for asymmetrical thermal activation of a microactuator, comprising the steps of:

  • providing an actuator member in the microactuator, said actuator member having an actuator face on a central body and having a plurality of spaced, layered regions extending from said central body to a peripheral region, wherein first and second layers of said layered regions have substantially different coefficients of thermal expansion; and

    effecting asymmetrical thermal actuation of said layered regions wherein said asymmetrical thermal actuation causes rotational displacement of said actuator face from a first rest position to a second actuated position.

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