Electrostatically-actuated structures for fluid property measurements and related methods

• US 5,955,659 A
• Filed: 01/13/1998
• Issued: 09/21/1999
• Est. Priority Date: 01/13/1998
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Gupta, Raj K., Senturia, Stephen D.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): WIGGINS, JOHN DAVID
• Application Number:
  US09/005,919
• Time in Patent Office: 616 Days
• Field of Search: 73/54.01, 73/53.01, 73/23.31, 73/23.2, 73/24.01, 73/23.29, 73/24.06, 73/30.04, 73/31.05, 73/31.03, 73/19.03, 73/778, 73/780 , 73/599, 73/861.47, 422/88, 37/92, 340/632, 361/281, 361/290, 361/283.4, 361/283.2
• US Class Current: 73/54.01
• CPC Class Codes: G01F 1/28 by drag-force, e.g. vane type or impact flowmeter
• CPC Class Codes: G01F 1/383 with electrical or electro-mechanical indication
• CPC Class Codes: G01F 1/50 Correcting or compensating means
• CPC Class Codes: G01L 21/02 having a compression chamber in which gas, whose pressure is to be measured, is compressed
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01N 11/00 Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties

Abstract

A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.

Claims

1. A fluid property sensor comprising:

a substrate including a first electrode;

a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode;

a signal generator which generates a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member is dependent on a property of a fluid adjacent said flexible member; and

a measuring circuit which measures the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance and that determines the property of the fluid adjacent said flexible member based on said interval of time.

2. A fluid property sensor according to claim 1 wherein said measuring circuit determines a viscosity of said fluid adjacent said flexible member based on said interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance.

3. A fluid property sensor according to claim 1 wherein said fluid comprises a compressible gas and wherein said measuring circuit determines an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance.

4. A fluid property sensor according to claim 1 wherein said flexible member is spaced apart from said substrate and said first electrode when in a non-deflected state, and a wherein said signal generator generates the predetermined electrical signal so that an attractive electrostatic force is generated between said first and second electrodes so that said flexible member deflects toward said substrate.

5. A fluid property sensor according to claim 4 wherein said electrostatic force is sufficient to cause a large enough deflection that said flexible member deflects toward said substrate so that said first and second electrodes make electrical contact and wherein said interval of time is measured between the generation of said predetermined electrical signal and said electrical contact between said first and second electrodes.

6. A fluid property sensor according to claim 1 wherein said flexible member comprises a polysilicon member.

7. A fluid property sensor according to claim 1 wherein said flexible member comprises a beam supported at one end thereon.

8. A fluid property sensor according to claim 1 wherein said flexible member comprises a beam supported at both ends thereof.

9. A fluid property sensor according to claim 1 wherein said flexible member comprises a plate supported by at least one beam.

10. A fluid property sensor according to claim 9 wherein said plate is rectangular.

11. A fluid property sensor according to claim 1 wherein said flexible member comprises a diaphragm.

12. A fluid property sensor according to claim 11 wherein said diaphragm defines a cavity between said diaphragm and said first electrode and wherein said cavity is vented.

13. A fluid property sensor according to claim 12 wherein said cavity is vented through holes in said diaphragm.

14. A fluid property sensor according to claim 1 wherein said first electrode comprises a polysilicon layer on said substrate.

15. A fluid property sensor according to claim 1 further comprising:

a package defining a hermetically sealed cavity surrounding said flexible member and said first electrode.

16. A fluid property sensor according to claim 15 further comprising:

an electronic device in said sealed cavity.

17. A fluid property sensor according to claim 15 further comprising:

a microelectromechanical structure in said sealed cavity.

18. A fluid property sensor according to claim 1 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

19. A fluid property sensor according to claim 1 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.

20. A method of measuring a property of a fluid, said method comprising the steps of:

providing a substrate including a first electrode;

providing a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode and wherein the fluid is adjacent said flexible member;

generating a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;

measuring the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance; and

determining the property of the fluid adjacent said flexible member based on said interval of time.

21. A method according to claim 20 wherein said determining step comprises determining a viscosity of said fluid adjacent said flexible member based on said interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined s distance.

