Method for controlling etch rate when using consumable electrodes during plasma etching

• US 5,955,383 A
• Filed: 01/22/1997
• Issued: 09/21/1999
• Est. Priority Date: 01/22/1997
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Hwang, Yuan-Ko
• Primary Examiner(s): Breneman, Bruce
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US08/787,196
• Time in Patent Office: 972 Days
• Field of Search: 438/7, 438/8, 438/9, 438/14, 438/729, 438/FOR 101, 438/FOR 102, 438/FOR 141, 438/FOR 142, 216/67, 216/71, 216/59, 204/298.03, 204/298.32, 204/192.13, 204/192.33, 156/345, 118/723 R, 118/723 E, 118/712, 118/714
• US Class Current: 438/729
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/31116 by dry-etching

Abstract

A method and apparatus to improve process control during plasma etching of semiconductor substrates. Improvements are directed towards controlling the rate of etching when using consumable electrodes. Consumable electrode materials are used to increase selectivity in certain plasma etching processes as in via. contact. or in SOG etch. A consumable electrode material has a significant effect on processing time due to changing gap dimension between electrodes. This invention teaches how to adjust for process variables by using feedback from two strategically placed pressure manometers.

Claims

1. A method for controlling etching rate for semiconductor substrates during a plasma assisted chemical etching process when using a consumable upper electrode and a non-consumable lower electrode to extend process selectivity comprising the steps of:

a) providing a first pressure manometer to measure chamber pressure in the vicinity of the lower non-consumable electrode;

b) providing a second pressure manometer to measure a gap pressure between the upper consumable and lower non-consumable electrode;

c) providing automatic means for adjusting the upper consumable electrode to maintain a fixed gap dimension intermediate the upper consumable and lower non-consumable electrodes;

d) establishing process parameters using feedback from the first and second pressure manometers;

e) establishing an ideal gap dimension intermediate the upper consumable and lower non-consumable electrodes as a reference point to adjust to and compensate for wearing away of the consumable upper electrode; and

f) automatically adjusting the gap dimension and the chamber pressure by either on-line or off-line options.

2. The plasma assisted chemical etching processing method according to claim 1, wherein feedback from said first and second pressure manometers is applied to holdconstant a gap pressure between the upper consumable and a lower non-consumable electrodes using a pressure controller and a gap controller.

3. The plasma assisted chemical etching processing method according to claim 1, wherein feedback from said first pressure manometer controls the chamber pressure to within a process parameter.

4. The plasma assisted chemical etching processing method according to claim 1, wherein feedback from said second pressure manometer is repeatedly converted to gap adjustment counts by a gap controller and used to automatically drive the upper consumable electrode to a new position by a gap driver and to make the new position conform to a predetermined ideal gap dimension.

5. The plasma assisted chemical etching processing method according to claim 1, wherein selecting said on-line option automatically adjusts the gap dimension thereby ensuring a preset ideal gap pressure intermediate the upper consumable electrode and lower non-consumable electrode for each semiconductor substrate before plasma etching begins.

6. The plasma assisted chemical etching processing method according to claim 1, wherein said off-line option, to adjust the gap dimension, ensure a preset ideal gap pressure intermediate the upper consumable electrode and lower non-consumable electrode after a preset number of semiconductor substrates are processed.