Asymmetrical thermal actuation in a microactuator

• US 5,954,079 A
• Filed: 04/30/1996
• Issued: 09/21/1999
• Est. Priority Date: 04/30/1996
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Alley, Rodney L., Barth, Phillip W., Wang, Tak Kui
• Primary Examiner(s): CHAMBERS, A MICHAEL
• Application Number:
  US08/640,011
• Time in Patent Office: 1,239 Days
• Field of Search: 251/11, 251/129.01, 137/13
• US Class Current: 137/13
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: Y10T 137/0391 Affecting flow by the addition of material or energy

Abstract

A microminiature valve having an actuator member that includes a central body suspended on radially spaced legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. An actuator member includes a boss having an actuator face. A seat substrate having a flow via defined by a valve seat is aligned with the actuator face. Asymmetrical thermal actuation of the actuator member moves the actuator face from the valve seat in a rotational displacement relative to the flow orifice, thereby offering improved control of the fluid flow through the orifice.

Claims

1. A method for asymmetrical thermal activation of a microactuator, comprising the steps of:

providing an actuator member in the microactuator, said actuator member having an actuator face on a central body and having a plurality of spaced, layered regions extending from said central body to a peripheral region, wherein first and second layers of said layered regions have substantially different coefficients of thermal expansion; and

effecting asymmetrical thermal actuation of said layered regions wherein said asymmetrical thermal actuation causes rotational displacement of said actuator face from a first rest position to a second actuated position.

3. The microactuator of claim 1 wherein said layered regions are distributed asymmetrically with respect to said central body.

4. The microactuator of claim 1, wherein said asymmetrical thermal actuation means includes heating elements operatively coupled to selected portions of said layered region and wherein said heating elements being located asymmetrically so as to effect a corresponding asymmetrical pattern of heat in said selected portions of said layered regions.

5. The microactuator of claim 1, wherein said asymmetrical thermal actuation means includes heating elements operatively coupled to selected portions of said layered region and further comprising means to activate selected ones of said heating elements so as to obtain, when activated, a greater amount of heat in selected portions of said layered regions as compared to other portions of said layered regions.

6. The microactuator of claim 1 wherein said layered regions are bimorphic, radially extending legs arranged in opposing pairs and wherein said asymmetrical thermal actuation means further comprises means for heating selected ones of said pairs of legs, wherein the opposing legs in said pair are differentially heated to thereby effect asymmetrical thermal actuation of the actuator member.

7. The microactuator of claim 1 wherein a leg includes operable first and second layers of said layered regions, while a selected other leg lacks operable first and second layers of said layered regions, whereby activation of the operable first and second layers thereby causes asymmetrical thermal actuation of the actuator member.

2. A microactuator, comprising:

an actuator member having an actuator face on a central body having a plurality of spaced, layered regions extending from said central body to a peripheral region, wherein first and second layers of said layered regions have substantially different coefficients of thermal expansion, and means, thermally coupled to said layered regions, for effecting asymmetrical thermal actuation of said layered regions, wherein said means for asymmetrical thermal actuation causes rotational displacement of said actuator face from a first rest position to a second actuated position.

8. A microminiature valve for controlling the flow of a fluid comprising:

a seat substrate having a flow orifice defined therethrough, a flexural member coupled to said seat substrate to selectively block said flow orifice, said flexural member having an actuator face on a central body in alignment with said flow orifice and having a plurality of spaced, layered regions extending from said central body to a peripheral region, first and second layers of said layered regions having substantially different coefficients of thermal expansion, and means, thermally coupled to said layered regions, for asymmetrical thermal actuation of said layered regions wherein said means for asymmetrical thermal actuation, when operated, causes rotational displacement of said actuator face relative to said flow orifice.

9. The valve of claim 8 further comprising suspension means for supporting said layered regions to one of said central body and said peripheral region, said suspension means having slots aligned to accommodate rotational motion and thermal expansion of said layered regions.

10. The valve of claim 8 wherein said layered regions are distributed asymmetrically with respect to said central body.

11. The valve of claim 8 wherein said layered regions are bimorphic, radially extending legs.

12. The valve of claim 11 wherein said legs are arranged in opposing pairs and wherein said asymmetrical thermal actuation means further comprises means for heating selected pairs of legs wherein the opposing legs in said pair are differentially heated so as to effect asymmetrical thermal actuation of the layered regions.

13. The valve of claim 11 wherein selected leg includes an operable bimetallic member, while certain other legs lack an operable bimetallic member, whereby activation of the operable bimetallic members thereby causes asymmetrical thermal actuation of the actuator member.

14. The valve of claim 11 wherein said radially extending legs are distributed asymmetrically with respect to said central body of said flexural member.

15. The valve of claim 11 wherein said asymmetrical thermal actuation means includes heating elements operatively coupled to selected portions of said layered regions.

16. The valve of claim 15 further comprising means to activate selected ones of said heating elements so as to obtain, when activated, asymmetrical thermal actuation of said layered regions.

17. The valve of claim 15 wherein said heating elements exhibit differing resistance values so as to obtain, when activated, asymmetrical thermal actuation of said layered regions.

18. The valve of claim 8 wherein said valve seat and said central body are laterally offset to a degree sufficient to cause asymmetrical heat dissipation and wherein said asymmetrical heat dissipation causes asymmetrical thermal actuation of said layered region.