22. A method according to claim 20 wherein said fluid comprises a compressible gas and wherein said determining step comprises determining an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance.

23. A method according to claim 20 wherein said flexible member is spaced apart from said substrate and said first electrode when in a non-deflected state, and a wherein said predetermined electrical signal generates an attractive electrostatic force between said first and second electrodes so that said flexible member deflects toward said substrate.

24. A method according to claim 23 wherein said flexible member deflects toward said substrate so that said first and second electrodes make electrical contact and wherein said interval of time is measured between the generation of said predetermined electrical signal and said electrical contact between said first and second electrodes.

25. A method according to claim 20 wherein said flexible member comprises a polysilicon member.

26. A method according to claim 20 wherein said flexible member comprises a beam supported at one end thereof.

27. A method according to claim 20 wherein said flexible member comprises a beam supported at both ends thereof.

28. A method according to claim 20 wherein said flexible member comprises a plate supported by at least one beam.

29. A method according to claim 28 wherein said plate is rectangular.

30. A method according to claim 20 wherein said flexible member comprises a diaphragm.

31. A method according to claim 30 wherein said diaphragm defines a cavity between said diaphragm and said first electrode and wherein said cavity is vented.

32. A method according to claim 31 wherein said cavity is vented through holes in said diaphragm.

33. A method according to claim 31 wherein said first electrode comprises a polysilicon layer on said substrate.

34. A method according to claim 20 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

35. A method according to claim 20 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.

36. A method of forming a fluid property sensor, said method comprising the steps of:

forming a substrate including a first electrode;

forming a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode adjacent said first electrode;

providing a signal generator which generates a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member; and

providing a measuring circuit which measures the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance, and which determines the property of the fluid adjacent said flexible member based on said interval of time.

37. A method according to claim 36 wherein said measuring circuit determines a viscosity of said fluid adjacent said flexible member based on said interval of time between the generation of the predetermined electrical signal and the deflection of said flexible member to said predetermined distance.

38. A method according to claim 36 wherein said fluid comprises a compressible gas and wherein said measuring circuit determines an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance.

39. A method according to claim 36 wherein said flexible member is spaced apart from said substrate and said first electrode when in a non-deflected state, and a wherein said signal generator generates the predetermined electrical signal so that an attractive electrostatic force is generated between said first and second electrodes so that said flexible member deflects toward said substrate.

40. A method according to claim 39 wherein said flexible member deflects toward said substrate so that said first and second electrodes make electrical contact and wherein said interval of time is measured between the generation of said predetermined electrical signal and said electrical contact between said first and second electrodes.

41. A method according to claim 36 wherein said flexible member comprises a polysilicon member.

42. A method according to claim 36 wherein said flexible member comprises a beam supported at one end thereon.

43. A method according to claim 36 wherein said flexible member comprises a beam supported at both ends thereof.

44. A method according to claim 36 wherein said flexible member comprises a plate supported by at least one beam.

45. A method according to claim 44 wherein said plate is rectangular.

46. A method according to claim 36 wherein said flexible member comprises a diaphragm.

47. A method according to claim 46 wherein said diaphragm defines a cavity between said diaphragm and said first electrode and wherein said cavity is vented.

48. A method according to claim 47 wherein said cavity is vented through holes in said diaphragm.

49. A method according to claim 47 wherein said first electrode comprises a polysilicon layer on said substrate.

50. A method according to claim 36 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

51. A method according to claim 36 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.

52. A fluid property sensor comprising:

a flexible member adjacent a substrate;

generator means for generating a force so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member; and

a measuring means for measuring the interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance and for determining the property of the fluid adjacent said flexible member based on said interval of time.

53. A fluid property sensor according to claim 52 wherein said measuring means determines a viscosity of said fluid adjacent said flexible member based on said interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance.

54. A fluid property sensor according to claim 52 wherein said fluid comprises a compressible gas and wherein said measuring means determines an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance.

55. A fluid property sensor according to claim 52 wherein said flexible member is spaced apart from said substrate when in a non-deflected state, and a wherein said flexible member deflects toward said substrate responsive to said force.

56. A fluid property sensor according to claim 55 wherein said flexible member deflects toward said substrate so that said flexible member and said substrate make contact and wherein said interval of time is measured between the generation of said force and said contact between said flexible member and said substrate.

57. A fluid property sensor according to claim 52 wherein said generator means generates one of an electrostatic force, an electromagnetic force, a piezoelectric force, and an electrothermal force.

58. A fluid property sensor according to claim 52 wherein said measuring means determines said deflection of said flexible member using one of tunneling current measurements, piezoresistive measurements, resonant strain gauge measurements, capacitance measurements, magnetic proximity measurements, and optical detection measurements.

59. A fluid property sensor according to claim 52 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

60. A fluid property sensor according to claim 52 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.

61. A method of measuring a property of a fluid using a sensor including a substrate and a flexible member adjacent the substrate, wherein the fluid is adjacent the flexible member, said method comprising the steps of:

applying a force to said flexible member so that said flexible member deflects a predetermined distance wherein an interval of time between the application of said force and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;

measuring the interval of time between the application of said force and the deflection of said flexible member to said predetermined distance; and

determining the property of the fluid adjacent said flexible member based on said interval of time.

62. A method according to claim 61 wherein said determining step comprises determining a viscosity of said fluid adjacent said flexible member based on said interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance.

63. A method according to claim 61 wherein said fluid comprises a compressible gas and wherein said determining step comprises determining an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance.

64. A method according to claim 61 wherein said flexible member is spaced apart from said substrate when in a non-deflected state, and wherein said force generates an attractive force so that said flexible member deflects toward said substrate responsive to said force.

65. A method according to claim 64 wherein said flexible member deflects toward said substrate so that said flexible member and said substrate make contact and wherein said interval of time is measured between the generation of said force and said contact between flexible member and said substrate.

66. A method according to claim 61 wherein said step of generating said force comprises generating one of an electrostatic force, an electromagnetic force, a piezoelectric force, and an electrothermal force.

67. A method according to claim 61 wherein said deflection of said flexible member is determined using one of tunneling current measurements, piezoresistive measurements, resonant strain gauge measurements, capacitance measurements, magnetic proximity measurements, and optical detection measurements.

68. A method according to claim 61 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

69. A method according to claim 61 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.

70. A fluid property sensor comprising:

a flexible member adjacent a substrate;

an actuator which applies a predetermined force to said flexible member so that said flexible member deflects a predetermined distance wherein an interval of time between the application of said force to said flexible member and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member; and

a measuring circuit which measures the interval of time between the application of said force to said flexible member and the deflection of said flexible member to said predetermined distance and for determining the property of the fluid adjacent said flexible member based on said interval of time.

71. A fluid property sensor according to claim 70 wherein said measuring circuit determines a viscosity of said fluid adjacent said flexible member based on said interval of time between the application of said force and the deflection of said flexible member to said predetermined distance.

72. A fluid property sensor according to claim 70 wherein said fluid comprises a compressible gas and wherein said measuring circuit determines an absolute pressure of said compressible gas adjacent said flexible member based on said interval of time between the application of said force and the deflection of said flexible member to said predetermined distance.

73. A fluid property sensor according to claim 70 wherein said flexible member is spaced apart from said substrate when in a non-deflected state, and wherein said flexible member deflects toward said substrate responsive to said force.

74. A fluid property sensor according to claim 73 wherein said flexible member deflects toward said substrate so that said substrate and flexible member make contact and wherein said interval of time is measured between the application of said force and said contact between said flexible member and said substrate.

75. A fluid property sensor according to claim 70 wherein said actuator applies one of an electrostatic force, an electromagnetic force, a piezoelectric force, and an electrothermal force.

76. A fluid property sensor according to claim 70 wherein said measuring circuit determines said deflection of said flexible member using one of tunneling current measurements, piezoresistive measurements, resonant strain gauge measurements, capacitance measurements, magnetic proximity measurements, and optical detection measurements.

77. A fluid property sensor according to claim 70 wherein at least an edge of said flexible member is free of support and wherein fluid communication around said edge of said flexible member is provided for the fluid adjacent said flexible member.

78. A fluid property sensor according to claim 70 wherein fluid communication through a hole in said flexible member is provided for the fluid adjacent said flexible member.